1
|
Rahman IKMR, Kim T, Kim I, Higashitarumizu N, Wang S, Wang S, Kim HM, Bullock J, Altoe V, Ager JW, Chrzan DC, Javey A. Thermally Stable Ruthenium Contact for Robust p-Type Tellurium Transistors. NANO LETTERS 2025. [PMID: 40019279 DOI: 10.1021/acs.nanolett.4c06553] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/01/2025]
Abstract
Tellurium (Te) is attractive for p-channel transistors due to its high hole mobility. Despite having a low thermal budget suitable for back-end-of-line (BEOL) monolithic integration, the practical realization of Te transistors is hindered by its thermal stability. In this work, we investigate thermal stability for Te thin films grown via scalable thermal evaporation. Our findings identify ruthenium as a more thermally stable contact for p-type Te transistors, capable of withstanding temperatures up to 250 °C. Ruthenium exhibits significantly lower diffusivity in Te compared to other contact metals commonly used such as nickel and palladium. Using the transfer-length method, we measured a contact resistance of 1.25 kΩ·μm at the ruthenium-tellurium interface. Additionally, the incorporation of high-κ ZrO2 encapsulation not only suppresses the sublimation of the Te channel at elevated temperatures but also serves as the gate dielectric in top-gate devices operating at 1 V, achieving an on/off current ratio of 105.
Collapse
Affiliation(s)
- I K M Reaz Rahman
- Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- Department of Electrical and Electronic Engineering, Bangladesh University of Engineering and Technology, Dhaka 1205, Bangladesh
| | - Taehoon Kim
- Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - Inha Kim
- Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - Naoki Higashitarumizu
- Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- JST, PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
| | - Shu Wang
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- Department of Materials Science and Engineering, University of California, Berkeley, California 94720, United States
| | - Shifan Wang
- Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- Department of Electrical and Electronic Engineering, University of Melbourne, Melbourne, VIC 3010, Australia
| | - Hyong Min Kim
- Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - James Bullock
- Department of Electrical and Electronic Engineering, University of Melbourne, Melbourne, VIC 3010, Australia
| | - Virginia Altoe
- The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - Joel W Ager
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- Department of Materials Science and Engineering, University of California, Berkeley, California 94720, United States
| | - Daryl C Chrzan
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- Department of Materials Science and Engineering, University of California, Berkeley, California 94720, United States
| | - Ali Javey
- Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- Kavli Energy NanoScience Institute, University of California, Berkeley, California 94720, United States
| |
Collapse
|
2
|
Zha J, Dong D, Huang H, Xia Y, Tong J, Liu H, Chan HP, Ho JC, Zhao C, Chai Y, Tan C. Electronics and Optoelectronics Based on Tellurium. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2408969. [PMID: 39279605 DOI: 10.1002/adma.202408969] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/23/2024] [Revised: 08/28/2024] [Indexed: 09/18/2024]
Abstract
As a true 1D system, group-VIA tellurium (Te) is composed of van der Waals bonded molecular chains within a triangular crystal lattice. This unique crystal structure endows Te with many intriguing properties, including electronic, optoelectronic, thermoelectric, piezoelectric, chirality, and topological properties. In addition, the bandgap of Te exhibits thickness dependence, ranging from 0.31 eV in bulk to 1.04 eV in the monolayer limit. These diverse properties make Te suitable for a wide range of applications, addressing both established and emerging challenges. This review begins with an elaboration of the crystal structures and fundamental properties of Te, followed by a detailed discussion of its various synthesis methods, which primarily include solution phase, and chemical and physical vapor deposition technologies. These methods form the foundation for designing Te-centered devices. Then the device applications enabled by Te nanostructures are introduced, with an emphasis on electronics, optoelectronics, sensors, and large-scale circuits. Additionally, performance optimization strategies are discussed for Te-based field-effect transistors. Finally, insights into future research directions and the challenges that lie ahead in this field are shared.
Collapse
Affiliation(s)
- Jiajia Zha
- Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, SAR, 999077, China
| | - Dechen Dong
- Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, SAR, 999077, China
| | - Haoxin Huang
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong, SAR, 999077, China
| | - Yunpeng Xia
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong, SAR, 999077, China
| | - Jingyi Tong
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong, SAR, 999077, China
| | - Handa Liu
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong, SAR, 999077, China
| | - Hau Ping Chan
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong, SAR, 999077, China
| | - Johnny C Ho
- Department of Materials Science and Engineering, City University of Hong Kong, Hong Kong, SAR, 999077, China
| | - Chunsong Zhao
- Huawei Technologies CO., LTD, Shenzhen, 518000, China
| | - Yang Chai
- Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, SAR, 999077, China
| | - Chaoliang Tan
- Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, SAR, 999077, China
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong, SAR, 999077, China
| |
Collapse
|
3
|
Fu W, Tan L, Wang PP. Chiral Inorganic Nanomaterials for Photo(electro)catalytic Conversion. ACS NANO 2023; 17:16326-16347. [PMID: 37540624 DOI: 10.1021/acsnano.3c04337] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/06/2023]
Abstract
Chiral inorganic nanomaterials due to their unique asymmetric nanostructures have gradually demonstrated intriguing chirality-dependent performance in photo(electro)catalytic conversion, such as water splitting. However, understanding the correlation between chiral inorganic characteristics and the photo(electro)catalytic process remains challenging. In this perspective, we first highlight the chirality source of inorganic nanomaterials and briefly introduce photo(electro)catalysis systems. Then, we delve into an in-depth discussion of chiral effects exerted by chiral nanostructures and their photo-electrochemistry properties, while emphasizing the emerging chiral inorganic nanomaterials for photo(electro)catalytic conversion. Finally, the challenges and opportunities of chiral inorganic nanomaterials for photo(electro)catalytic conversion are prospected. This perspective provides a comprehensive overview of chiral inorganic nanomaterials and their potential in photo(electro)catalytic conversion, which is beneficial for further research in this area.
Collapse
Affiliation(s)
- Wenlong Fu
- State Key Laboratory for Mechanical Behavior of Materials, Shaanxi International Research Center for Soft Matter, School of Materials Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China
| | - Lili Tan
- State Key Laboratory for Mechanical Behavior of Materials, Shaanxi International Research Center for Soft Matter, School of Materials Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China
| | - Peng-Peng Wang
- State Key Laboratory for Mechanical Behavior of Materials, Shaanxi International Research Center for Soft Matter, School of Materials Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China
| |
Collapse
|
4
|
Hao C, Wang G, Chen C, Xu J, Xu C, Kuang H, Xu L. Circularly Polarized Light-Enabled Chiral Nanomaterials: From Fabrication to Application. NANO-MICRO LETTERS 2023; 15:39. [PMID: 36652114 PMCID: PMC9849638 DOI: 10.1007/s40820-022-01005-1] [Citation(s) in RCA: 21] [Impact Index Per Article: 10.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/28/2022] [Accepted: 12/10/2022] [Indexed: 05/31/2023]
Abstract
For decades, chiral nanomaterials have been extensively studied because of their extraordinary properties. Chiral nanostructures have attracted a lot of interest because of their potential applications including biosensing, asymmetric catalysis, optical devices, and negative index materials. Circularly polarized light (CPL) is the most attractive source for chirality owing to its high availability, and now it has been used as a chiral source for the preparation of chiral matter. In this review, the recent progress in the field of CPL-enabled chiral nanomaterials is summarized. Firstly, the recent advancements in the fabrication of chiral materials using circularly polarized light are described, focusing on the unique strategies. Secondly, an overview of the potential applications of chiral nanomaterials driven by CPL is provided, with a particular emphasis on biosensing, catalysis, and phototherapy. Finally, a perspective on the challenges in the field of CPL-enabled chiral nanomaterials is given.
Collapse
Affiliation(s)
- Changlong Hao
- International Joint Research Laboratory for Biointerface and Biodetection, State Key Lab of Food Science and Technology, School of Food Science and Technology, Jiangnan University, Wuxi, Jiangsu, 214122, People's Republic of China
| | - Gaoyang Wang
- International Joint Research Laboratory for Biointerface and Biodetection, State Key Lab of Food Science and Technology, School of Food Science and Technology, Jiangnan University, Wuxi, Jiangsu, 214122, People's Republic of China
| | - Chen Chen
- International Joint Research Laboratory for Biointerface and Biodetection, State Key Lab of Food Science and Technology, School of Food Science and Technology, Jiangnan University, Wuxi, Jiangsu, 214122, People's Republic of China
| | - Jun Xu
- Department of Neurology, China National Clinical Research Center for Neurological Diseases, Beijing Tiantan Hospital, Capital Medical University, No.119 South 4Th Ring West Road, Beijing, 100070, People's Republic of China
| | - Chuanlai Xu
- International Joint Research Laboratory for Biointerface and Biodetection, State Key Lab of Food Science and Technology, School of Food Science and Technology, Jiangnan University, Wuxi, Jiangsu, 214122, People's Republic of China
| | - Hua Kuang
- International Joint Research Laboratory for Biointerface and Biodetection, State Key Lab of Food Science and Technology, School of Food Science and Technology, Jiangnan University, Wuxi, Jiangsu, 214122, People's Republic of China
| | - Liguang Xu
- International Joint Research Laboratory for Biointerface and Biodetection, State Key Lab of Food Science and Technology, School of Food Science and Technology, Jiangnan University, Wuxi, Jiangsu, 214122, People's Republic of China.
| |
Collapse
|
5
|
Huang Z, Lu N, Wang Z, Xu S, Guan J, Hu Y. Large-Scale Ultrafast Strain Engineering of CVD-Grown Two-Dimensional Materials on Strain Self-Limited Deformable Nanostructures toward Enhanced Field-Effect Transistors. NANO LETTERS 2022; 22:7734-7741. [PMID: 35951414 DOI: 10.1021/acs.nanolett.2c01559] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Strain engineering of 2D materials is capable of tuning the electrical and optical properties of the materials without introducing additional atoms. Here, a method for large-scale ultrafast strain engineering of CVD-grown 2D materials is proposed. Locally nonuniform strains are introduced through the cooperative deformation of materials and metal@metal oxide nanoparticles through cold laser shock. The tensile strain of MoS2 changes and the band gap decreases after laser shock. The mechanism of the ultrafast straining is investigated by MD simulations. MoS2 FETs were fabricated, and the field-effect mobility of devices could be increased from 1.9 to 44.5 cm2 V-1 s-1 by adjusting the strain level of MoS2. This is currently the maximum value of MoS2 FETs grown by CVD with SiO2 as the dielectric. As a large-scale and ultrafast manufacturing method, laser shock provides a universal strategy for large-scale adjustment of 2D material strain, which will help to promote the manufacturing of 2D nanoelectronic devices.
Collapse
Affiliation(s)
- Zheng Huang
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, People's Republic of China
| | - Nan Lu
- School of Physics, Southeast University, Nanjing 211189, People's Republic of China
| | - Zifeng Wang
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, People's Republic of China
| | - Shuoheng Xu
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, People's Republic of China
| | - Jie Guan
- School of Physics, Southeast University, Nanjing 211189, People's Republic of China
| | - Yaowu Hu
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, People's Republic of China
- School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, People's Republic of China
| |
Collapse
|
6
|
Yang P, Zha J, Gao G, Zheng L, Huang H, Xia Y, Xu S, Xiong T, Zhang Z, Yang Z, Chen Y, Ki DK, Liou JJ, Liao W, Tan C. Growth of Tellurium Nanobelts on h-BN for p-type Transistors with Ultrahigh Hole Mobility. NANO-MICRO LETTERS 2022; 14:109. [PMID: 35441245 PMCID: PMC9018950 DOI: 10.1007/s40820-022-00852-2] [Citation(s) in RCA: 26] [Impact Index Per Article: 8.7] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2022] [Accepted: 03/24/2022] [Indexed: 05/15/2023]
Abstract
The lack of stable p-type van der Waals (vdW) semiconductors with high hole mobility severely impedes the step of low-dimensional materials entering the industrial circle. Although p-type black phosphorus (bP) and tellurium (Te) have shown promising hole mobilities, the instability under ambient conditions of bP and relatively low hole mobility of Te remain as daunting issues. Here we report the growth of high-quality Te nanobelts on atomically flat hexagonal boron nitride (h-BN) for high-performance p-type field-effect transistors (FETs). Importantly, the Te-based FET exhibits an ultrahigh hole mobility up to 1370 cm2 V-1 s-1 at room temperature, that may lay the foundation for the future high-performance p-type 2D FET and metal-oxide-semiconductor (p-MOS) inverter. The vdW h-BN dielectric substrate not only provides an ultra-flat surface without dangling bonds for growth of high-quality Te nanobelts, but also reduces the scattering centers at the interface between the channel material and the dielectric layer, thus resulting in the ultrahigh hole mobility .
Collapse
Affiliation(s)
- Peng Yang
- College of Electronics and Information Engineering, Shenzhen University, Shenzhen, 518060, People's Republic of China
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Jiajia Zha
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China.
| | - Guoyun Gao
- Department of Physics, The University of Hong Kong, Pokfulam Road, Hong Kong SAR, People's Republic of China
| | - Long Zheng
- Department of Chemistry, The Chinese University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Haoxin Huang
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Yunpeng Xia
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Songcen Xu
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Tengfei Xiong
- Department of Chemistry, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Zhuomin Zhang
- Department of Mechanical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Zhengbao Yang
- Department of Mechanical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Ye Chen
- Department of Chemistry, The Chinese University of Hong Kong, Hong Kong SAR, People's Republic of China
| | - Dong-Keun Ki
- Department of Physics, The University of Hong Kong, Pokfulam Road, Hong Kong SAR, People's Republic of China
| | - Juin J Liou
- College of Electronics and Information Engineering, Shenzhen University, Shenzhen, 518060, People's Republic of China
| | - Wugang Liao
- College of Electronics and Information Engineering, Shenzhen University, Shenzhen, 518060, People's Republic of China.
| | - Chaoliang Tan
- Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR, People's Republic of China.
- Center of Super-Diamond and Advanced Films (COSDAF), City University of Hong Kong, Hong Kong SAR, People's Republic of China.
| |
Collapse
|