Reflection of few-cycle x-ray pulses by aperiodic multilayer structures

High performance EUV multilayer structures insensitive to capping layer optical parameters

We have designed and tested a-periodic multilayer structures containing protective capping layers in order to obtain improved stability with respect to any possible changes of the capping layer optical properties (due to oxidation and contamination, for example)-while simultaneously maximizing the EUV reflection efficiency for specific applications, and in particular for EUV lithography. Such coatings may be particularly useful in EUV lithographic apparatus, because they provide both high integrated photon flux and higher stability to the harsh operating environment, which can affect seriously the performance of the multilayer-coated projector system optics. In this work, an evolutive algorithm has been developed in order to design these a-periodic structures, which have been proven to have also the property of stable performance with respect to random layer thickness errors that might occur during coating deposition. Prototypes have been fabricated, and tested with EUV and X-ray reflectometry, and secondary electron spectroscopy. The experimental results clearly show improved performance of our new a-periodic coatings design compared with standard periodic multilayer structures.

Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses

Chirped Mo/Si multilayer coatings have been designed, fabricated, and characterized for use in extreme-ultraviolet attosecond experiments. By numerically simulating the reflection of the attosecond pulse from a multilayer mirror during the optimization procedure based on a genetic algorithm, we obtain optimized layer designs. We show that normal incidence chirped multilayer mirrors capable of reflecting pulses of approximately 100 attoseconds (as) duration can be designed by enhancing the reflectivity bandwidth and optimizing the phase-shift behavior. The chirped multilayer coatings have been fabricated by electron-beam evaporation in an ultrahigh vacuum in combination with ion-beam polishing of the interfaces and in situ reflectivity measurement for layer thickness control. To analyze the aperiodic layer structure by hard-x-ray reflectometry, we have developed an automatic fitting procedure that allows us to determine the individual layer thicknesses with an error of less than 0.05 nm. The fabricated chirped mirror may be used for production of 150-160 as pulses.

Compression of attosecond harmonic pulses by extreme-ultraviolet chirped mirrors

In the race toward attosecond pulses, for which high-order harmonics generated in rare gases are the best candidates, both the harmonic spectral range and the spectral phase have to be controlled. We demonstrate that multilayer extreme-ultraviolet chirped mirrors can be numerically optimized and designed to compensate for the intrinsic harmonic chirp that was recently discovered and that is responsible for temporal broadening of pulses. A simulation shows that an optimized mirror is capable of compressing the duration from approximately 260 to 90 as. This new technique is an interesting solution because of its ability to cover a wider spectral range than other technical devices that have already been proposed to overcome the chirp of high harmonics.