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Kalenkov S, Skvortsov P, Tarasenko A, Sharov D, Shtanko A. The Phase Modulating Micro-Mover Based on the MHD/MET System in the Reference Arm of the Scanning Interferometer. MICROMACHINES 2022; 13:1972. [PMID: 36422403 PMCID: PMC9697458 DOI: 10.3390/mi13111972] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/15/2022] [Revised: 11/04/2022] [Accepted: 11/07/2022] [Indexed: 06/16/2023]
Abstract
The possibility of using a magnetohydrodynamic drive (MHD) and amolecular-electronic transfer (MET) sensor as a single device for moving and precise control of the displacement of a movable mirror, which is part of a scanning interferometer, is considered. A prototype of such a device was developed and experimentally studied. A digital holographic image of the test object was obtained using an optical scheme containing a scanning interferometer with an MHD drive. The important advantages of the MHD drive in the problems of digital recording of hyperspectral holographic images have been discussed.
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Affiliation(s)
- Sergey Kalenkov
- Scientific and Technical Center “Optoelectronics”, Moscow Polytechnic University, ul. Bolshaya Semyonovskaya 38, 107023 Moscow, Russia
| | - Pavel Skvortsov
- Scientific and Technical Center “Optoelectronics”, Moscow Polytechnic University, ul. Bolshaya Semyonovskaya 38, 107023 Moscow, Russia
- Laboratory of Computer Systems for Production Automation and Digital Technologies, Mechanical Engineering Research Institute of the Russian Academy of Sciences, Malyj Haritonyevskij per. 4, 101000 Moscow, Russia
| | - Aleksandr Tarasenko
- Scientific and Technical Center “Optoelectronics”, Moscow Polytechnic University, ul. Bolshaya Semyonovskaya 38, 107023 Moscow, Russia
| | - Dmitry Sharov
- Scientific and Technical Center “Optoelectronics”, Moscow Polytechnic University, ul. Bolshaya Semyonovskaya 38, 107023 Moscow, Russia
| | - Alexander Shtanko
- Department of Physics, Moscow State University of Technology “STANKIN”, 1 Vadkovsky Lane, 127055 Moscow, Russia
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Modeling of the Electrochemical Motion Sensor Conversion Factor at High Frequencies. MICROMACHINES 2022; 13:mi13020153. [PMID: 35208278 PMCID: PMC8880202 DOI: 10.3390/mi13020153] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/19/2021] [Revised: 01/10/2022] [Accepted: 01/17/2022] [Indexed: 02/04/2023]
Abstract
The conversion factor of the electrochemical motion sensors at low frequencies is usually quite high. At the same time, it decreases significantly with the increase in frequency. Thus, increasing the conversion factor for high frequencies is essential for practical use. In this work, the theoretical model that allows establishing the basic laws governing the conversion of high-frequency signals in an electrochemical cell has been suggested. The approach was based on the fact that in the case of high frequencies, the diffusion length is less than the distance between the electrodes and the thickness of the channel and it is enough to consider the transformation of the fluid motion into electrical current only near the cathodes. It was found that the signal output current can be represented as the sum of the term which is proportional to the steady-state concentration gradient along the surface on which the cathode is located, and the term proportional to the concentration gradient normal to the surface. Both first and second terms and the total signal current have been calculated for a particular case of a four-electrode planar system. The practical conclusion is that the high frequency conversion factor increases with the interelectrode distance and the channel width decreases compared to the cathode dimension.
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Qi W, Liu B, Liang T, Chen J, Chen D, Wang J. MEMS-Based Integrated Triaxial Electrochemical Seismometer. MICROMACHINES 2021; 12:mi12101156. [PMID: 34683207 PMCID: PMC8540761 DOI: 10.3390/mi12101156] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/23/2021] [Revised: 09/20/2021] [Accepted: 09/24/2021] [Indexed: 11/16/2022]
Abstract
This paper presents a micro-electromechanical systems (MEMS)-based integrated triaxial electrochemical seismometer, which can detect three-dimensional vibration. By integrating three axes, the integrated triaxial electrochemical seismometer is characterized by small volume and high symmetry. The numerical simulation results inferred that the integrated triaxial electrochemical seismometer had excellent independence among three axes. Based on the experimental results, the integrated triaxial electrochemical seismometer had the advantage of small axial crosstalk and could detect vibration in arbitrary directions. Furthermore, compared with the uniaxial electrochemical seismometer, the integrated triaxial electrochemical seismometer had similar sensitivity curves ranging from 0.01 to 100 Hz. In terms of random ground motion response, high consistencies between the developed integrated triaxial electrochemical seismometer and the uniaxial electrochemical seismometer could be easily observed, which indicated that the developed integrated triaxial electrochemical seismometer produced comparable noise levels to those of the uniaxial electrochemical seismometer. These results validated the performance of the integrated triaxial electrochemical seismometer, which has a good prospect in the field of deep geophysical exploration and submarine seismic monitoring.
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Affiliation(s)
- Wenjie Qi
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (B.L.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Bowen Liu
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (B.L.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Tian Liang
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (B.L.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Jian Chen
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (B.L.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Deyong Chen
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (B.L.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Correspondence: (D.C.); (J.W.); Tel.: +86-010-5888-7182 (D.C.); +86-010-5888-7191 (J.W.)
| | - Junbo Wang
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (B.L.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Correspondence: (D.C.); (J.W.); Tel.: +86-010-5888-7182 (D.C.); +86-010-5888-7191 (J.W.)
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Qi W, Xu C, Liu B, She X, Liang T, Chen D, Wang J, Chen J. MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes. MICROMACHINES 2021; 12:mi12060699. [PMID: 34203906 PMCID: PMC8232786 DOI: 10.3390/mi12060699] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/17/2021] [Revised: 06/08/2021] [Accepted: 06/11/2021] [Indexed: 11/16/2022]
Abstract
This paper presents a new process to fabricate a sensing unit of electrochemical seismometers using only one silicon-glass-silicon bonded wafer. By integrating four electrodes on one silicon-glass-silicon bonded wafer, the consistency of the developed sensing unit was greatly improved, benefiting from the high alignment accuracy. Parameter designs and simulations were carried out based on this sensing unit, which indicated that the sensitivities of the developed electrochemical seismometer decreased with the decrease in the number of flow holes in the sensing unit, and the initial stabilization time decreased gradually with the decrease in the thickness of the glass layer. Based on experimental results of four devices, the peak sensitivity was quantified as 5345.45 ± 43.78 V/(m/s) at 2 Hz, which proved high consistency of the fabricated electrochemical seismometer. In terms of the responses to random ground motions, high consistencies between the developed electrochemical seismometer and the commercial counterpart of CME6011 (R-sensors, Moscow, Russia) were found, where the developed electrochemical seismometer produced comparable noise levels to those of CME6011. These results validated the performance of the device and it may function as an effective tool for a variety of applications.
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Affiliation(s)
- Wenjie Qi
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Chao Xu
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Bowen Liu
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Xu She
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Tian Liang
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Deyong Chen
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Correspondence: (D.C.); (J.W.); Tel.: +86-010-588-87182 (D.C.); +86-010-588-87191 (J.W.)
| | - Junbo Wang
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Correspondence: (D.C.); (J.W.); Tel.: +86-010-588-87182 (D.C.); +86-010-588-87191 (J.W.)
| | - Jian Chen
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (W.Q.); (C.X.); (B.L.); (X.S.); (T.L.); (J.C.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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