Ultra-low voltage MEMS switch using a folded hinge structure

An ultra-low voltage microelectromechanical system (MEMS) switch for low-power integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded hinge structure allows a large beam structure to be suspended with a designed air gap, effectively suppressing unwanted deflection. The actuation voltage of the switch was measured to be 1.7 V, the lowest among electrostatic switches. There was no variation in the actuation voltage until 106 cyclic actuations, showing the stability of a low actuation voltage in electrostatic actuation for the first time. The contact resistance was around 12 Ω, caused by a low contact force below 1 μN despite an Au–Au contact.

High throughput ultralong (20 cm) nanowire fabrication using a wafer-scale nanograting template

Nanowires are being actively explored as promising nanostructured materials for high performance flexible electronics, biochemical sensors, photonic applications, solar cells, and secondary batteries. In particular, ultralong (centimeter-long) nanowires are highly attractive from the perspective of electronic performance, device throughput (or productivity), and the possibility of novel applications. However, most previous works on ultralong nanowires have issues related to limited length, productivity, difficult alignment, and deploying onto the planar substrate complying with well-matured device fabrication technologies. Here, we demonstrate a highly ordered ultralong (up to 20 cm) nanowire array, with a diameter of 50 nm (aspect ratio of up to 4,000,000:1), in an unprecedented large (8 in.) scale (2,000,000 strands on a wafer). We first devised a perfectly connected ultralong nanograting master template on the whole area of an 8 in. substrate using a top-down approach, with a density equivalent to that achieved with e-beam lithography (100 nm). Using this large-area, ultralong, high-density nanograting template, we developed a fast and effective method for fabricating up to 20 cm long nanowire arrays on a plastic substrate, composed of metal, dielectric, oxide, and ferroelectric materials. As a suggestion of practical application, a prototype of a large-area aluminum wire grid polarizer was demonstrated.

Actively transparent display with enhanced legibility based on an organic light-emitting diode and a cholesteric liquid crystal blind panel

Transparent display is one of the most promising concepts among the next generation information display devices. Nevertheless, conventional transparent displays have two inherent problems: low forward light efficiency due to the light being emitted also in a backward direction; and low legibility due to the visual interruption caused by the light coming from the background. In this work, a cholesteric liquid crystal (Ch-LC) based, actively operational blind panel is combined with transparent organic light-emitting diodes (TR-OLEDs) to recycle the light wasted by backward propagation in transparent displays while blocking the light from behind the display, pursuing both improved forward light efficiency and enhanced image legibility. By tuning the reflectance spectrum of the Ch-LC panel to match the emission spectrum of TR-OLEDs, we achieved luminous efficiency increase by as large as 21% (85%) when the top metal cathode side (the bottom ITO side) of the OLEDs fa'transparent OLED' ces the blind panel. Maximum transmittance of the proposed device reached a high value of 60%, successfully demonstrating a new window-like transparent display concept.

A sub-1-volt nanoelectromechanical switching device

Nanoelectromechanical (NEM) switches have received widespread attention as promising candidates in the drive to surmount the physical limitations currently faced by complementary metal oxide semiconductor technology. The NEM switch has demonstrated superior characteristics including quasi-zero leakage behaviour, excellent density capability and operation in harsh environments. However, an unacceptably high operating voltage (4-20 V) has posed a major obstacle in the practical use of the NEM switch in low-power integrated circuits. To utilize the NEM switch widely as a core device component in ultralow power applications, the operation voltage needs to be reduced to 1 V or below. However, sub-1 V actuation has not yet been demonstrated because of fabrication difficulties and irreversible switching failure caused by surface adhesion. Here, we report the sub-1 V operation of a NEM switch through the introduction of a novel pipe clip device structure and an effective air gap fabrication technique. This achievement is primarily attributed to the incorporation of a 4-nm-thick air gap, which is the smallest reported so far for a NEM switch generated using a 'top-down' approach. Our structure and process can potentially be utilized in various nanogap-related applications, including NEM switch-based ultralow-power integrated circuits, NEM resonators, nanogap electrodes for scientific research and sensors.

Use of a columnar metal thin film as a nanosieve with sub-10 nm pores

A columnar-structured nanosieve is unique in the sense that it is a general thin film formed by physical vapor deposition (PVD). Instead of additional processes to make nanopores, the numerous voids naturally formed among columnar grains during PVD are used as nanopores. Since the thin film formed by PVD has vertically grown columnar grains, the fabricated nanosieve has numerous straight-opened nanopores, which is an ideal structure for a nanosieve.

An electronic DNA sensor chip using integrated capacitive read-out circuit

This paper presents fully integrated label-free DNA recognition circuit based on capacitance measurement. A CMOS-based DNA sensor is implemented for the electrical detection of DNA hybridization. The proposed architecture detects the difference of capacitance through the integration of current mismatch of capacitance between reference electrodes functionalized with only single-stranded DNA and sensing electrodes bound with complementary DNA strands specifically. In addition, to minimize the effects of parallel resistance between electrodes and DNA layers, the compensation technique of leakage current through the use of constant current charging and discharging is implemented in the proposed detection circuit. The chip was fabricated in 0.35um 4-metal 2-poly CMOS process, and 16 × 8 sensing electrode arrays were fabricated by post-processing steps.

Analytical modeling and thermodynamic analysis of robust superhydrophobic surfaces with inverse-trapezoidal microstructures

A polydimethylsiloxane (PDMS) elastomer surface with perfectly ordered microstructures having an inverse-trapezoidal cross-sectional profile (simply PDMS trapezoids) showed superhydrophobic and transparent characteristics under visible light as reported in our previous work. The addition of a fluoropolymer (Teflon) coating enhances both features and provides oleophobicity. This paper focuses on the analytical modeling of the fabricated PDMS trapezoids structure and thermodynamic analysis based on the Gibbs free energy analysis. Additionally, the wetting characteristics of the fabricated PDMS trapezoids surface before and after the application of the Teflon coating are analytically explained. The Gibbs free energy analysis reveals that, due to the Teflon coating, the Cassie-Baxter state becomes energetically more favorable than the Wenzel state and the contact angle difference between the Cassie-Baxter state and the Wenzel state decreases. These two findings support the robustness of the superhydrophobicity of the fabricated Teflon-coated PDMS trapezoids. This is then verified via the impinging test of a water droplet at a high speed. The dependencies of the design parameters in the PDMS trapezoids on the hydrophobicity are also comprehensively studied through a thermodynamic analysis. Geometrical dependency on the hydrophobicity shows that overhang microstructures do not have a significant influence on the hydrophobicity. In contrast, the intrinsic contact angle of the structural material is most important in determining the apparent contact angle. On the other hand, the experimental results showed that the side angles of the overhangs are critical not for the hydrophobic but for the oleophobic property with liquids of a low surface tension. Understanding of design parameters in the PDMS trapezoids surface gives more information for implementation of superhydrophobic surfaces.

One-chip electronic detection of DNA hybridization using precision impedance-based CMOS array sensor

This paper describes a label-free and fully electronic detection method of DNA hybridization, which is achieved through the use of a 16×8 microarray sensor in conjunction with a new type of impedance spectroscopy constructed with standard complementary metal-oxide-semiconductor (CMOS) technology. The impedance-based method is based on changes in the reactive capacitance and the charge-transfer resistance after hybridization with complementary DNA targets. In previously published label-free techniques, the measured capacitance presented unstable capacitive properties due to the parallel resistance that is not infinite and can cause a leakage by discharging the charge on the capacitor. This paper presents an impedance extraction method that uses excitation by triangular wave voltage, which enables a reliable measurement of both C and R producing a highly sensitive sensor with a stable operation independent of external variables. The system was fabricated in an industrial 0.35-μm 4-metal 2-poly CMOS process, integrating working electrodes and readout electronics into one chip. The integrated readout, which uses a parasitic insensitive integrator, achieves an enlarged detection range and improved noise performance. The maximum average relative variations of C and R are 31.5% and 68.6%, respectively, after hybridization with a 1 μM target DNA. The proposed sensor allows quantitative evaluation of the molecule densities on the chip with distinguishable variation in the impedance. This fully electronic microsystem has great potential for use with bioanalytical tools and point-of-care diagnosis.

Electrowetting on a polymer microlens array

This paper reports on the electrowetting behavior of a flexible poly(dimethylsiloxane) (PDMS) microlens array. A Cr and Au double-layered electrode was formed on an array of microlenses with diameters of 10 microm and heights of 13 microm. A deposition of parylene and a coating of Teflon were followed for electrical insulation as well as for enhancement of the hydrophobicity. On the nearly superhydrophobic microlens array surface, the electrowetting of a deionized water droplet was observed over the contact angle range of approximately 140 degrees to approximately 58 degrees by applying 0-200 V, respectively. The electrowetting phenomenon was reversible even in air environment with applied voltages of less than 100 V. The electrowetting on the microlens array surface lost its reversibility after the microlens array surface was completely wetted when the water meniscus touched the bottom of the microlens array. Analysis of meniscus shapes and net force direction follows to elucidate the reversibility. The convex curvature of the microlens caused gradual rather than abrupt impalement of water into the gap among the microlenses.

A conventional route to scalable morphology-controlled regular structures and their superhydrophobic/hydrophilic properties for biochips application

We use a conventional and straightforward route to fabricate scalable morphology-controlled regular structures. This route is based on the etching of PDMS microlens array in CF4 and CF4/O2 plasma. PDMS microlens array can be changed to regularly isolated microdot structures array in CF4 plasma. Microbowl shaped structures array can be reached in CF4/O2 plasma. Moreover, a set of structures after CF4 plasma treatment display superhydrophobicity, while a set of structures after CF4/O2 plasma treatment present hydrophilicity. DNA molecules can be readily enriched on the hydrophilic surface. We believe that the regular structure array surfaces provide a useful inspiration towards biomolecular detection and transportation in biochips.

Simple liquid crystal display backlight unit comprising only a single-sheet micropatterned polydimethylsiloxane (PDMS) light-guide plate

A simple liquid crystal display (LCD) backlight unit (BLU) comprising only a single-sheet polydimethylsiloxane (PDMS) light-guide plate (LGP) has been developed. The PDMS LGP, having micropatterns with an inverse-trapezoidal cross section, was fabricated by backside 3-D diffuser lithography followed by PDMS-to-PDMS replication. The fabricated BLU showed an average luminance of 2878 cd/m(2) with 73.3% uniformity when mounted in a 5.08 cm backlight module with four side view 0.85cd LEDs. The developed BLU can greatly reduce the cost and thickness of LCDs, and it can be applied to flexible displays as a flexible light source due to the flexible characteristic of the PDMS itself.

Microlens array diffuser for a light-emitting diode backlight system

Microlens array (MLA) diffusers for light-emitting diode (LED) backlight systems have been developed. A high fill-factor photoresist mold for the MLA was fabricated using three-dimensional diffuser lithography, and the patterns were transferred to a nickel master mold for UV-curable polymer replication. The fabricated microlens had various paraboloidal profiles, and its aspect ratio was controlled from 1.0 to 2.1. The MLA diffuser showed a batwing radiation pattern with a radiation angle of 150 degrees. The fabricated MLA diffuser may greatly enhance the color-mixing characteristics of LED backlight systems and help reduce the number of LEDs required.

Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method

This paper describes a simple and effective method to fabricate a plastic microlens array with controllable shape and high fill-factor, which utilizes the conventional lithography and plastic replication. The only difference from conventional lithography is the insertion of a diffuser that randomizes paths of the incident ultraviolet (UV) light to form lens-like 3D latent image in a thick positive photoresist. After replication of the developed concave microlens mold onto the polydimethylsiloxane (PDMS), the focal length of the fabricated hemispherical microlens was observed to be 13-88 microm depending on the UV exposure dose. Two PDMS curing conditions were tested, where the elevated temperature of 85 masculineC resulted in smoother surface roughness of 2.6 nm in RMS value in the microlens mold. The proposed method can be extensively applied for microlens fabrication with other plastic materials due to its simplicity and versatility.

Non-apoptotic signaling pathways activated by soluble Fas ligand in serum-starved human fibroblasts. Mitogen-activated protein kinases and NF-kappaB-dependent gene expression

Many Fas-expressing cells do not undergo cell death upon Fas stimulation. In the normal human diploid cell line GM6112, the addition of soluble Fas ligand (sFasL) leads to morphological signs of cell death in less than 1% of cells. Treatment of serum-starved GM6112 fibroblasts with sFasL resulted in a rapid and transient phosphorylation of ERK1/2 without a significant increase in JNK and p38 activities. Unless co-treated with the protein synthesis inhibitor anisomycin, sFasL did not show gene-inducing activity in cells maintained in complete medium. However, when cells were serum-starved for 4 days, treatment with sFasL alone induced interleukin-6 gene expression and, less strongly, interleukin-8 gene expression. Sensitization of the gene-inducing activity by serum starvation correlated with NF-kappaB activation by sFasL. Furthermore, we found that the expression of FADD and caspase-8 was significantly reduced in serum-starved cells, whereas the level of cFLIP remained unchanged. Transfection of GM6112 cells with the antisense caspase-8 expression construct sensitized cells toward sFasL-induced NF-kappaB-dependent reporter activation. Our results support the notion that a change in the ratio of cFLIP and caspase-8 may be responsible for turning on the Fas-activated NF-kappaB pathway, which otherwise is supplanted by the death-inducing pathway.

Solution structures of the N-terminal domain of histone H4

Histones, nuclear proteins that interact with DNA to form nucleosomes, are essential for both the regulation of transcription and the packaging of DNA within chromosomes. The N-terminal domain of histone H4 contains four acetylation sites at lysine residues and may play a separate role in chromatin structure from the remainder of the H4 chain. We performed circular dichroism and NMR characterization of both native (H4NTP) and acetylated (Ace-H4NTP) peptides containing N-terminal acetylation domain of histone H4 for various pH environments. Data from CD and NMR suggested that H4NTP exhibited a pH-dependent conformational change, whereas the Ace-H4NTP is insensitive to pH change. However, both peptides showed a defined structural form at acidic pH environments. The solution structure for Ace-H4NTP shows two structurally independent regions comprising residues of Leu10-Gly13 and Arg19-Leu22, demonstrating relatively well-defined turn-type structures. Our results suggest that N-terminal acetylated region of H4 prefers an extended backbone conformation at neutral pH, however, upon acetylation, the regions containing lysine residues induce structural transition, having defined structural form for its optimum function.

The prevalence and types of androgenetic alopecia in Korean men and women

BACKGROUND

There are racial differences in the prevalence and types of androgenetic alopecia (AGA). There have been several reports on the prevalence and types of AGA in the general population of caucasians, but few studies on Koreans with samples of sufficient numbers have been reported.

OBJECTIVES

To obtain a more precise estimate of the prevalence and types of AGA in Korean men and women and to compare the results with those in caucasians.

METHODS

The prevalence and types of AGA were analysed in 10,132 Koreans (5531 men and 4601 women) who had visited the Health Examination Centre at Kyung Hee University Hospital for regular health examinations between December 1997 and July 1999. To classify the degree of hair loss for each subject, the Norwood classification was used in men and the Ludwig classification in women. For AGA in men, 'female pattern' was added to the Norwood classification.

RESULTS

In Korean men, the prevalence of AGA (Norwood III or above) at all ages was 14.1%. It increased steadily with advancing age, but was lower than that of caucasians: 2.3% in the third decade, 4.0% in the fourth decade, 10.8% in the fifth decade, 24.5% in the sixth decade, 34.3% in the seventh decade and 46.9% over 70 years. Type III vertex involvement was the most common type in the third decade to the seventh decade; over 70 years, type VI was most common. A 'female pattern' was observed in 11.1% of cases. In Korean women, the prevalence of AGA (Ludwig I or above) at all ages was 5.6%. It also increased steadily with advancing age: 0.2% in the third decade, 2.3% in the fourth decade, 3.8% in the fifth decade, 7.4% in the sixth decade, 11.7% in the seventh decade and 24.7% over 70 years. Grade I was the most common type up to the sixth decade; over 60 years, grade I and II were similar in prevalence. Grade III (total baldness) was not observed. A family history of baldness was present in 48.5% of men and 45.2% of women with AGA.

CONCLUSIONS

The prevalence of AGA in Korean men and women was lower than that in caucasians, as recorded in the literature. Korean men tend to have more frontal hairline preservation and show a more 'female pattern' of hair thinning than caucasians. Therefore, 'female pattern' should be added to the classification of AGA.

Co K-edge XAS study on a new cobalt-doped-SiO2 pillared clay

New Co-doped-SiO2-sol pillared montmorillonite has been synthesized by interlayer hydrolysis and condensation of tetraethylorthosilicate (TEOS) in the presence of Co2+ ion using an organic template. The Co K-edge XANES and EXAFS analyses for the CoO-SiO2-PILC (before and after calcination) and for the references such as CoO and Co(OH)2 were performed in order to obtain electronic and local structural information of cobalt species, which may act as a catalytic active site for the selective reduction of NO(x), hydrodesulfurization, and Fischer-Tropsch reaction. According to the XANES spectra, the divalent cobalt ion is stabilized in an octahedral symmetry. The EXAFS result shows a significant change in local symmetry around cobalt ion upon calcination. The EXAFS fitting result before calcination shows that the cobalt species is in the form of hydroxide, with a small number of (Co-Co) pairs compared to the bulk Co(OH)2. After calcining at 550 degrees C, the first nearest neighbours were fitted to six oxygen atoms with two different distances, and the second and the third neighbours were fitted to two Si and one Co atoms. It is, therefore, reasonable to suggest a structure model, where the cobalt species on the SiO2 sol exists as a nano cluster of Co(OH)2 before calcination but transforms to a nanosized cobalt oxide covalently bound to the surface of SiO2 pillar after calcination.

In situ XAFS study at the Zr K-edge for SiO2/ZrO2 nano-sol

The structural characterisation of SiO2/ZrO2 nano-sol particles, prepared by mixing SiO2 sol and aqueous solution of ZrOCl2 8H2O, has been carried out by in-situ XAS measurement at the Zr K-edge during condensation reaction. The detailed XANES features at the Zr K-edge of the mixed sol of SiO2/ZrO2 are compared with those of other references such as ZrO2, ZrOCl2 8H2O. BaZrO3, and ZrSiO4, and it becomes obvious that the Zr4+ ions are stabilised in an octahedral symmetry. The EXAFS result also indicates that each Zr atom is coordinated with six oxygen ones as the first nearest neighbour, where two oxygen atoms are from the linkage of (Si-O-Zr) at short distance, and four ones are from water molecules at long distance. As the condensation reaction proceeds, it is found that the number of oxygen atoms due to the formation of (Si-O-Zr) bond at short distance and the second neighbour of silicon atoms increase simultaneously. From the above EXAFS and XANES results, the structural and gelating models could be proposed, which is based on the octahedrally coordinated but distorted zirconium species attaching on the SiO2 sol surface.