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Ding X, Da B, Gong J, Mao S, Li H, Ding Z. Quantification of surface roughness effect on elastically backscattered electrons. SURF INTERFACE ANAL 2014. [DOI: 10.1002/sia.5554] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- X. Ding
- School of Physics; University of Science and Technology of China; Hefei Anhui 230026 China
| | - B. Da
- School of Physics; University of Science and Technology of China; Hefei Anhui 230026 China
| | - J. B. Gong
- School of Physics; University of Science and Technology of China; Hefei Anhui 230026 China
| | - S. F. Mao
- School of Nuclear Science and Technology; University of Science and Technology of China; Hefei Anhui 230026 China
| | - H. M. Li
- Supercomputing Center; University of Science and Technology of China; Hefei Anhui 230026 China
| | - Z. J. Ding
- Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; Hefei Anhui 230026 China
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2
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Pauly N, Tougaard S, Yubero F. Modeling of X-ray photoelectron spectra: surface and core hole effects. SURF INTERFACE ANAL 2014. [DOI: 10.1002/sia.5372] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
Affiliation(s)
- Nicolas Pauly
- Université Libre de Bruxelles; Service de Métrologie Nucléaire (CP 165/84); 50 Av. F. D. Roosevelt B-1050 Brussels Belgium
| | - Sven Tougaard
- Department of Physics, Chemistry and Pharmacy; University of Southern Denmark; DK-5230 Odense M Denmark
| | - Francisco Yubero
- Instituto de Ciencia de Materiales de Sevilla; CSIC - Univ. Sevilla; Avda. Américo Vespucio 49 E-41092 Sevilla Spain
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3
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Pauly N, Novák M, Tougaard S. Surface excitation parameter for allotropic forms of carbon. SURF INTERFACE ANAL 2012. [DOI: 10.1002/sia.5167] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Affiliation(s)
- N. Pauly
- Université Libre de Bruxelles; Service de Métrologie Nucléaire (CP 165/84), 50 av. F. D. Roosevelt B-1050 Brussels Belgium
| | - M. Novák
- Université Libre de Bruxelles; Service de Métrologie Nucléaire (CP 165/84), 50 av. F. D. Roosevelt B-1050 Brussels Belgium
| | - S. Tougaard
- Department of Physics, Chemistry and Pharmacy; University of Southern Denmark; DK-5230 Odense M Denmark
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4
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Da B, Sun Y, Mao SF, Ding ZJ. Systematic calculation of the surface excitation parameters for 22 materials. SURF INTERFACE ANAL 2012. [DOI: 10.1002/sia.5164] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
Affiliation(s)
| | | | | | - Z. J. Ding
- Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 P.R. China
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5
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Da B, Mao SF, Zhang GH, Wang XP, Ding ZJ. Influence of surface roughness on elastically backscattered electrons. SURF INTERFACE ANAL 2012. [DOI: 10.1002/sia.4807] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Affiliation(s)
- B. Da
- Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 P. R. China
| | - S. F. Mao
- Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 P. R. China
| | - G. H. Zhang
- Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 P. R. China
| | - X. P. Wang
- Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 P. R. China
| | - Z. J. Ding
- Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; 96 Jinzhai Road Hefei Anhui 230026 P. R. China
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6
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Pauly N, Novák M, Dubus A, Tougaard S. Comparison between surface excitation parameter obtained from QUEELS and SESINIPAC. SURF INTERFACE ANAL 2012. [DOI: 10.1002/sia.4829] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
Affiliation(s)
- N. Pauly
- Service de Métrologie Nucléaire (CP 165/84); Université Libre de Bruxelles; 50 av. F. D. Roosevelt; B-1050; Brussels; Belgium
| | - M. Novák
- Service de Métrologie Nucléaire (CP 165/84); Université Libre de Bruxelles; 50 av. F. D. Roosevelt; B-1050; Brussels; Belgium
| | - A. Dubus
- Service de Métrologie Nucléaire (CP 165/84); Université Libre de Bruxelles; 50 av. F. D. Roosevelt; B-1050; Brussels; Belgium
| | - S. Tougaard
- Department of Physics and Chemistry; University of Southern Denmark; DK-5230; Odense M; Denmark
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Gergely G, Gurban S, Menyhard M, Jablonski A, Zemek J, Goto K. Experimental determination of the electron elastic backscattering probability and the surface excitation parameter for Si, Ni, Cu and Ag at 0.5 and 1 keV energies. SURF INTERFACE ANAL 2010. [DOI: 10.1002/sia.3723] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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8
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Nagatomi T, Tanuma S, Goto K. Absolutely determined inelastic mean free paths for 300-3000 eV electrons in 10 elemental solids. SURF INTERFACE ANAL 2010. [DOI: 10.1002/sia.3570] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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9
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Zhang ZM, Chen T, Ding ZJ, Tang T, Csik A, Tóth J, Tökési K. Optical properties of silver thin films, derived from REELS. SURF INTERFACE ANAL 2010. [DOI: 10.1002/sia.3312] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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10
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NAGATOMI T, TANUMA S. Surface Excitations in Surface Electron Spectroscopies Studied by Reflection Electron Energy-Loss Spectroscopy and Elastic Peak Electron Spectroscopy. ANAL SCI 2010; 26:165-76. [DOI: 10.2116/analsci.26.165] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
Affiliation(s)
- Takaharu NAGATOMI
- Department of Material and Life Science, Graduate School of Engineering, Osaka University
| | - Shigeo TANUMA
- Materials Analysis Station, National Institute for Materials Science
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11
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Pauly N, Tougaard S. Surface excitation parameter for 12 semiconductors and determination of a general predictive formula. SURF INTERFACE ANAL 2009. [DOI: 10.1002/sia.3081] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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12
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Nagatomi T, Goto K. Application of experimentally determined inelastic mean free path and surface excitation parameter in Ni to Monte Carlo simulation of reflection electron energy loss spectrum. SURF INTERFACE ANAL 2008. [DOI: 10.1002/sia.2983] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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13
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14
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Pauly N, Tougaard S. Calculation of the angular distribution of the surface excitation parameter for Ti, Fe, Cu, Pd, Ag, and Au. SURF INTERFACE ANAL 2008. [DOI: 10.1002/sia.2650] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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15
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Krawczyk M. Quantification of surface excitation effects on the EPES-determined IMFPs for GaN and SiC. SURF INTERFACE ANAL 2008. [DOI: 10.1002/sia.2698] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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16
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Gurban S, Gergely G, Toth J, Varga D, Jablonski A, Menyhard M. Experimental determination of the inelastic mean free path (IMFP) of electrons in selected oxide films applying surface excitation correction. SURF INTERFACE ANAL 2006. [DOI: 10.1002/sia.2302] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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17
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Zemek J, Jiricek P, Werner WSM, Lesiak B, Jablonski A. Angular-resolved elastic peak electron spectroscopy: experiment and Monte Carlo calculations. SURF INTERFACE ANAL 2006. [DOI: 10.1002/sia.2147] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
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18
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Orosz GT, Gergely G, Gurbán S, Menyhard M, Jablonski A. Inelastic mean free path data for Si corrected for surface excitation. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2005; 11:581-5. [PMID: 17481337 DOI: 10.1017/s1431927605050713] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/10/2004] [Accepted: 07/27/2005] [Indexed: 05/15/2023]
Abstract
Surface-sensitive electron spectroscopies, like Auger electron spectroscopy, X-ray photoelectron spectroscopy and elastic peak electron spectroscopy (EPES) are suitable techniques to investigate surfaces and thin layers. A theoretical model for electron transport is needed to process the observed electron spectra. Electron transport descriptions are based on the differential elastic cross sections for the sample atoms and the inelastic mean free path (IMFP) of backscattered electrons. An electron impinging on the sample can lose energy either due to surface or volume excitations. In the present work a Monte Carlo (MC) simulation of the elastic peak of Si, Ag, Ni, Cu, and Au for surface analysis is presented. The IMFP of Si was determined applying the EPES method. The integrated elastic peak ratio of Si with the standard metal reference samples corrected for surface excitation provided IMFP values of Si in the energy range E = 0.2-2.0 keV. Experiments were made with the ESA 31 HSA (ATOMKI) and with the DESA-100 (Staib) spectrometers. Surface correction was based on the application of Chen's model and material parameters. The Monte Carlo simulations of elastically backscattered electron trajectories were made using new EPESWIN software of Jablonski. An improvement of IMFP experimental results was achieved applying the presented procedure.
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Affiliation(s)
- Gábor Tamás Orosz
- Research Institute for Technical Physics and Materials Sciences, P.O. Box 49, H-1525 Budapest, Hungary
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19
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Theoretical study of the surface excitation parameter from reflection-electron-energy-loss spectra. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.2126] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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20
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Jablonski A. Determination of the electron inelastic mean free path in solids from the elastic electron backscattering intensity. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.2119] [Citation(s) in RCA: 31] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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21
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Tanuma S, Shiratori T, Kimura T, Goto K, Ichimura S, Powell CJ. Experimental determination of electron inelastic mean free paths in 13 elemental solids in the 50 to 5000 eV energy range by elastic-peak electron spectroscopy. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.2102] [Citation(s) in RCA: 113] [Impact Index Per Article: 5.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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22
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Tőkési K, Tong XM, Lemell C, Burgdörfer J. Friction Force for Charged Particles at Large Distances from Metal Surfaces. ADVANCES IN QUANTUM CHEMISTRY 2004. [DOI: 10.1016/s0065-3276(04)46002-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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23
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Gergely G, Menyhard M, Gurban S, Sulyok A, Toth J, Varga D, Tougaard S. Experimental estimation of surface excitation parameter for surface analysis. SURF INTERFACE ANAL 2002. [DOI: 10.1002/sia.1224] [Citation(s) in RCA: 24] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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24
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Gurban S, Gergely G, Menyhard M, Adam J, Adamik M, Daroczi C, Toth J, Varga D, Csik A, Gruzza B. Ag, Ge and Sn reference samples for elastic peak electron spectroscopy (EPES), used for experimental determination of the inelastic mean free path and the surface excitation parameter. SURF INTERFACE ANAL 2002. [DOI: 10.1002/sia.1284] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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