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Li X, Li Z, Hu J, Huang B, Shi J, Zhong Z, Zhuang Y, Chen Y, Wang J, Li J, Zhang L, Meng X, Shi W, Chen S, Fang X, Huang H, Wang J, Chu J. Tunneling-barrier-controlled sensitive deep ultraviolet photodetectors based on van der Waals heterostructures. Nat Commun 2025; 16:2209. [PMID: 40044650 PMCID: PMC11882958 DOI: 10.1038/s41467-025-56886-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/16/2024] [Accepted: 02/05/2025] [Indexed: 03/09/2025] Open
Abstract
Deep ultraviolet (DUV) photodetection usually relies on wide-bandgap semiconductors, which however face challenges in material growth and doping processes. In this work, we proposed and validated a photodetection scheme based on tunneling barrier modulation, achieving highly sensitive DUV photodetection. Using a two-dimensional van der Waals heterostructure, the device integrates MoS2 as the transporting layer for its high carrier mobility and low dark current, few-layered graphene (FLG) as the photon absorption layer, and hexagonal boron nitride (hBN) as the dielectric barrier. The device exhibits an photoresponsivity of 4.4 × 106 A·W-1 and specific detectivity of 1.4 × 1017 cm ⋅ H z - 1 / 2 ⋅ W - 1 for 250 nm DUV light, with a rejection ratio R250/R450 exceeding 106 for visible light. Unlike conventional photodetectors, the cutoff wavelength is determined by the tunneling barrier rather than the material bandgap. Additionally, this photodetection scheme has been extended to a wide range of materials, utilizing different charge transporting layer (e.g., MoS2, ReS2), barrier layer (e.g., hBN, Al2O3), and photon absorption materials (e.g., FLG, PdSe2, Au, Pd), showcasing its broad adaptability and potential for extensive application. Furthermore, the device has been successfully employed as a power meter for weak UV radiation (0.1 μW·cm-2) and for measuring solar UV irradiance with results matching the meteorological agency's weather reports. Overall, this work introduces an effective approach for developing high-performance DUV photodetectors, highlighting significant potential for applications in the optoelectronic market.
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Affiliation(s)
- Xiang Li
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
- School of Mathematics and Physics, Lanzhou Jiaotong University, Lanzhou, China
| | - Ziqing Li
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
| | - Jinhan Hu
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
- School of Materials Science and Engineering, Lanzhou Jiaotong University, Lanzhou, China
| | - Bangchi Huang
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
| | - Jianlin Shi
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
| | - Zhipeng Zhong
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
| | - YeZhao Zhuang
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
| | - Yan Chen
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
| | - Jingli Wang
- State Key Laboratory of Integrated Chips and Systems, Frontier Institute of Chip and System, Fudan University, Shanghai, China
| | - Jianfeng Li
- School of Materials Science and Engineering, Lanzhou Jiaotong University, Lanzhou, China
| | - Lei Zhang
- School of Mathematics and Physics, Lanzhou Jiaotong University, Lanzhou, China
| | - Xiangjian Meng
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, China
| | - Wu Shi
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China
- State Key Laboratory of Surface Physics and Institute for nanoelectronic devices and quantum computing, Fudan University, Shanghai, China
| | - Shiyou Chen
- Key Laboratory of Computational Physical Sciences (MOE), and State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China
| | - Xiaosheng Fang
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China.
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
| | - Hai Huang
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China.
- Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
| | - Jianlu Wang
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China.
- State Key Laboratory of Integrated Chips and Systems, Frontier Institute of Chip and System, Fudan University, Shanghai, China.
| | - Junhao Chu
- State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronic and Perception, Institute of Optoelectronic and Department of Materials Science, Fudan University, Shanghai, China
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, China
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Gour J, Beer S, Paul P, Alberucci A, Steinert M, Szeghalmi A, Siefke T, Peschel U, Nolte S, Zeitner UD. Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces. NANOPHOTONICS (BERLIN, GERMANY) 2024; 13:4191-4202. [PMID: 39635445 PMCID: PMC11501063 DOI: 10.1515/nanoph-2024-0343] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/02/2024] [Accepted: 08/02/2024] [Indexed: 12/07/2024]
Abstract
In the rapidly evolving field of plasmonic metasurfaces, achieving homogeneous, reliable, and reproducible fabrication of sub-5 nm dielectric nanogaps is a significant challenge. This article presents an advanced fabrication technology that addresses this issue, capable of realizing uniform and reliable vertical nanogap metasurfaces on a whole wafer of 100 mm diameter. By leveraging fast patterning techniques, such as variable-shaped and character projection electron beam lithography (EBL), along with atomic layer deposition (ALD) for defining a few nanometer gaps with sub-nanometer precision, we have developed a flexible nanofabrication technology to achieve gaps as narrow as 2 nm in plasmonic nanoantennas. The quality of our structures is experimentally demonstrated by the observation of resonant localized and collective modes corresponding to the lattice, with Q-factors reaching up to 165. Our technological process opens up new and exciting opportunities to fabricate macroscopic devices harnessing the strong enhancement of light-matter interaction at the single nanometer scale.
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Affiliation(s)
- Jeetendra Gour
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
| | - Sebastian Beer
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
| | - Pallabi Paul
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
| | - Alessandro Alberucci
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
| | - Michael Steinert
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
| | - Adriana Szeghalmi
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745Jena, Germany
| | - Thomas Siefke
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745Jena, Germany
| | - Ulf Peschel
- Faculty of Physics and Astronomy, Friedrich Schiller University Jena, Institute of Solid State Theory and Optics, Max-Wien-Platz 1, 07743Jena, Germany
| | - Stefan Nolte
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745Jena, Germany
| | - Uwe Detlef Zeitner
- Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745Jena, Germany
- Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745Jena, Germany
- HM Hochschule München University of Applied Sciences, Department of Applied Sciences and Mechatronics, Loristr. 19, 80335Munich, Germany
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Tang Y, Harutyunyan H. Optical properties of plasmonic tunneling junctions. J Chem Phys 2023; 158:060901. [PMID: 36792491 DOI: 10.1063/5.0128822] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/19/2023] Open
Abstract
Over the last century, quantum theories have revolutionized our understanding of material properties. One of the most striking quantum phenomena occurring in heterogeneous media is the quantum tunneling effect, where carriers can tunnel through potential barriers even if the barrier height exceeds the carrier energy. Interestingly, the tunneling process can be accompanied by the absorption or emission of light. In most tunneling junctions made of noble metal electrodes, these optical phenomena are governed by plasmonic modes, i.e., light-driven collective oscillations of surface electrons. In the emission process, plasmon excitation via inelastic tunneling electrons can improve the efficiency of photon generation, resulting in bright nanoscale optical sources. On the other hand, the incident light can affect the tunneling behavior of plasmonic junctions as well, leading to phenomena such as optical rectification and induced photocurrent. Thus, plasmonic tunneling junctions provide a rich platform for investigating light-matter interactions, paving the way for various applications, including nanoscale light sources, sensors, and chemical reactors. In this paper, we will introduce recent research progress and promising applications based on plasmonic tunneling junctions.
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Affiliation(s)
- Yuankai Tang
- Department of Physics, Emory University, Atlanta, Georgia 30322, USA
| | - Hayk Harutyunyan
- Department of Physics, Emory University, Atlanta, Georgia 30322, USA
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