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Qiao Y, Li C, Yan F, Liu Z, Wang X, Xie J, Shi G, Wei J, Zhao J, Zhang L, Luo F. Synergistic Enhancement Effects of Heterogeneous Isomorphism Clusters in Response to Irradiation: Sub-10 nm Nanolithography and Nanoscale Etching Transfer. NANO LETTERS 2025. [PMID: 40305466 DOI: 10.1021/acs.nanolett.5c00583] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/02/2025]
Abstract
The advancement of integrated circuit manufacturing has continuously relied on lithography technology as a fundamental driving force. However, the development of photoresists faces a resolution-line edge roughness-sensitivity (RLS) trade-off, hindering simultaneous optimization. To address this issue, we propose a collaborative strategy for heterogeneous isomorphism cluster photoresists with different radiation responses. The Ti4M4-oxo cluster platform [Ti4Zr4O6(OBu)4(OMc)16] (T4Z4), with higher sensitivity, was applied as a photosensitizer for a higher resolution photoresist of [Ti4Hf4O6(OBu)4(OMc)16] (T4H4), allowing the hybrid photoresist to effectively induce cluster cross-linking at low exposure doses, synergistically producing high-resolution patterns. This achieved an e-beam resolution enhancement from 16 to 7.5 nm, with successful fabrication of intricate patterns under 10 nm. The hybrid photoresist also exhibits the capability to etch transfer patterns below 20 nm onto silicon dioxide substrates, highlighting its potential for future device manufacturing. This work presents a new perspective on photoresist design to effectively tackle RLS trade-off limitations.
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Affiliation(s)
- Yang Qiao
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
| | - Changliang Li
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
| | - Fengbo Yan
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
| | - Zhaochao Liu
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
| | - Xingkun Wang
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
| | - Jianan Xie
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
| | - Guangyue Shi
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
| | - Jian Wei
- Institute of Modern Optics, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China
| | - Jun Zhao
- Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
| | - Lei Zhang
- Institute of Modern Optics, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China
| | - Feng Luo
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
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2
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Romero Garcia S, Zholdassov YS, Braunschweig AB, Martini A. Reactive Simulations of Silica Functionalization with Aromatic Hydrocarbons. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2024; 40:561-567. [PMID: 38112539 DOI: 10.1021/acs.langmuir.3c02785] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/21/2023]
Abstract
Reactive molecular dynamics simulations are used to model the covalent functionalization of amorphous silica with aromatic hydrocarbons. Simulations show that the surface density of silanol-terminated phenyl, naphthyl, and anthracenyl molecules is lower than the maximum value calculated based on molecule geometry, and the simulation densities decrease faster with the number of aromatic rings than the geometric densities. The trends are analyzed in terms of the surface-silanol bonding configurations, tilt angles, local conformational ordering, and aggregation of surface-bound molecules under steady-state conditions. Results show that the surface density is affected by both the size and symmetry of the aromatic hydrocarbons. The correlations among bonding, orientation, and surface density identified here may guide the selection or design of molecules for functionalized surfaces.
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Affiliation(s)
- Sergio Romero Garcia
- Department of Materials and Biomaterials Science and Engineering, University of California Merced, 5200 N. Lake Road, Merced, California 95343, United States
| | - Yerzhan S Zholdassov
- The Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
- Department of Chemistry, Hunter College, 695 Park Avenue, New York, New York 10065, United States
- The Ph.D. Program in Chemistry, Graduate Center of the City University of New York, 365 Fifth Avenue, New York, New York 10016, United States
| | - Adam B Braunschweig
- The Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
- Department of Chemistry, Hunter College, 695 Park Avenue, New York, New York 10065, United States
- The Ph.D. Program in Chemistry, Graduate Center of the City University of New York, 365 Fifth Avenue, New York, New York 10016, United States
| | - Ashlie Martini
- Department of Mechanical Engineering, University of California Merced, 5200 N. Lake Road, Merced, California 95343, United States
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Gerling-Driessen UIM, Hoffmann M, Schmidt S, Snyder NL, Hartmann L. Glycopolymers against pathogen infection. Chem Soc Rev 2023; 52:2617-2642. [PMID: 36820794 DOI: 10.1039/d2cs00912a] [Citation(s) in RCA: 17] [Impact Index Per Article: 8.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/24/2023]
Abstract
Pathogens including viruses, bacteria, fungi, and parasites continue to shape our lives in profound ways every day. As we have learned to live in parallel with pathogens, we have gained a better understanding of the rules of engagement for how they bind, adhere, and invade host cells. One such mechanism involves the exploitation of host cell surface glycans for attachment/adhesion, one of the first steps of infection. This knowledge has led to the development of glycan-based diagnostics and therapeutics for the treatment and prevention of infection. One class of compounds that has become increasingly important are the glycopolymers. Glycopolymers are macromolecules composed of a synthetic scaffold presenting carbohydrates as side chain motifs. Glycopolymers are particularly attractive because their properties can be tuned by careful choice of the scaffold, carbohydrate/glycan, and overall presentation. In this review, we highlight studies over the past ten years that have examined the role of glycopolymers in pathogen adhesion and host cell infection, biofilm formation and removal, and drug delivery with the aim of examining the direct effects of these macromolecules on pathogen engagement. In addition, we also examine the role of glycopolymers as diagnostics for the detection and monitoring of pathogens.
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Affiliation(s)
- Ulla I M Gerling-Driessen
- Institute of Organic Chemistry and Macromolecular Chemistry, Heinrich-Heine-University Düsseldorf, Universitätsstr. 1, 40225 Düsseldorf, Germany.
| | - Miriam Hoffmann
- Institute of Organic Chemistry and Macromolecular Chemistry, Heinrich-Heine-University Düsseldorf, Universitätsstr. 1, 40225 Düsseldorf, Germany.
| | - Stephan Schmidt
- Institute of Organic Chemistry and Macromolecular Chemistry, Heinrich-Heine-University Düsseldorf, Universitätsstr. 1, 40225 Düsseldorf, Germany. .,Institute for Macromolecular Chemistry, University of Freiburg, Stefan-Meier-Str. 31, 79104 Freiburg, Germany
| | - Nicole L Snyder
- Department of Chemistry, Davidson College, Davidson, North Carolina 28035, USA
| | - Laura Hartmann
- Institute of Organic Chemistry and Macromolecular Chemistry, Heinrich-Heine-University Düsseldorf, Universitätsstr. 1, 40225 Düsseldorf, Germany.
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4
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Wang Q, Cui H, Wang X, Hu Z, Tao P, Li M, Wang J, Tang Y, Xu H, He X. Exceptional Light Sensitivity by Thiol-Ene Click Lithography. J Am Chem Soc 2023; 145:3064-3074. [PMID: 36625511 DOI: 10.1021/jacs.2c11887] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/11/2023]
Abstract
Lithographic patterning, which utilizes the solubility switch of photoresists to convert optical signals into nanostructures on the substrate, is the primary top-down approach for nanoscale fabrication. However, the low light/electron-energy conversion efficiency severely limits the throughput of lithography. Thiol-ene reaction, as a photoinitiated radical addition reaction, is widely known as click reaction in the field of chemistry due to its extremely high efficiency. Here, we introduce a click lithography strategy utilizing the rapid thiol-ene click reaction to realize ultraefficient nanofabrication. This novel approach facilitated by the implementation of ultrahigh-functionality material designs enables high-contrast patterning of metal-containing nanoclusters under an extremely low deep-ultraviolet exposure dose, e.g., 7.5 mJ cm-2, which is 10-20 times lower than the dose used in the photoacid generator-based photoresist system. Meanwhile, 45 nm dense patterns were also achieved at a low dose using electron beam lithography, revealing the great potential of this approach in high-resolution patterning. Our results demonstrated the high-sensitivity and high-resolution features of click lithography, providing inspiration for future lithography design.
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Affiliation(s)
- Qianqian Wang
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Hao Cui
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Xiaolin Wang
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Ziyu Hu
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Peipei Tao
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Mingyang Li
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Jianlong Wang
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Yaping Tang
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Hong Xu
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
| | - Xiangming He
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China
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Poisson J, Hudson ZM. Luminescent Surface‐Tethered Polymer Brush Materials. Chemistry 2022; 28:e202200552. [DOI: 10.1002/chem.202200552] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/20/2022] [Indexed: 11/10/2022]
Affiliation(s)
- Jade Poisson
- Department of Chemistry The University of British Columbia 2036 Main Mall Vancouver British Columbia V6T 1Z1 Canada
| | - Zachary M. Hudson
- Department of Chemistry The University of British Columbia 2036 Main Mall Vancouver British Columbia V6T 1Z1 Canada
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Liu G, Sun X, Li X, Wang Z. The Bioanalytical and Biomedical Applications of Polymer Modified Substrates. Polymers (Basel) 2022; 14:826. [PMID: 35215740 PMCID: PMC8878960 DOI: 10.3390/polym14040826] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/22/2022] [Revised: 02/14/2022] [Accepted: 02/17/2022] [Indexed: 01/11/2023] Open
Abstract
Polymers with different structures and morphology have been extensively used to construct functionalized surfaces for a wide range of applications because the physicochemical properties of polymers can be finely adjusted by their molecular weights, polydispersity and configurations, as well as the chemical structures and natures of monomers. In particular, the specific functions of polymers can be easily achieved at post-synthesis by the attachment of different kinds of active molecules such as recognition ligand, peptides, aptamers and antibodies. In this review, the recent advances in the bioanalytical and biomedical applications of polymer modified substrates were summarized with subsections on functionalization using branched polymers, polymer brushes and polymer hydrogels. The review focuses on their applications as biosensors with excellent analytical performance and/or as nonfouling surfaces with efficient antibacterial activity. Finally, we discuss the perspectives and future directions of polymer modified substrates in the development of biodevices for the diagnosis, treatment and prevention of diseases.
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Affiliation(s)
- Guifeng Liu
- Department of Radiology, China-Japan Union Hospital of Jilin University, Xiantai Street, Changchun 130033, China; (G.L.); (X.L.)
| | - Xudong Sun
- State Key Laboratory of Electroanalytical Chemistry, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China;
- School of Applied Chemistry and Engineering, University of Science and Technology of China, Jinzhai Road, Hefei 230026, China
| | - Xiaodong Li
- Department of Radiology, China-Japan Union Hospital of Jilin University, Xiantai Street, Changchun 130033, China; (G.L.); (X.L.)
| | - Zhenxin Wang
- State Key Laboratory of Electroanalytical Chemistry, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China;
- School of Applied Chemistry and Engineering, University of Science and Technology of China, Jinzhai Road, Hefei 230026, China
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7
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Valles DJ, Zholdassov YS, Braunschweig AB. Evolution and applications of polymer brush hypersurface photolithography. Polym Chem 2021. [DOI: 10.1039/d1py01073e] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/19/2022]
Abstract
Hypersurface photolithography creates arbitrary polymer brush patterns with independent control over feature diameter, height, and spacing between features, while controlling composition along a polymer chain and between features.
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Affiliation(s)
- Daniel J. Valles
- Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St Nicholas Terrace, New York, NY 10031, USA
- Department of Chemistry, Hunter College, 695 Park Ave, New York, NY 10065, USA
- PhD Program in Chemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
| | - Yerzhan S. Zholdassov
- Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St Nicholas Terrace, New York, NY 10031, USA
- Department of Chemistry, Hunter College, 695 Park Ave, New York, NY 10065, USA
- PhD Program in Chemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
| | - Adam B. Braunschweig
- Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St Nicholas Terrace, New York, NY 10031, USA
- Department of Chemistry, Hunter College, 695 Park Ave, New York, NY 10065, USA
- PhD Program in Chemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
- PhD Program in Biochemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
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