Pang C, Cham J, Nenadic Z, Musallam S, Tai YC, Burdick J, Andersen R. A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses.
CONFERENCE PROCEEDINGS : ... ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY. IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY. ANNUAL CONFERENCE 2012;
2005:7114-7. [PMID:
17281915 DOI:
10.1109/iembs.2005.1616146]
[Citation(s) in RCA: 14] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
Abstract
This work presents a new multi-site probe array applied with parylene technology, used for neural prostheses to record high-level cognitive neural signals. Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. The all dry process is demonstrated to fabricate these probe arrays with monolithically integrated parylene flexible cables using double-side-polished (DSP) wafers. With the parylene flexible cables, the probes can be easily assembled to a high density 3-D array for chronic implantation.
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