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Kurita K, Kadono T, Shigematsu S, Hirose R, Okuyama R, Onaka-Masada A, Okuda H, Koga Y. Proximity Gettering Design of Hydrocarbon⁻Molecular⁻Ion⁻Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors. SENSORS (BASEL, SWITZERLAND) 2019; 19:s19092073. [PMID: 31060216 PMCID: PMC6540011 DOI: 10.3390/s19092073] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/27/2019] [Revised: 04/24/2019] [Accepted: 05/01/2019] [Indexed: 06/09/2023]
Abstract
We developed silicon epitaxial wafers with high gettering capability by using hydrocarbon-molecular-ion implantation. These wafers also have the effect of hydrogen passivation on process-induced defects and a barrier to out-diffusion of oxygen of the Czochralski silicon (CZ) substrate bulk during Complementary metal-oxide-semiconductor (CMOS) device fabrication processes. We evaluated the electrical device performance of CMOS image sensor fabricated on this type of wafer by using dark current spectroscopy. We found fewer white spot defects compared with those of intrinsic gettering (IG) silicon wafers. We believe that these hydrocarbon-molecular-ion-implanted silicon epitaxial wafers will improve the device performance of CMOS image sensors.
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Affiliation(s)
- Kazunari Kurita
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
| | - Takeshi Kadono
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
| | - Satoshi Shigematsu
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
| | - Ryo Hirose
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
| | - Ryosuke Okuyama
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
| | - Ayumi Onaka-Masada
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
| | - Hidehiko Okuda
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
| | - Yoshihiro Koga
- SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan.
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Joonwichien S, Takahashi I, Matsushima S, Usami N. Enhanced Phosphorus Gettering of Impurities in Multicrystalline Silicon at Low Temperature. ACTA ACUST UNITED AC 2014. [DOI: 10.1016/j.egypro.2014.08.119] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/24/2022]
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