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For: Mizuhara Y, Kato J, Nagatomi T, Takai Y, Aoyama T, Yoshimoto A, Inoue M, Shimizu R. Novel floating-type low-energy ion gun for high-resolution depth profiling in ultrahigh vacuum. SURF INTERFACE ANAL 2003. [DOI: 10.1002/sia.1545] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]

For:	Mizuhara Y, Kato J, Nagatomi T, Takai Y, Aoyama T, Yoshimoto A, Inoue M, Shimizu R. Novel floating-type low-energy ion gun for high-resolution depth profiling in ultrahigh vacuum. SURF INTERFACE ANAL 2003. [DOI: 10.1002/sia.1545] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]

Number	Cited by Other Article(s)
1	Nagatomi T, Bungo T, Takai Y. Incident angle and energy dependences of low-energy Ar⁺ ion sputtering of GaAs/AlAs multilayered system. SURF INTERFACE ANAL 2009. [DOI: 10.1002/sia.3067] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
2	Inoue M, Shimizu R, Lee HI, Kang HJ. High-resolution Auger depth profiling by sub-keV ion sputtering. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.1956] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
3	Mizuhara Y, Bungo T, Nagatomi T, Takai Y, Suzuki S, Kikuchi K, Sato T, Uta K. Development of ultrahigh vacuum floating-type low-energy ion gun with differential pumping facilities for high-resolution depth profiling. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.1957] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
4	Transmission electron microscopy study of low-energy ion-induced damaged layer. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.1977] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
5	Shimizu K, Habazaki H, Skeldon P, Thompson GE. Radiofrequency GDOES: a powerful technique for depth profiling analysis of thin films. SURF INTERFACE ANAL 2003. [DOI: 10.1002/sia.1572] [Citation(s) in RCA: 62] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse