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For: Jiang ZX, Kim K, Sieloff DD, Luo TY, Varghese A, Triyoso DH, Guenther T, Robichaud B, Benavides J. Toward accurate characterization of nitrogen depth profiles in ultrathin oxynitride films. SURF INTERFACE ANAL 2008. [DOI: 10.1002/sia.2914] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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