Study on 172-nm vacuum ultraviolet light surface modifications of polydimethylsiloxane for micro/nanofluidic applications

Near-Surfaces and Bulk Modification of Silicone Rubber under UV- and Vacuum UV-Irradiation Using Excimer and Hg Lamps

The surface properties of silicone rubber can be modified by irradiation with light from the vacuum ultraviolet (VUV) spectral range of less than 200 nm. After VUV-irradiation at 185 nm with a low-pressure mercury (Hg) lamp, a reduction in residual-dust-coverage (PA fibers) of up to 80% was found. At the same time, the long wavelength UV-radiation at 254 nm of the Hg lamp causes a reduction in the optical transmission properties of the silicone bulk. The near-surface and bulk modification of optically highly transparent silicone rubber was analyzed using XPS, ATR, transmission measurements, and investigations into the reduction of the residual-dust-coverage. A comparison was made between a Hg lamp and an excimer lamp at 172 nm. The results provide valuable information for selecting the appropriate irradiation source, depending on the desired spectral range for a given application. The results indicate that excimer lamps should be preferred for optical applications in the UV-spectral range, while Hg lamps are equally suitable for applications in the visible spectral range despite low transmission losses of less than 0.5%. The irradiation dose data were obtained using a ray tracing simulation as part of these investigations to overcome limitations of UV-sensors, such as their accelerated aging and angular dependence.

Optical Etching to Pattern Microstructures on Plastics by Vacuum Ultraviolet Light

We proposed and demonstrated an optical dry etching method for transferring a pattern on a photomask to a surface of plastics by decomposing the irradiated area using the high energy of vacuum ultraviolet light (VUV) at room temperature and pressure. Two kinds of wavelengths of 160 nm and 172 nm were used as the vacuum ultraviolet light, and the patterning performances for polymethyl methacrylate (PMMA) and polycarbonate (PC) were compared. As a result, it was revealed that proportional relationships were obtained between the etching rate and the irradiation dose for both wavelengths, and the cross-sectional profiles were anisotropic. In addition, both PMMA and PC were etched at a wavelength of 160 nm, whereas PC could not be etched at a wavelength of 172 nm, suggesting that it correlates with the bond dissociation energies of the molecular bonds of the materials and the energies of the photons. Furthermore, by combining this method with the optical bonding method that we had previously developed to bond surfaces irradiated with VUV, we have demonstrated a method for fabricating microfluidic devices by irradiating only with VUV. This paper shows that this technique is a new microfabrication method suitable for simple and mass production of plastic materials.

Microfluidic High-Migratory Cell Collector Suppressing Artifacts Caused by Microstructures

The small number of high-migratory cancer cells in a cell population make studies on high-migratory cancer cells difficult. For the development of migration assays for such cancer cells, several microfluidic devices have been developed. However, they measure migration that is influenced by microstructures and they collect not only high-migratory cells, but also surrounding cells. In order to find high-migratory cells in cell populations while suppressing artifacts and to collect these cells while minimizing damages, we developed a microfluidic high-migratory cell collector with the ability to sort cancer cells according to cellular migration and mechanical detachment. High-migratory cancer cells travel further from the starting line when all of the cells are seeded on the same starting line. The high-migratory cells are detached using a stretch of cell adhesive surface using a water-driven balloon actuator. Using this cell collector, we selected high-migratory HeLa cells that migrated about 100m in 12 h and collected the cells.

Raman imaging spectroscopic characterization of modified poly(dimethylsiloxane) for micro total analysis systems applications

Methacryloxypropyl-modified poly(dimethylsiloxane) rubbers were obtained from poly(dimethylsiloxane), PDMS, and methacryloxypropyltrimethoxysilane, MPTMS, by polycondensation reactions. The modified rubbers, prepared with 20 and 30% (v/v) of MPTMS, were used as substrates for microchannel fabrication by the CO(2) laser ablation technique. Raman imaging spectroscopy was used for the surface characterization, showing the homogeneity of the rubbery material, with uniform distribution of the crosslinking centers. Under the experimental conditions used, damage to the rubber from the CO(2) laser radiation used for the channel engraving was not observed. Correlation maps of the surface were obtained in order to spatially evaluate the modification inside and outside the channels. The correlations between the methacryloxypropyl-modified poly(dimethylsiloxane) rubbers and MPTMS (spectral range of 1800-1550 cm(-1)) and PDMS (spectral range of 820-670 cm(-1)) precursors were higher than 0.95 and 0.99, respectively. In addition, Raman imaging spectroscopy allows monitoring the topography of the fabricated microchannel.