Nishinomiya S, Kubota N, Sagara A, Fukumoto N, Morita H, Hayashi S. Matrix effect-free depth profiling of implanted Mg in Al
x
Ga
1-x
As/GaAs multi-layers by resonance enhanced multiphoton laser post-ionization sputtered neutral mass spectrometry.
SURF INTERFACE ANAL 2012. [DOI:
10.1002/sia.4873]
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