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For: Conard T, Franquet A, Tsvetanova D, Mouhib T, Vandervorst W. Degradation of deep ultraviolet photoresist by As-implantation studied by Ar-cluster beam profiling. SURF INTERFACE ANAL 2012. [DOI: 10.1002/sia.5126] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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Fleischmann C, Conard T, Havelund R, Franquet A, Poleunis C, Voroshazi E, Delcorte A, Vandervorst W. Fundamental aspects of Arn + SIMS profiling of common organic semiconductors. SURF INTERFACE ANAL 2014. [DOI: 10.1002/sia.5621] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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