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For: Clegg JB, Morgan AE, de Grefte HAM, Simondet F, Huber A, Blackmore G, Dowsett MG, Sykes DE, Magee CW, Deline VR. A comparative study of SIMS depth profiling of boron in silicon. SURF INTERFACE ANAL 1984. [DOI: 10.1002/sia.740060403] [Citation(s) in RCA: 21] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
Number Cited by Other Article(s)
1
Chabala J, Soni K, Li J, Gavrilov K, Levi-Setti R. High-resolution chemical imaging with scanning ion probe SIMS. ACTA ACUST UNITED AC 1995. [DOI: 10.1016/0168-1176(94)04119-r] [Citation(s) in RCA: 69] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
2
Chew A, Sykes DE, Houlton MR, Blackmore GW, Blunt RT. SIMS analysis of oxygen in AlxGa1 ?xAs alloys: Variations in sensitivity as a function of alloy composition. SURF INTERFACE ANAL 1993. [DOI: 10.1002/sia.740201109] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
3
Dowsett MG. The application of surface analytical techniques to silicon technology. ACTA ACUST UNITED AC 1991. [DOI: 10.1007/bf00321553] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
4
von Criegern R, Weitzel L, Zeininger H, Lange-Gieseler R. Optimization of the dynamic range of SIMS depth profiles by sample preparation. SURF INTERFACE ANAL 1990. [DOI: 10.1002/sia.740150704] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
5
Hues SM, Colton RJ. Results of a SIMS round robin sponsored by ASTM committee E-42 on surface analysis. SURF INTERFACE ANAL 1989. [DOI: 10.1002/sia.740140302] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
6
Quantitative depth profiling by glow discharge mass spectrometry. SURF INTERFACE ANAL 1988. [DOI: 10.1002/sia.740110105] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
7
Clegg JB, Gale IG, Blackmore G, Dowsett MG, McPhail DS, Spiller GDT, Sykes DE. A SIMS calibration exercise using multi-element (Cr, Fe and Zn) implanted GaAs. SURF INTERFACE ANAL 1987. [DOI: 10.1002/sia.740100705] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
8
Powell CJ, Seah MP. Surface chemical analysis—report on the vamas project. SURF INTERFACE ANAL 1986. [DOI: 10.1002/sia.740090202] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
9
Auger Electron Spectroscopy. ACTA ACUST UNITED AC 1986. [DOI: 10.1007/978-3-642-46571-0_8] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register]
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