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Citation(s) in
RCA
13
(from Reference Citation Analysis)
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Cited by Other Article(s)
1
Liang Z
, Yin Z, Yang H, Xiao Y, Hang W, Li J. Nanoscale surface analysis that combines scanning probe microscopy and mass spectrometry: A critical review.
Trends Analyt Chem
2016. [DOI:
10.1016/j.trac.2015.07.009
]
[
Citation(s) in
RCA
: 16
]
[
Impact Index Per Article: 2.0
]
[
Reference Citation Analysis
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[Indexed: 12/14/2022]
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2
FRANK L
, MATÊJKA F. Edge effect in Auger electron microscopy: Quantification of the effect.
J Microsc
2011. [DOI:
10.1111/j.1365-2818.1995.tb03671.x
]
[
Citation(s) in
RCA
: 2
]
[
Impact Index Per Article: 0.2
]
[
Reference Citation Analysis
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[Indexed: 11/29/2022]
Abstract
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3
King PL
. Artifacts in AES microanalysis for semiconductor applications.
SURF INTERFACE ANAL
2000. [DOI:
10.1002/1096-9918(200008)30:1<377::aid-sia829>3.0.co;2-m
]
[
Citation(s) in
RCA
: 5
]
[
Impact Index Per Article: 0.2
]
[
Reference Citation Analysis
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[Indexed: 11/07/2022]
Abstract
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4
Prutton M
, Barkshire I, Crone M. Quantitative surface chemical mapping with Auger and backscattered electron signals.
Ultramicroscopy
1995. [DOI:
10.1016/0304-3991(95)00017-u
]
[
Citation(s) in
RCA
: 10
]
[
Impact Index Per Article: 0.3
]
[
Reference Citation Analysis
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[Indexed: 11/27/2022]
Abstract
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5
Prutton M
. Microanalytical Imaging with Auger Electrons.
ACTA ACUST UNITED AC
1995. [DOI:
10.1051/mmm:1995121
]
[
Citation(s) in
RCA
: 10
]
[
Impact Index Per Article: 0.3
]
[
Reference Citation Analysis
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[Indexed: 11/15/2022]
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6
Crone M
, Barkshire IR, Prutton M. New technique for the simultaneous correction of topographical and backscattering artefacts in electron-excited Auger spectroscopy and microscopy.
SURF INTERFACE ANAL
1994. [DOI:
10.1002/sia.740211207
]
[
Citation(s) in
RCA
: 5
]
[
Impact Index Per Article: 0.2
]
[
Reference Citation Analysis
]
[
Track Full Text
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[Indexed: 11/09/2022]
Abstract
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7
Hofmann S
. Recent progress in quantitative and high spatial resolution AES.
Mikrochim Acta
1994. [DOI:
10.1007/bf01244531
]
[
Citation(s) in
RCA
: 1
]
[
Impact Index Per Article: 0.0
]
[
Reference Citation Analysis
]
[
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[Indexed: 10/25/2022]
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8
Pamler W
. Advances in Auger microanalysis for semiconductor technology.
SURF INTERFACE ANAL
1994. [DOI:
10.1002/sia.740220172
]
[
Citation(s) in
RCA
: 3
]
[
Impact Index Per Article: 0.1
]
[
Reference Citation Analysis
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[Indexed: 11/05/2022]
Abstract
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9
Nanometer-resolution surface analysis with Auger electrons.
Ultramicroscopy
1993. [DOI:
10.1016/0304-3991(93)90048-3
]
[
Citation(s) in
RCA
: 12
]
[
Impact Index Per Article: 0.4
]
[
Reference Citation Analysis
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[Indexed: 11/20/2022]
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10
Hantsche H
, Schmidt D, Golze M, Zabinski A, Eckardt J, Wirth T. Auger microprobe-surface analysis of sub-?m nitrides and carbonitrides in steel.
Anal Bioanal Chem
1993. [DOI:
10.1007/bf00321377
]
[
Citation(s) in
RCA
: 1
]
[
Impact Index Per Article: 0.0
]
[
Reference Citation Analysis
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[
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[Indexed: 10/26/2022]
Abstract
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11
Hembree G
, Venables J. Nanometer-resolution scanning Auger electron microscopy.
Ultramicroscopy
1992. [DOI:
10.1016/0304-3991(92)90188-p
]
[
Citation(s) in
RCA
: 29
]
[
Impact Index Per Article: 0.9
]
[
Reference Citation Analysis
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[Indexed: 10/27/2022]
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12
Prutton M
, Barkshire IR, El Gomati MM, Greenwood JC, Kenny PG, Roberts RH. The use of metal/semiconductor structures to develop MULSAM analytical techniques.
SURF INTERFACE ANAL
1992. [DOI:
10.1002/sia.740180502
]
[
Citation(s) in
RCA
: 13
]
[
Impact Index Per Article: 0.4
]
[
Reference Citation Analysis
]
[
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[Indexed: 11/08/2022]
Abstract
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13
Hösler W
. Surface analysis at the sidewalls of VLSI patterns—limitations and capabilities of spatially resolved Auger electron spectroscopy.
SURF INTERFACE ANAL
1991. [DOI:
10.1002/sia.740170802
]
[
Citation(s) in
RCA
: 7
]
[
Impact Index Per Article: 0.2
]
[
Reference Citation Analysis
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[Indexed: 11/05/2022]
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