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De A, Jung MH, Kim YH, Bae SB, Jeong SG, Oh JY, Choi Y, Lee H, Kim Y, Choi T, Kim YM, Yang SM, Jeong HY, Choi WS. Symmetry Engineering of Epitaxial Hf 0.5Zr 0.5O 2 Ultrathin Films. ACS APPLIED MATERIALS & INTERFACES 2024; 16:27532-27540. [PMID: 38743018 DOI: 10.1021/acsami.4c03146] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/16/2024]
Abstract
Robust ferroelectricity in HfO2-based ultrathin films has the potential to revolutionize nonvolatile memory applications in nanoscale electronic devices because of their compatibility with the existing Si technology. However, to fully exploit the potential of ferroelectric HfO2-based thin films, it is crucial to develop strategies for the controlled stabilization of various HfO2-based polymorphs in nanoscale heterostructures. This study demonstrates how substrate-orientation-induced anisotropic strain can engineer the crystal symmetry, structural domain morphology, and growth orientation of ultrathin Hf0.5Zr0.5O2 (HZO) films. Epitaxial ultrathin HZO films were grown on the heterostructures of (001)- and (110)-oriented La2/3Sr1/3MnO3/SrTiO3 (LSMO/STO) substrate. Various structural analyses revealed that the (110)-oriented substrate promotes a higher degree of structural order (crystallinity) with improved stability of the (111)-oriented orthorhombic phase (Pca21) of HZO. Conversely, the (001)-oriented substrate not only induces a distorted orthorhombic structure but also facilitates the partial stabilization of nonpolar phases. Electrical measurements revealed robust ferroelectric properties in epitaxial thin films without any wake-up effect, where the well-ordered crystal symmetry stabilized by STO(110) facilitated better ferroelectric characteristics. This study suggests that tuning the epitaxial growth of ferroelectric HZO through substrate orientation can improve the stability of the metastable ferroelectric orthorhombic phase and thereby offer a better understanding of device applications.
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Affiliation(s)
- Arnab De
- Department of Physics, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Min-Hyoung Jung
- Department of Energy Science, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Young-Hoon Kim
- Department of Energy Science, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Seong Bin Bae
- Department of Physics, Sogang University, Seoul 04107, Republic of Korea
| | - Seung Gyo Jeong
- Department of Physics, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Jin Young Oh
- Department of Physics, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Yeongju Choi
- Department of Physics, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Hojin Lee
- Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 143-747, Republic of Korea
| | - Yunseok Kim
- School of Advanced Materials and Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Taekjib Choi
- Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 143-747, Republic of Korea
| | - Young-Min Kim
- Department of Energy Science, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Sang Mo Yang
- Department of Physics, Sogang University, Seoul 04107, Republic of Korea
| | - Hu Young Jeong
- Graduate School of Semiconductor Materials and Devices Engineering, Ulsan National Institute of Science and Technology, Ulsan 44919, Republic of Korea
| | - Woo Seok Choi
- Department of Physics, Sungkyunkwan University, Suwon 16419, Republic of Korea
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Verhage M, van der Minne E, Kiens EM, Korol L, Spiteri RJ, Koster G, Green RJ, Baeumer C, Flipse CFJ. Electronic and Structural Disorder of the Epitaxial La 0.67Sr 0.33MnO 3 Surface. ACS APPLIED MATERIALS & INTERFACES 2024; 16. [PMID: 38619160 PMCID: PMC11056928 DOI: 10.1021/acsami.3c17639] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/24/2023] [Revised: 03/27/2024] [Accepted: 03/28/2024] [Indexed: 04/16/2024]
Abstract
Understanding and tuning epitaxial complex oxide films are crucial in controlling the behavior of devices and catalytic processes. Substrate-induced strain, doping, and layer growth are known to influence the electronic and magnetic properties of the bulk of the film. In this study, we demonstrate a clear distinction between the bulk and surface of thin films of La0.67Sr0.33MnO3 in terms of chemical composition, electronic disorder, and surface morphology. We use a combined experimental approach of X-ray-based characterization methods and scanning probe microscopy. Using X-ray diffraction and resonant X-ray reflectivity, we uncover surface nonstoichiometry in the strontium and lanthanum alongside an accumulation of oxygen vacancies. With scanning tunneling microscopy, we observed an electronic phase separation (EPS) on the surface related to this nonstoichiometry. The EPS is likely driving the temperature-dependent resistivity transition and is a cause of proposed mixed-phase ferromagnetic and paramagnetic states near room temperature in these thin films.
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Affiliation(s)
- Michael Verhage
- Molecular
Materials and Nanosystems (M2N)—Department of Applied Physics, Eindhoven University of Technology, Eindhoven 5612 AP, Netherlands
| | - Emma van der Minne
- MESA+
Institute for Nanotechnology, Faculty of Science and Technology, University of Twente, Enschede 7522 NB, Netherlands
| | - Ellen M. Kiens
- MESA+
Institute for Nanotechnology, Faculty of Science and Technology, University of Twente, Enschede 7522 NB, Netherlands
| | - Lucas Korol
- Department
of Physics & Engineering Physics, University
of Saskatchewan, Saskatoon S7N 5A2, Canada
| | - Raymond J. Spiteri
- Department
of Computer Science, University of Saskatchewan, Saskatoon S7N 5A2, Canada
| | - Gertjan Koster
- MESA+
Institute for Nanotechnology, Faculty of Science and Technology, University of Twente, Enschede 7522 NB, Netherlands
| | - Robert J. Green
- Department
of Physics & Engineering Physics, University
of Saskatchewan, Saskatoon S7N 5A2, Canada
- Stewart
Blusson Quantum Matter Institute, University
of British Columbia, Vancouver V6T 1Z4, Canada
| | - Christoph Baeumer
- MESA+
Institute for Nanotechnology, Faculty of Science and Technology, University of Twente, Enschede 7522 NB, Netherlands
- Peter
Gruenberg
Institute and JARA-FIT, Forschungszentrum
Juelich GmbH, Juelich 52428, Germany
| | - Cornelis F. J. Flipse
- Molecular
Materials and Nanosystems (M2N)—Department of Applied Physics, Eindhoven University of Technology, Eindhoven 5612 AP, Netherlands
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