Arhab S, Soriano G, Ruan Y, Maire G, Talneau A, Sentenac D, Chaumet PC, Belkebir K, Giovannini H. Nanometric resolution with far-field optical profilometry.
PHYSICAL REVIEW LETTERS 2013;
111:053902. [PMID:
23952401 DOI:
10.1103/physrevlett.111.053902]
[Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/10/2013] [Indexed: 06/02/2023]
Abstract
We show experimentally that a resolution far beyond that of conventional far-field optical profilometers can be reached with optical diffraction tomography. This result is obtained in the presence of multiple scattering when using an adapted inverse scattering algorithm for profile reconstruction. This new profilometry technique, whose resolution can be compared to that of atomic microscopes, also gives access to the permittivity of the surface.
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