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For: Ishitani T, Shimizu R. Computer simulation of atomic mixing during ion bombardment. ACTA ACUST UNITED AC 1975. [DOI: 10.1007/bf00883758] [Citation(s) in RCA: 120] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Number Cited by Other Article(s)
1
Hofmann S. Sputter depth profiling: past, present, and future. SURF INTERFACE ANAL 2014. [DOI: 10.1002/sia.5489] [Citation(s) in RCA: 20] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
2
Correlated optical and isotopic nanoscopy. Nat Commun 2014;5:3664. [PMID: 24718107 PMCID: PMC3996535 DOI: 10.1038/ncomms4664] [Citation(s) in RCA: 66] [Impact Index Per Article: 6.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/28/2013] [Accepted: 03/14/2014] [Indexed: 01/06/2023]  Open
3
Switkowski ZE, Haff PK, Tombrello TA, Burnett DS. Mass fractionation of the lunar surface by solar wind sputtering. ACTA ACUST UNITED AC 2012. [DOI: 10.1029/jb082i026p03797] [Citation(s) in RCA: 28] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
4
Carter G, Gras-Marti A, Nobes MJ. Theoretical assessments of major physical processes involved in the depth resolution in sputter profiling. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578208222785] [Citation(s) in RCA: 40] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
5
Dearnaley G. Bombardment-diffused coatings and ion beam mixing. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578208222822] [Citation(s) in RCA: 32] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
6
Roush ML, Andreadis TD, Goktepe OF. Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixing. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578108225473] [Citation(s) in RCA: 74] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
7
Chanbasha AR, Wee ATS. Surface transient effects in ultralow-energy O2+ sputtering of silicon. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.2058] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
8
Taglauer E. Surface cleaning using sputtering. ACTA ACUST UNITED AC 1990. [DOI: 10.1007/bf00324008] [Citation(s) in RCA: 57] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
9
Chambers SA, Howell GA, Greenlee TR, Weaver JH. Characterization of intermixing at metal-semiconductor interfaces by angle-resolved Auger-electron emission: Cu/Si(111)-7 x 7. PHYSICAL REVIEW. B, CONDENSED MATTER 1985;31:6402-6410. [PMID: 9935517 DOI: 10.1103/physrevb.31.6402] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
10
Steinbach A. Neutron microscopy. The low-damage imaging of specialized organic materials. CELL BIOPHYSICS 1985;7:1-29. [PMID: 2408753 DOI: 10.1007/bf02788636] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]
11
King B, Tsong I. The depth resolution of sputter profiling. Ultramicroscopy 1984. [DOI: 10.1016/0304-3991(84)90109-8] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
12
The Theory of Recoil Mixing in Solids. ACTA ACUST UNITED AC 1984. [DOI: 10.1007/978-3-642-46499-7_8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 04/14/2023]
13
Physical Limitations to Sputter Profiling at Interfaces — Model Experiments with Ge/Si Using KARMA. ACTA ACUST UNITED AC 1984. [DOI: 10.1007/978-3-642-46499-7_6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register]
14
Hofmann S, Sanz JM. Depth Resolution and Quantitative Evaluation of AES Sputtering Profiles. THIN FILM AND DEPTH PROFILE ANALYSIS 1984. [DOI: 10.1007/978-3-642-46499-7_7] [Citation(s) in RCA: 24] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/13/2023]
15
Molecular Dynamics Computer Simulation Study of the Damage Produced in Metal Target Surfaces During Ion Bombardment. ACTA ACUST UNITED AC 1984. [DOI: 10.1007/978-3-642-82256-8_7] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register]
16
Vandervorst W, Maes HE, De Keersmaecker R. On the influence of crater edges and neutral beam component on impurity profiles from raster scanning SIMS. SURF INTERFACE ANAL 1982. [DOI: 10.1002/sia.740040606] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
17
Roush M, Andreadis T, Davarya F, Goktepe O. Dynamic simulation of changes in near-surface composition during ion bombardment. ACTA ACUST UNITED AC 1982. [DOI: 10.1016/0378-5963(82)90071-x] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
18
Roush M, Andreadis T, Davarya F, Goktepe O. Simulation of dynamic changes in near-surface composition during ion bombardment. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0029-554x(81)90995-2] [Citation(s) in RCA: 29] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
19
Guenther KH. Nonoptical characterization of optical coatings. APPLIED OPTICS 1981;20:3487-3502. [PMID: 20372207 DOI: 10.1364/ao.20.003487] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
20
Holloway PH, Bhattacharya RS. Limitations of ion etching for interface analysis. SURF INTERFACE ANAL 1981. [DOI: 10.1002/sia.740030305] [Citation(s) in RCA: 36] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
21
Sigmund P, Gras-Marti A. Theoretical aspects of atomic mixing by ion beams. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0029-554x(81)90668-6] [Citation(s) in RCA: 488] [Impact Index Per Article: 11.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
22
Shannon J. Shallow implanted layers in advanced silicon devices. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0029-554x(81)90776-x] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
23
Tsong I, Monkowski J, Hoffman D. Ion-beam-induced atomic mixing at the SiO2/Si interface. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0029-554x(81)90693-5] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
24
Characterization of solids and surfaces using ion beams and mass spectrometry. PROG SOLID STATE CH 1981. [DOI: 10.1016/0079-6786(81)90001-7] [Citation(s) in RCA: 66] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
25
Hofmann S. Quantitative depth profiling in surface analysis: A review. SURF INTERFACE ANAL 1980. [DOI: 10.1002/sia.740020406] [Citation(s) in RCA: 263] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
26
Reuter W, Wittmaack K. An AES-SIMS study of silicon oxidation induced by ion or electron bombardment. ACTA ACUST UNITED AC 1980. [DOI: 10.1016/0378-5963(80)90063-x] [Citation(s) in RCA: 76] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
27
Littmark U, Hofer WO. Recoil mixing in solids by energetic ion beams. ACTA ACUST UNITED AC 1980. [DOI: 10.1016/0029-554x(80)91274-4] [Citation(s) in RCA: 235] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
28
Distortion of depth profiles during sputtering. ACTA ACUST UNITED AC 1980. [DOI: 10.1016/0029-554x(80)91281-1] [Citation(s) in RCA: 192] [Impact Index Per Article: 4.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
29
Computer simulation of low-energy sputtering in the binary collision approximation. ACTA ACUST UNITED AC 1979. [DOI: 10.1007/bf00899692] [Citation(s) in RCA: 72] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
30
The gas ion probe: A novel instrument for analyzing concentration profiles of gases in solids. ACTA ACUST UNITED AC 1979. [DOI: 10.1016/0020-7381(79)80022-4] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
31
The depth resolution of sputter profiling. ACTA ACUST UNITED AC 1979. [DOI: 10.1007/bf00934407] [Citation(s) in RCA: 561] [Impact Index Per Article: 12.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
32
Blank P, Wittmaack K. Implications in the use of sputtering for layer removal: the system Au on Si. ACTA ACUST UNITED AC 1979. [DOI: 10.1080/01422447908226479] [Citation(s) in RCA: 24] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
33
Raster scanning depth profiling of layer structures. ACTA ACUST UNITED AC 1977. [DOI: 10.1007/bf00896140] [Citation(s) in RCA: 74] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
34
Liebl H, Harrison W. Study of an iodine discharge in a duoplasmatron. ACTA ACUST UNITED AC 1976. [DOI: 10.1016/0020-7381(76)80083-6] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
35
An electronic aperture for in-depth analysis of solids with an ion microprobe. ACTA ACUST UNITED AC 1976. [DOI: 10.1016/0020-7381(76)80015-0] [Citation(s) in RCA: 22] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
36
Hurrle A, Sixt G. Cesium profiles in silicon and in SiO2-Si double-layers as determined by SIMS measurements. ACTA ACUST UNITED AC 1975. [DOI: 10.1007/bf00898362] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
37
Ishitani T, Shimizu R, Tamura H. Atomic mixing in ion probe microanalysis. ACTA ACUST UNITED AC 1975. [DOI: 10.1007/bf00883764] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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