Review on macromodels of MEMS sensors and actuators

A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor

When using a MEMS sensor to measure the vacuum of a medium, the transition flow between the viscous flow and molar flow is usually used to describe the gas convection due to the physical principle, which is difficult to study through analysis and simulation. In this study, the description of gas flow under different pressures in a CMOS-MEMS vacuum sensors has been incorporated into a new behavioral ANSYS model. The proposed model was built and the characteristic parameters in the model were obtained based on a CMOS-MEMS thermopile patterned with circular symmetry and an embedded heater as a heat source. It contains a characteristic length to describe the effective distance of heat dissipation to the silicon substrate, and the corresponding transition pressure to describe the symmetrical phenomenon of gas heat conduction. The macro-model is based on the description of the physical characteristics of heat transfer and the characteristic parameters of the CMOS-MEMS vacuum sensor. The characteristic length of 49 μm and the corresponding transition pressure of 2396 mTorr for the thermoelectric-type vacuum sensor were extracted and verified successfully. The results show that the average error for the prediction of vacuum sensing by the macro-model we proposed is about 1.11%. This approach provides more applications for vacuum analysis. It can reduce the complexity of simulation and analysis and provide better simulation effects, including gas conduction mechanisms.

Design and Analysis of a Turning Dynamometer Embedded in Thin-Film Sensor

This paper proposes a high-strain sensitivity turning dynamometer that combines several thin-film resistor grids into three Wheatstone full-bridge circuits that can measure triaxial cutting forces. This dynamometer can replace different cutter heads using flange connections. In order to improve the strain effect of the dynamometer, the strain film sensor is fixed on the regular octagonal connection plates on both ends of the elastomer by vacuum brazing, and the stepped groove structure is also designed inside the elastomer. The dynamometer model is simplified as a four-segment cantilever beam which has different sections. The measurement mechanism model of the dynamometer system is established by the transformation relationship between deflection and strain, under external force. The standard turning tool of 20 mm square is used as a reference. The influence of the structural dimensions of the dynamometer on its strain sensitivity coefficient K is studied. The applicability of the theoretical model of dynamometer strain is verified by finite element analysis. Finally, the dynamometer with the largest K value is subjected to the bending test and compared with a standard turning tool. The experimental results show that the measurement sensitivity of the dynamometer is 2.32 times greater than that of the standard turning tool. The results also show that this dynamometer can effectively avoid the influence of the pasting process on strain transmission, thus indicating its great potential for measuring cutting force in the future.