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Jang YJ, Sharma A, Jung JP. Advanced 3D Through-Si-Via and Solder Bumping Technology: A Review. MATERIALS (BASEL, SWITZERLAND) 2023; 16:7652. [PMID: 38138794 PMCID: PMC10744783 DOI: 10.3390/ma16247652] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/24/2023] [Revised: 12/03/2023] [Accepted: 12/12/2023] [Indexed: 12/24/2023]
Abstract
Three-dimensional (3D) packaging using through-Si-via (TSV) is a key technique for achieving high-density integration, high-speed connectivity, and for downsizing of electronic devices. This paper describes recent developments in TSV fabrication and bonding methods in advanced 3D electronic packaging. In particular, the authors have overviewed the recent progress in the fabrication of TSV, various etching and functional layers, and conductive filling of TSVs, as well as bonding materials such as low-temperature nano-modified solders, transient liquid phase (TLP) bonding, Cu pillars, composite hybrids, and bump-free bonding, as well as the role of emerging high entropy alloy (HEA) solders in 3D microelectronic packaging. This paper serves as a guideline enumerating the current developments in 3D packaging that allow Si semiconductors to deliver improved performance and power efficiency.
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Affiliation(s)
- Ye Jin Jang
- Department of Materials Science and Engineering, University of Seoul, Seoul 02504, Republic of Korea;
| | - Ashutosh Sharma
- Department of Materials Science and Engineering, Ajou University, 206-Worldcup-ro, Yeongtong-gu, Gyeonggi-do, Suwon 16499, Republic of Korea
| | - Jae Pil Jung
- Department of Materials Science and Engineering, University of Seoul, Seoul 02504, Republic of Korea;
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Stephen N, Kumar P, Gocalinska A, Mura E, Kepaptsoglou D, Ramasse Q, Pelucchi E, Arredondo M. Dislocation and strain mapping in metamorphic parabolic-graded InGaAs buffers on GaAs. JOURNAL OF MATERIALS SCIENCE 2023; 58:9547-9561. [PMID: 37323808 PMCID: PMC10261241 DOI: 10.1007/s10853-023-08597-y] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/30/2023] [Accepted: 05/12/2023] [Indexed: 06/17/2023]
Abstract
We investigate different architectures for parabolic-graded InGaAs metamorphic buffers grown on GaAs using transmission electron microscopy techniques. The different architectures include InGaP and AlInGaAs/InGaP superlattices with different GaAs substrate misorientations and the inclusion of a strain balancing layer. Our results correlate: (i) the density and distribution of dislocations in the metamorphic buffer and (ii) the strain in the next layer preceding the metamorphic buffer, which varies for each type of architecture. Our findings indicate that the dislocation density in the lower region of the metamorphic layer ranges between 108 and 1010 cm-2, with AlInGaAs/InGaP superlattice samples exhibiting higher values compared to samples with InGaP films. We have identified two waves of dislocations, with threading dislocations typically located lower in the metamorphic buffer (~ 200-300 nm) in comparison to misfit dislocations. The measured localised strain values are in good agreement with theoretical predications. Overall, our results provide a systematic insight into the strain relaxation across different architectures, highlighting the various approaches that can be used to tailor strain in the active region of a metamorphic laser. Graphical abstract Supplementary Information The online version contains supplementary material available at 10.1007/s10853-023-08597-y.
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Affiliation(s)
- Nicholas Stephen
- School of Mathematics and Physics, Queen’s University Belfast, University Road, Belfast, UK
| | - Praveen Kumar
- School of Mathematics and Physics, Queen’s University Belfast, University Road, Belfast, UK
- Shared Instrumentation Facility, Colorado School of Mines, Golden, CO USA
| | - Agnieszka Gocalinska
- Tyndall National Institute, University College Cork, “Lee Maltings”, Dyke Parade, Cork, Ireland
| | - Enrica Mura
- Tyndall National Institute, University College Cork, “Lee Maltings”, Dyke Parade, Cork, Ireland
| | - Demie Kepaptsoglou
- SuperSTEM Laboratory, SciTech Daresbury Campus, Daresbury, UK
- Department of Physics, University of York, Heslington, York UK
| | - Quentin Ramasse
- SuperSTEM Laboratory, SciTech Daresbury Campus, Daresbury, UK
- School of Chemical and Process Engineering and School of Physics and Astronomy, University of Leeds, Leeds, UK
| | - Emanuele Pelucchi
- Tyndall National Institute, University College Cork, “Lee Maltings”, Dyke Parade, Cork, Ireland
| | - Miryam Arredondo
- School of Mathematics and Physics, Queen’s University Belfast, University Road, Belfast, UK
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