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Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials. J Radioanal Nucl Chem 2020. [DOI: 10.1007/s10967-020-07295-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
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Vorotyntsev AV, Petukhov AN, Trubyanov MM, Atlaskin AA, Makarov DA, Sergeeva MS, Vorotyntsev IV, Vorotyntsev VM. Progress and perspectives in high-purity substance production for semiconductor industry. REV CHEM ENG 2019. [DOI: 10.1515/revce-2018-0046] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
Abstract
Abstract
In the last decade, novel approaches for post-synthesis processes of separation and high purification of gases are gaining larger acceptance in industry. The market is competing with consolidated operations such as cryogenic distillation. The key for new approaches of distillation, membranes and crystallization in challenging and harsh environments is the development of new tough, high-performance materials that are characterized by higher energy efficiency compared with conventional cryogenic distillation. This review highlights the most promising fields of research in high purification and separation of gases by considering the elevated pressure and thermal distillations, membrane cascades, purification in synthesis by use of catalytic technologies, crystallization and hydride methods based on them.
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Affiliation(s)
- Andrey V. Vorotyntsev
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
| | - Anton N. Petukhov
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
| | - Maxim M. Trubyanov
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
| | - Artem A. Atlaskin
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
| | - Dmitriy A. Makarov
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
| | - Maria S. Sergeeva
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
| | - Ilya V. Vorotyntsev
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
| | - Vladimir M. Vorotyntsev
- Nizhny Novgorod State Technical University n.a. R.E. Alekseev , Minina str. 24 , Nizhny Novgorod 603950 , Russia
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Shabarova LV, Kornev RA, Sennikov PG. Simulation of Gas-Dynamic and Thermal Processes in Vortex-Stabilized, Inductively Coupled Argon–Hydrogen Plasma. HIGH ENERGY CHEMISTRY 2018. [DOI: 10.1134/s0018143918050120] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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Churbanov MF, Gavva VA, Bulanov AD, Abrosimov NV, Kozyrev EA, Andryushchenko IA, Lipskii VA, Adamchik SA, Troshin OY, Lashkov AY, Gusev AV. Production of germanium stable isotopes single crystals. CRYSTAL RESEARCH AND TECHNOLOGY 2017. [DOI: 10.1002/crat.201700026] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
- Mihail Fedorovich Churbanov
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Vladimir A. Gavva
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Andrey D. Bulanov
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | | | - Eugeniy A. Kozyrev
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Ivan A. Andryushchenko
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Victor A. Lipskii
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Sergey A. Adamchik
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Oleg Yu. Troshin
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Artem Yu. Lashkov
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
| | - Anatoly V. Gusev
- G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS; Tropinina str.,49 603951 Nizhnii Novgorod Russia
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