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For: Blank P, Wittmaack K, Schulz F. The influence of sputtering, range shortening and stress-induced outdiffusion on the retention of xenon implanted in silicon. ACTA ACUST UNITED AC 1976. [DOI: 10.1016/0029-554x(76)90763-1] [Citation(s) in RCA: 36] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]

For:	Blank P, Wittmaack K, Schulz F. The influence of sputtering, range shortening and stress-induced outdiffusion on the retention of xenon implanted in silicon. ACTA ACUST UNITED AC 1976. [DOI: 10.1016/0029-554x(76)90763-1] [Citation(s) in RCA: 36] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]

Number	Cited by Other Article(s)
1	Hautala M. Monte-Carlo calculation of low energy ion collection in the presence of sputtering, range shortening, knock-on and diffusion. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578008209265] [Citation(s) in RCA: 33] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
2	Thompson DA. High density cascade effects. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578108229885] [Citation(s) in RCA: 221] [Impact Index Per Article: 12.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
3	Carter G, Armour DG, Donnelly SE, Ingram DC, Webb RP. The injection of inert gas ions into solids: Their trapping and escape. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578008207113] [Citation(s) in RCA: 31] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
4	Seah MP, Clifford CA, Green FM, Gilmore IS. An accurate semi-empirical equation for sputtering yields I: for argon ions. SURF INTERFACE ANAL 2005. [DOI: 10.1002/sia.2032] [Citation(s) in RCA: 102] [Impact Index Per Article: 5.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
5	On the fluence dependence of the sputtering yield for low-energy noble gas ions. ACTA ACUST UNITED AC 1982. [DOI: 10.1007/bf00617769] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
6	Gras-Marti A, Jimenez-Rodriguez J, Peon-Fernandez J, Rodriguez-Vidal M, Tognetti N, Carter G, Nobes M, Armour D. Atomic mixing effects on high fluence Ge implantation into Si at 40 keV. ACTA ACUST UNITED AC 1982. [DOI: 10.1016/0029-554x(82)90562-6] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
7	Wittmaack K. Implications in the use of reactive ion bombardment for secondary ion yield enhancement. ACTA ACUST UNITED AC 1981. [DOI: 10.1016/0378-5963(81)90045-3] [Citation(s) in RCA: 40] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
8	Malherbe JB, Hofmann S. Low energy nitrogen implantation profiles in cobalt using AES. SURF INTERFACE ANAL 1980. [DOI: 10.1002/sia.740020507] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
9	Carter G, Webb R, Collins R. Implant ion collection in the presence of radiation enhanced diffusion and preferential sputtering of implant. ACTA ACUST UNITED AC 1979. [DOI: 10.1080/01422447908229237] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
10	Kempf J. AES investigations of Ar+ ion retention in Si during Ar sputtering. ACTA ACUST UNITED AC 1978. [DOI: 10.1007/bf00931420] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
11	Wach W, Wittmaack K. Comparison of xenon retention in ion implanted silicon dioxide and oxygen-doped silicon. ACTA ACUST UNITED AC 1978. [DOI: 10.1016/0029-554x(78)90870-4] [Citation(s) in RCA: 24] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
12	Christodoulides C, Grant W, Williams J. The determination of high-dose implantation profiles using low-angle Rutherford backscattering. ACTA ACUST UNITED AC 1978. [DOI: 10.1016/0029-554x(78)90863-7] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
13	Wittmaack K, Blank P, Wach W. High fluence retention of noble gases implanted in silicon. ACTA ACUST UNITED AC 1978. [DOI: 10.1080/00337577808237907] [Citation(s) in RCA: 39] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
14	Kempf J, Kaus G. 3 to 15 keV Ar+ induced Auger electron emission from Si and Ar. ACTA ACUST UNITED AC 1977. [DOI: 10.1007/bf00882890] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse
15	Bhattacharya RS, Van Der Veen JF, Kerkdijk CBW, Saris FW. Bombardment induced light emission from silicon, silicon nitride and silicon carbide surfaces. ACTA ACUST UNITED AC 1977. [DOI: 10.1080/00337577708237452] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse