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Yang Y, Tian H, Wang YF, Shu Y, Zhou CJ, Sun H, Zhang CH, Chen H, Ren TL. An ultra-high element density pMUT array with low crosstalk for 3-D medical imaging. SENSORS 2013; 13:9624-34. [PMID: 23896705 PMCID: PMC3812571 DOI: 10.3390/s130809624] [Citation(s) in RCA: 33] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/13/2013] [Revised: 07/17/2013] [Accepted: 07/19/2013] [Indexed: 11/30/2022]
Abstract
A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.
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Affiliation(s)
- Yi Yang
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - He Tian
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - Yu-Feng Wang
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - Yi Shu
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - Chang-Jian Zhou
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - Hui Sun
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - Cang-Hai Zhang
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - Hao Chen
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
| | - Tian-Ling Ren
- Institute of Microelectronics, Tsinghua University, Beijing 100084, China; E-Mails: (Y.Y.); (H.T.); (Y.-F.W.); (Y.S.); (C.-J.Z.); (H.S.); (C.-H.Z.); (H.C.)
- Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
- Author to whom correspondence should be addressed; E-Mail: ; Tel.: +86-10-6279-8569; Fax: +86-10-6277-1130
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Gudmundsen TE, Ostensen H, Vinje B, Pedersen HK. Imaging routines for the esophagus, small bowel, abdomen, and liver in six Norwegian hospitals from 1975 to 1993. Clin Imaging 1996; 20:256-61. [PMID: 8959364 DOI: 10.1016/0899-7071(95)00037-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/03/2023]
Abstract
The roles of liver scintigraphy in addition to other imaging modalities of the esophagus and the small bowel and the use of abdominal flat films were studied in six Norwegian hospitals between 1975 and 1993. Parallel to the introduction of ultrasonography, the use of liver scintigraphy disappeared almost completely. Barium studies of the esophagus, to some degree, have been replaced by endoscopy, whereas use of barium studies of the small bowel remained unchanged or increased. The number of flat-film studies of the abdomen performed remained unchanged.
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Affiliation(s)
- T E Gudmundsen
- Department of Radiology, Central Hospital of Buskerud, Drammen, Norway
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