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For: Krumdieck S, Cave H, Baluti S, Jermy M, Peled A. Expansion transport regime in pulsed-pressure chemical vapor deposition. Chem Eng Sci 2007. [DOI: 10.1016/j.ces.2007.07.003] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
Number Cited by Other Article(s)
1
Siriwongrungson V, Krumdieck SP, Alkaisi MM. Conformality Investigation of Titanium Dioxide Thin Films on 3-D Micrometer- and Nanometer-scale Features by Pulsed-Pressure Metal-organic CVD. ACTA ACUST UNITED AC 2011. [DOI: 10.1002/cvde.201106912] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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