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Scott EA, King SW, Jarenwattananon NN, Lanford WA, Li H, Rhodes J, Hopkins PE. Thermal Conductivity Enhancement in Ion-Irradiated Hydrogenated Amorphous Carbon Films. NANO LETTERS 2021; 21:3935-3940. [PMID: 33886340 DOI: 10.1021/acs.nanolett.1c00616] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Amorphous solids are traditionally assumed to set the lower bound to the vibrational thermal conductivity of a material due to the high degree of structural disorder. Here, were demonstrate the ability to increase the thermal conductivity of amorphous solids through ion irradiation, in turn, altering the bonding network configuration. We report on the thermal conductivity of hydrogenated amorphous carbon implanted with C+ ions spanning fluences of 3 × 1014-8.6 × 1014 cm-2 and energies of 10-20 keV. Time-domain thermoreflectance measurements of the films' thermal conductivities reveal significant enhancement, up to a factor of 3, depending upon the preirradiation composition. Films with higher initial hydrogen content provide the greatest increase, which is complemented by an increased stiffening and densification from the irradiation process. This enhancement in vibrational transport is unique when contrasted to crystalline materials, for which ion implantation is known to produce structural degradation and significantly reduced thermal conductivities.
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Affiliation(s)
- Ethan A Scott
- Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States
| | - Sean W King
- Logic Technology Development, Intel Corporation, Hillsboro, Oregon 97124, United States
| | - Nanette N Jarenwattananon
- Center for Materials Characterization in Oregon, University of Oregon, Eugene, Oregon 97403, United States
| | - William A Lanford
- Physics Department, University at Albany, SUNY, Albany, New York 12222, United States
| | - Han Li
- CQN Labs, Intel Corporation, Hillsboro, Oregon 97124, United States
| | - James Rhodes
- Logic Technology Development, Intel Corporation, Hillsboro, Oregon 97124, United States
| | - Patrick E Hopkins
- Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States
- Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States
- Department of Physics, University of Virginia, Charlottesville, Virginia 22904, United States
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