1
|
Burghaus U. Applications of electron beam lithography in surface science and catalysis – model-nano-array catalysts. CATALYSIS 2013. [DOI: 10.1039/9781849737203-00141] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/29/2023]
Abstract
Applications of electron beam lithography (EBL) in surface science and catalysis are detailed. Advantages and disadvantages of EBL in that field are critically discussed. Emphasis is placed on ultra-high vacuum model studies utilizing so-called model nano array catalysts which consist of a simple predetermined perriodic arrangement of clusters on a support. Discussed are surface reactions as well as the kinetics and dynamics of the interactions of gas-phase species with EBL catalysts. In addition, physical properties of these model catalysts are describes including theire cleaning, thermal stability, and composition.
Collapse
Affiliation(s)
- Uwe Burghaus
- North Dakota State UniversityFargo, North Dakota,
| |
Collapse
|