Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

Development and Analysis of Electrochemical Reactor with Vibrating Functional Element for AAO Nanoporous Membranes Fabrication

Nanoporous anodic aluminum oxide (AAO) is needed for a variety of purposes due to its unique properties, including high hardness, thermal stability, large surface area, and light weight. Nevertheless, the use of AAO in different applications is limited because of its brittleness. A new design of an electrochemical reactor with a vibrating element for AAO nanoporous membranes fabrication is proposed. The vibrating element in the form of a piezoceramic ring was installed inside the developed reactor, which allows to create a high-frequency excitation. Furthermore, mixing and vibration simulations in the novel reactor were carried out using ANSYS 17 and COMSOL Multiphysics 5.4 software, respectively. By theoretical calculations, the possibility to excite the vibrations of five resonant modes at different frequencies in the AAO membrane was shown. The theoretical results were experimentally confirmed. Five vibration modes at close to the theoretical frequencies were obtained in the novel reactor. Moreover, nanoporous AAO membranes were synthesized. The novel aluminum anodization technology results in AAO membranes with 82.6 ± 10 nm pore diameters and 43% porosity at 3.1 kHz frequency excitation and AAO membranes with 86.1 ± 10 nm pore diameters and 46% porosity at 4.1 kHz frequency excitation. Furthermore, the chemical composition of the membrane remained unchanged, and the hardness decreased. Nanoporous AAO has become less brittle but hard enough to be used for template synthesis.

Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming

It is difficult to fabricate three-dimensional structures using semiconductor-process technology, because it is based on two-dimensional layered structure fabrication and the etching of thin films. In this study, we fabricated metal structures that can be dynamically deformed from two-dimensional to three-dimensional shapes by combining patterning using photolithography with electroforming technology. First, a resist structure was formed on a Cu substrate. Then, using a Ni sulfamate electroforming bath, a Ni structure was formed by electroforming the fabricated resist structure. Finally, the resist structure was removed to release the Ni structure fabricated on the substrate, and electroforming was used to Au-plate the entire surface. Scanning-electron microscopy revealed that the structure presented a high aspect ratio (thickness/resist width = 3.5), and metal structures could be fabricated without defects across the entire surface, including a high aspect ratio. The metallic structures had an average film thickness of 12.9 µm with σ = 0.49 µm, hardness of 600 HV, and slit width of 7.9 µm with σ = 0.25 µm. This microfabrication enables the fabrication of metal structures that deform dynamically in response to hydrodynamic forces in liquid and can be applied to fields such as environmental science, agriculture, and medicine.

Unraveling the six stages of the current-time curve and the bilayer nanotubes obtained by one-step anodization of Zr

The application and growth mechanism of anodic TiO2 nanotubes have been a hot topic in the last ten years, but the formation mechanism of anodic ZrO2 nanotubes has rarely been studied. In one-step constant voltage anodization of Al and Ti, the typical current-time curve has three stages. Moreover, the current-time curves of the three stages can last for 10 min or even 10 hours, resulting in a single layer of nanotubes with the same diameter due to the constant voltage in one-step anodization. However, in this paper, it was found for the first time that the three stages of the current-time curve appeared twice in succession during one-step constant voltage anodization of Zr for only 900 seconds, and bilayer nanotubes with increased diameter were obtained. This six-stage current-time curve cannot be explained by classical field-assisted dissolution and field-assisted flow or stress-driven mechanisms. Here, the formation mechanism and growth kinetics of bilayer ZrO2 nanotubes have been clarified rationally by the theories of ionic current, electronic current and oxygen bubble mold. The interesting results presented in this paper are of great significance for revealing the anodizing process of various metals and the formation mechanism of porous structures.

Debunking the essential effect of temperature and voltage on the current curve and the nanotube morphology

The formation mechanism of anodic TiO2 nanotubes remains to be unclear till now. Many researchers study the influence of temperatures above 0 °C instead of below 0 °C. Few papers before have explained the relationship between the current-time curve and the morphology of the nanotubes. In this study, the innovative 'oxygen bubble model' and the ionic current and electronic current theories were introduced to explain the growth of nanotubes below 0 °C. The length of anodic TiO2 nanotubes at 15 °C, 0 °C, -10 °C were 1.28 μm, 0.93 μm and 0.21 μm, respectively, but the diameter of anodic TiO2 nanotubes was almost the same, at about 164 nm. When the temperature was low, the magnitude of electronic current and the ionic current was small, the mold effect was weak and nanotubes could not be formed. At the same time, this study shows that the dissolution reaction of the field-assisted solution theory has no electron gain or loss, and it has nothing to do with the current, which negates the field-assisted dissolution theory. A novel two-step anodization was used to verify the conclusion. It was found that nanotubes could be obtained when the anodizing current was decreasing or increasing. Also, ginseng-shaped nanotubes are formed at a particular voltage sequence. Based on the 'oxygen bubble model' and the ionic current and electronic current theories, the formation process of nanotubes of two-step anodization is explained clearly.