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For: Laloum D, Lorut F, Bertheau J, Audoit G, Bleuet P. Deep sub micrometer imaging of defects in copper pillars by X-ray tomography in a SEM. Micron 2013;58:1-8. [PMID: 24316374 DOI: 10.1016/j.micron.2013.10.014] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/01/2013] [Revised: 10/28/2013] [Accepted: 10/28/2013] [Indexed: 10/26/2022]
Number Cited by Other Article(s)
1
Laloum D, Printemps T, Lorut F, Bleuet P. Correction of absorption-edge artifacts in polychromatic X-ray tomography in a scanning electron microscope for 3D microelectronics. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2015;86:013703. [PMID: 25638086 DOI: 10.1063/1.4905117] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
2
LALOUM D, PRINTEMPS T, SANCHEZ D, LORUT F, AUDOIT G, BLEUET P. Reduction of the scanning time by total variation minimization reconstruction for X-ray tomography in a SEM. J Microsc 2014;256:90-9. [DOI: 10.1111/jmi.12162] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/28/2014] [Accepted: 07/08/2014] [Indexed: 11/30/2022]
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