1
|
Ma Z, Wang W, Xiong Y, Long Y, Shao Q, Wu L, Wang J, Tian P, Khan AU, Yang W, Dong Y, Yin H, Tang H, Dai J, Tahir M, Liu X, He L. Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large-Scale Fabrication, and Performance Optimization. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2400179. [PMID: 39031523 DOI: 10.1002/smll.202400179] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/08/2024] [Revised: 07/03/2024] [Indexed: 07/22/2024]
Abstract
With the rapid development of micro/nano machining, there is an elevated demand for high-performance microdevices with high reliability and low cost. Due to their outstanding electrochemical, optical, electrical, and mechanical performance, carbon materials are extensively utilized in constructing microdevices for energy storage, sensing, and optoelectronics. Carbon micro/nano machining is fundamental in carbon-based intelligent microelectronics, multifunctional integrated microsystems, high-reliability portable/wearable consumer electronics, and portable medical diagnostic systems. Despite numerous reviews on carbon materials, a comprehensive overview is lacking that systematically encapsulates the development of high-performance microdevices based on carbon micro/nano structures, from structural design to manufacturing strategies and specific applications. This review focuses on the latest progress in carbon micro/nano machining toward miniaturized device, including structural engineering, large-scale fabrication, and performance optimization. Especially, the review targets an in-depth evaluation of carbon-based micro energy storage devices, microsensors, microactuators, miniaturized photoresponsive and electromagnetic interference shielding devices. Moreover, it highlights the challenges and opportunities in the large-scale manufacturing of carbon-based microdevices, aiming to spark further exciting research directions and application prospectives.
Collapse
Affiliation(s)
- Zeyu Ma
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Wenwu Wang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yibo Xiong
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yihao Long
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Qi Shao
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Leixin Wu
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Jiangwang Wang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Peng Tian
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Arif Ullah Khan
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Wenhao Yang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yixiao Dong
- Pritzker School of Molecular Engineering, University of Chicago, 5640 South Ellis Avenue, Chicago, IL, 60637, USA
| | - Hongbo Yin
- Department of Ophthalmology, West China Hospital, Sichuan University, Chengdu, 610041, P. R. China
| | - Hui Tang
- School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, P. R. China
| | - Jun Dai
- School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
| | - Muhammad Tahir
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
- School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
| | - Xiaoyu Liu
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Liang He
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
- Med+X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, P. R. China
- Yibin Industrial Technology Research Institute of Sichuan University, Yibin R&D Park of Sichuan University, Yibin, 644005, P. R. China
| |
Collapse
|
2
|
Shivasharma TK, Upadhyay N, Deshmukh TB, Sankapal BR. Exploring Vacuum-Assisted Thin Films toward Supercapacitor Applications: Present Status and Future Prospects. ACS OMEGA 2023; 8:37685-37719. [PMID: 37867670 PMCID: PMC10586283 DOI: 10.1021/acsomega.3c05285] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/21/2023] [Accepted: 09/14/2023] [Indexed: 10/24/2023]
Abstract
Demand for high-performance energy storage devices is growing tremendously. Supercapacitors possess an excellent candidature to fulfill the energy storage requisites such as high energy density when compared to conventional capacitors, high power density, and cycling stability as compared to batteries, though not only for large-scale devices for higher energy/power density applications but also for macro- to microdevices for miniaturized electrical components. With the aid of various routes, many materials have been explored with well-tuned properties with controlled surface architecture through various preparative parameters to find those best suited for supercapacitive electrodes. Growth of a thin film can be accomplished through chemical or physical (vacuum-assisted) routes. Vacuum-assisted (physical) growth yields high purity, precise dimensions with a line-of-sight deposition, along with high adhesion between the film and the substrates, and hence, these techniques are necessary to manufacture many macro- to microscale supercapacitor devices. Still, much effort has not been put forth to explore vacuum-assisted techniques to fabricate supercapacitive electrodes and energy storage applications. The present review explores the first comprehensive report on the growth of widespread materials through vacuum-assisted physical deposition techniques inclusive of thermal evaporation, e-beam evaporation, sputtering, and laser beam ablation toward supercapacitive energy storage applications on one platform. The theoretical background of nucleation and growth through physical deposition, optimization of process parameters, and characterization to supercapacitor applications from macro- to microscale devices has been well explored to a provide critical analysis with literature-reviewed materials. The review ends with future challenges to bring out upcoming prospects to further enhance supercapacitive performance, as much work and materials need to be explored through these routes.
Collapse
Affiliation(s)
- T. Kedara Shivasharma
- Nano Materials and Device
Laboratory, Department of Physics, Visvesvaraya
National Institute of Technology, South Ambazari Road, Nagpur, 440010 M.S., India
| | - Nakul Upadhyay
- Nano Materials and Device
Laboratory, Department of Physics, Visvesvaraya
National Institute of Technology, South Ambazari Road, Nagpur, 440010 M.S., India
| | - Tushar Balasaheb Deshmukh
- Nano Materials and Device
Laboratory, Department of Physics, Visvesvaraya
National Institute of Technology, South Ambazari Road, Nagpur, 440010 M.S., India
| | - Babasaheb R. Sankapal
- Nano Materials and Device
Laboratory, Department of Physics, Visvesvaraya
National Institute of Technology, South Ambazari Road, Nagpur, 440010 M.S., India
| |
Collapse
|
3
|
Sohouli E, Teymourinia H, Ramazani A, Adib K. Preparation of high-performance supercapacitor electrode with nanocomposite of CuO/NCNO flower-like. Sci Rep 2023; 13:16221. [PMID: 37758758 PMCID: PMC10533827 DOI: 10.1038/s41598-023-43430-1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/05/2022] [Accepted: 09/23/2023] [Indexed: 09/29/2023] Open
Abstract
Due to the importance of energy storage systems based on supercapacitors, various studies have been conducted. In this research CuO, NCNO and the flower like CuO/NCNO have been studied as a novel materials in this field. The resulte showed that the synthesized CuO nanostructutes have flower like morphology which studied by FE-SEM analisis. Further, the XRD pattern confirmed the crystalline properties of the CuO/NCNO nanocomposite, and the Raman verified the functional groups and vibrations of the components of CuO/NCNO nanocomposite. In a two-electrode system at a current density of 4 A/g, the capacitance, power density, and energy density were 450 F/g, 3200 W/kg, and 98 Wh/kg, respectively. The charge transfer resistances of CuO and NCNO/CuO electrodes obtained 8 and 2 Ω respectively, which show that the conductivity and supercapacitive properties of nanocomposite are better than pure components. Also, the stability and low charge transfer resistance are other advantages obtained in a two-symmetrical electrode investigation. The stability investigation showed that after 3000 consecutive cycles, only 4% of the initial capacitance of the CuO/NCNO electrode decreased.
Collapse
Affiliation(s)
- Esmail Sohouli
- Department of Chemistry, Faculty of Science, University of Imam Hossein, Tehran, Iran
| | - Hakimeh Teymourinia
- Department of Biotechnology, Research Institute of Modern Biological Techniques (RIMBT), University of Zanjan, Zanjan, 45371-38791, Iran
- Department of Chemistry, Faculty of Science, University of Zanjan, Zanjan, 45371-38791, Iran
| | - Ali Ramazani
- Department of Biotechnology, Research Institute of Modern Biological Techniques (RIMBT), University of Zanjan, Zanjan, 45371-38791, Iran
- Department of Chemistry, Faculty of Science, University of Zanjan, Zanjan, 45371-38791, Iran
| | - Koroush Adib
- Department of Chemistry, Faculty of Science, University of Imam Hossein, Tehran, Iran.
| |
Collapse
|
4
|
Singh BK, Das D, Attarzadeh N, Chintalapalle SN, Ramana CV. Enhanced electrochemical performance of 3‐D microporous nickel/nickel oxide nanoflakes for application in supercapacitors. NANO SELECT 2023. [DOI: 10.1002/nano.202200180] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/16/2023] Open
Affiliation(s)
- Balwant Kr. Singh
- Centre for Advanced Materials Research (CMR) University of Texas at El Paso El Paso Texas USA
| | - Debabrata Das
- Centre for Advanced Materials Research (CMR) University of Texas at El Paso El Paso Texas USA
| | - Navid Attarzadeh
- Centre for Advanced Materials Research (CMR) University of Texas at El Paso El Paso Texas USA
- Environmental Science and Engineering University of Texas at El Paso El Paso Texas USA
| | - Srija N. Chintalapalle
- Centre for Advanced Materials Research (CMR) University of Texas at El Paso El Paso Texas USA
| | - Chintalapalle V. Ramana
- Centre for Advanced Materials Research (CMR) University of Texas at El Paso El Paso Texas USA
- Department of Mechanical Engineering University of Texas at El Paso El Paso Texas USA
| |
Collapse
|
5
|
Pallavolu MR, Gaddam N, Banerjee AN, Nallapureddy RR, Kumar YA, Joo SW. Facile construction and controllable design of CoTiO3@Co3O4/N CNO hybrid heterojunction nanocomposite electrode for high-performance supercapacitors. Electrochim Acta 2022. [DOI: 10.1016/j.electacta.2022.139868] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/03/2022]
|
6
|
Wi SM, Kim J, Lee S, Choi YR, Kim SH, Park JB, Cho Y, Ahn W, Jang AR, Hong J, Lee YW. A Redox-Mediator-Integrated Flexible Micro-Supercapacitor with Improved Energy Storage Capability and Suppressed Self-Discharge Rate. NANOMATERIALS (BASEL, SWITZERLAND) 2021; 11:3027. [PMID: 34835791 PMCID: PMC8624181 DOI: 10.3390/nano11113027] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/15/2021] [Revised: 11/04/2021] [Accepted: 11/05/2021] [Indexed: 11/17/2022]
Abstract
To effectively improve the energy density and reduce the self-discharging rate of micro-supercapacitors, an advanced strategy is required. In this study, we developed a hydroquinone (HQ)-based polymer-gel electrolyte (HQ-gel) for micro-supercapacitors. The introduced HQ redox mediators (HQ-RMs) in the gel electrolyte composites underwent additional Faradaic redox reactions and synergistically increased the overall energy density of the micro-supercapacitors. Moreover, the HQ-RMs in the gel electrolyte weakened the self-discharging behavior by providing a strong binding attachment of charged ions on the porous graphitized carbon electrodes after the redox reactions. The micro-supercapacitors with HQ gel (HQ-MSCs) showed excellent energy storage performance, including a high energy volumetric capacitance of 255 mF cm-3 at a current of 1 µA, which is 2.7 times higher than the micro-supercapacitors based on bare-gel electrolyte composites without HQ-RMs (b-MSCs). The HQ-MSCs showed comparatively low self-discharging behavior with an open circuit potential drop of 37% compared to the b-MSCs with an open circuit potential drop of 60% after 2000 s. The assembled HQ-MSCs exhibited high mechanical flexibility over the applied external tensile and compressive strains. Additionally, the HQ-MSCs show the adequate circuit compatibility within series and parallel connections and the good cycling performance of capacitance retention of 95% after 3000 cycles.
Collapse
Affiliation(s)
- Sung Min Wi
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| | - Jihong Kim
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| | - Suok Lee
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| | - Yu-Rim Choi
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| | - Sung Hoon Kim
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| | - Jong Bae Park
- Jeonju Centre, Korea Basic Science Institute, Jeonju 54907, Korea;
| | - Younghyun Cho
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| | - Wook Ahn
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| | - A-Rang Jang
- Department of Electrical Engineering, Semyung University, Jecheon-si 27136, Korea;
| | - John Hong
- School of Materials Science and Engineering, Kookmin University, Seoul 02707, Korea
| | - Young-Woo Lee
- Department of Energy Systems Engineering, Soonchunhyang University, Asan-si 31538, Korea; (S.M.W.); (J.K.); (S.L.); (Y.-R.C.); (S.H.K.); (Y.C.); (W.A.)
| |
Collapse
|
7
|
Kim SH. Nanoporous Gold for Energy Applications. CHEM REC 2021; 21:1199-1215. [PMID: 33734584 DOI: 10.1002/tcr.202100015] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/20/2021] [Revised: 03/01/2021] [Accepted: 03/01/2021] [Indexed: 11/12/2022]
Abstract
Research activities using nanoporous gold (NPG) were reviewed in the field of energy applications in three categories: fuel cells, supercapacitors, and batteries. First, applications to fuel cells are reviewed with the subsections of proof-of-concept studies, studies on fuel oxidations at anode, and studies on oxygen reduction reactions at cathode. Second, applications to supercapacitors are reviewed from research activities on active materials/NPG composites to demonstrations of all-solid-state flexible supercapacitors using NPG electrodes. Third, research activities using NPG for battery applications are reviewed, mainly about fundamental studies on Li-air and Na-air batteries and some model studies on improving Li ion battery anodes. Although NPG based studies are the main subject of this review, some of meaningful studies using nanoporous metals are also discussed where relevant. Finally, summary and future outlook are given based on the survey on the research activities.
Collapse
Affiliation(s)
- Sang Hoon Kim
- Materials Architecturing Research Center, Korea Institute of Science and Technology, Seoul, 02792, Korea, Division of Nano & Information Technology at KIST School, University of Science and Technology, Daejeon, 34113, Korea
| |
Collapse
|
8
|
Lochmann S, Kintzel S, Bräuniger Y, Otto T, Zhang E, Grothe J, Kaskel S. Green Precursors and Soft Templating for Printing Porous Carbon-Based Micro-supercapacitors. Chemistry 2021; 27:1356-1363. [PMID: 32881100 PMCID: PMC7898350 DOI: 10.1002/chem.202003124] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/01/2020] [Revised: 08/31/2020] [Indexed: 11/07/2022]
Abstract
A combination of soft lithographic printing and soft templating has been used to fabricate high-resolution interdigitated micro-supercapacitors (MSC). Surfactant-assisted self-assembly produces high surface area ordered mesoporous carbons (490 m2 g-1 ). For the first time, such precursors have been printed by nano-imprint lithography as microdevices with a line width of only 250 nm and a spacing of only 1 μm. The devices are crack-free with low specific resistance (1.2×10-5 Ωm) and show good device capacitance up to 0.21 F cm-3 .
Collapse
Affiliation(s)
- Stefanie Lochmann
- Chemistry and Food ChemistryInorganic Chemistry IBergstraße 6601159DresdenGermany
| | - Susann Kintzel
- Chemistry and Food ChemistryInorganic Chemistry IBergstraße 6601159DresdenGermany
| | - Yannik Bräuniger
- Chemistry and Food ChemistryInorganic Chemistry IBergstraße 6601159DresdenGermany
| | - Thomas Otto
- Chemistry and Food ChemistryInorganic Chemistry IBergstraße 6601159DresdenGermany
| | - En Zhang
- Chemistry and Food ChemistryInorganic Chemistry IBergstraße 6601159DresdenGermany
| | - Julia Grothe
- Chemistry and Food ChemistryInorganic Chemistry IBergstraße 6601159DresdenGermany
| | - Stefan Kaskel
- Chemistry and Food ChemistryInorganic Chemistry IBergstraße 6601159DresdenGermany
| |
Collapse
|
9
|
Shaku B, Mofokeng TP, Mongwe TH, Coville NJ, Ozoemena KI, Maubane‐Nkadimeng MS. Physicochemical Properties of Nitrogen Doped Carbon Nano‐onions Grown by Flame Pyrolysis from Grapeseed Oil for Use in Supercapacitors. ELECTROANAL 2020. [DOI: 10.1002/elan.202060383] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Affiliation(s)
- Bokome Shaku
- DSI-NRF Centre of Excellence in Strong Materials School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
- Molecular Sciences Institute School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
| | - Thapelo P. Mofokeng
- DSI-NRF Centre of Excellence in Strong Materials School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
- Molecular Sciences Institute School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
| | - Thomas H. Mongwe
- DSI-NRF Centre of Excellence in Strong Materials School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
- Molecular Sciences Institute School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
| | - Neil J. Coville
- DSI-NRF Centre of Excellence in Strong Materials School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
- Molecular Sciences Institute School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
| | - Kenneth I. Ozoemena
- DSI-NRF Centre of Excellence in Strong Materials School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
- Molecular Sciences Institute School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
| | - Manoko S. Maubane‐Nkadimeng
- DSI-NRF Centre of Excellence in Strong Materials School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
- Molecular Sciences Institute School of Chemistry University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
- Microscopy and Microanalysis Unit University of the Witwatersrand Private Bag 3 Johannesburg 2050 South Africa
| |
Collapse
|
10
|
Yu W, Gao M, Li BQ, Liang J, Ding S. Interdigital electrodes of air@NiO porous nanoshells for high performance microsupercapacitors by thermally-assisted 3D printing. NANOTECHNOLOGY 2020; 31:375301. [PMID: 32492672 DOI: 10.1088/1361-6528/ab991d] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Microsupercapacitors of air@NiO porous nanoshells are manufactured by a novel thermally-assisted 3D printing process. It entails the use of printing inks of the moderate solid content of CNT-PS@Ni-precursor-nanoparticle mixture, a real-time heating substrate to print 3D interdigital electrodes, and subsequent thermal annealing to convert PS@Ni-precursor particles into air@NiO porous nanoshells. The microstructure of 3D printed electrodes is characterized by air@NiO porous nanoshells being well dispersed in the CNT network. The CNT network provides a fast electronic migration path and meanwhile ensures the mechanical integrity of electrodes to prevent the fracture and/or collapsing of electrode structures during 3D printing manufacturing and charging/discharging cycles. The air@NiO porous nanoshells, manufactured in our labs, consist of randomly oriented nanosheets and offer superb charge storage via redox reactions. The metal layer is sputtered indiscriminately on the surface of interdigital electrodes and substrate before it is peeled off with electrolyte film and electrodes. The proposed tactic resolves problems connected with the tedious courses of traditional lithography and the delamination at the interface of active materials and collectors from mechanical stress. Experiments were conducted to study the performance of the microsupercapacitors (i.e. areal capacitances, energy and power densities) as a function of printing parameters, such as electrode heights, embedded amount of air@NiO porous nanoshells and the thickness of the metal layer on the electrochemical characteristics. The thickness of as-printed electrodes reaches up to 117 μm, which is vital in ensuring high energy density and is beyond the reach of any other technology. Moreover, the 3D printedmicrosupercapacitors of air@NiO porous nanoshells show excellent cycle stability and deliver an excellent areal capacitance of 56.7 mF cm-2, about a magnitude or two higher than that of C-based counterparts.
Collapse
Affiliation(s)
- Wei Yu
- Xi'an Key Laboratory of Sustainable Energy Materials Chemistry, Department of Applied Chemistry, School of Science, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China. Micro/Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China
| | | | | | | | | |
Collapse
|
11
|
Vyas A, Wang K, Anderson A, Velasco A, Van den Eeckhoudt R, Haque MM, Li Q, Smith A, Lundgren P, Enoksson P. Enhanced Electrode Deposition for On-Chip Integrated Micro-Supercapacitors by Controlled Surface Roughening. ACS OMEGA 2020; 5:5219-5228. [PMID: 32201810 PMCID: PMC7081403 DOI: 10.1021/acsomega.9b04266] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/12/2019] [Accepted: 02/26/2020] [Indexed: 06/10/2023]
Abstract
On-chip micro-supercapacitors (MSCs), integrated with energy harvesters, hold substantial promise for developing self-powered wireless sensor systems. However, MSCs have conventionally been manufactured through techniques incompatible with semiconductor fabrication technology, the most significant bottleneck being the electrode deposition technique. Utilization of spin-coating for electrode deposition has shown potential to deliver several complementary metal-oxide-semiconductor (CMOS)-compatible MSCs on a silicon substrate. Yet, their limited electrochemical performance and yield over the substrate have remained challenges obstructing their subsequent integration. We report a facile surface roughening technique for improving the wafer yield and the electrochemical performance of CMOS-compatible MSCs, specifically for reduced graphene oxide as an electrode material. A 4 nm iron layer is deposited and annealed on the wafer substrate to increase the roughness of the surface. In comparison to standard nonroughened MSCs, the increase in surface roughness leads to a 78% increased electrode thickness, 21% improvement in mass retention, 57% improvement in the uniformity of the spin-coated electrodes, and a high yield of 87% working devices on a 2″ silicon substrate. Furthermore, these improvements directly translate to higher capacitive performance with enhanced rate capability, energy, and power density. This technique brings us one step closer to fully integrable CMOS-compatible MSCs in self-powered systems for on-chip wireless sensor electronics.
Collapse
Affiliation(s)
- Agin Vyas
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
| | - Kejian Wang
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
| | - Alec Anderson
- University
of California Santa Barbara, Santa Barbara, 93106 California, United States
| | - Andres Velasco
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
- Katholieke
Universiteit, 3000 Leuven, Belgium
| | - Ruben Van den Eeckhoudt
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
- Katholieke
Universiteit, 3000 Leuven, Belgium
| | - Mohammad Mazharul Haque
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
| | - Qi Li
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
| | - Anderson Smith
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
| | - Per Lundgren
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
| | - Peter Enoksson
- Department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41296 Gothenburg, Sweden
| |
Collapse
|
12
|
Synthesis of organic phase change materials (PCM) for energy storage applications: A review. ACTA ACUST UNITED AC 2019. [DOI: 10.1016/j.nanoso.2019.100399] [Citation(s) in RCA: 85] [Impact Index Per Article: 14.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/28/2022]
|