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Yunas J, Mulyanti B, Hamidah I, Mohd Said M, Pawinanto RE, Wan Ali WAF, Subandi A, Hamzah AA, Latif R, Yeop Majlis B. Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review. Polymers (Basel) 2020; 12:E1184. [PMID: 32455993 PMCID: PMC7284590 DOI: 10.3390/polym12051184] [Citation(s) in RCA: 26] [Impact Index Per Article: 5.2] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/30/2020] [Revised: 04/27/2020] [Accepted: 04/28/2020] [Indexed: 12/22/2022] Open
Abstract
In this study, we present a comprehensive review of polymer-based microelectromechanical systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical engineering field. The purpose of this review is to provide a comprehensive summary on the latest development of electromagnetically driven microactuators for biomedical application that is focused on the movable structure development made of polymers. The discussion does not only focus on the polymeric material part itself, but also covers the basic mechanism of the mechanical actuation, the state of the art of the membrane development and its application. In this review, a clear description about the scheme used to drive the micro-actuators, the concept of mechanical deformation of the movable magnetic membrane and its interaction with actuator system are described in detail. Some comparisons are made to scrutinize the advantages and disadvantages of electromagnetic MEMS actuator performance. The previous studies and explanations on the technology used to fabricate the polymer-based membrane component of the electromagnetically driven microactuators system are presented. The study on the materials and the synthesis method implemented during the fabrication process for the development of the actuators are also briefly described in this review. Furthermore, potential applications of polymer-based MEMS EM actuators in the biomedical field are also described. It is concluded that much progress has been made in the material development of the actuator. The technology trend has moved from the use of bulk magnetic material to using magnetic polymer composites. The future benefits of these compact flexible material employments will offer a wide range of potential implementation of polymer composites in wearable and portable biomedical device applications.
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Affiliation(s)
- Jumril Yunas
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Budi Mulyanti
- Faculty of Engineering and Vocational Education, Universitas Pendidikan Indonesia, Jl. Dr. Setiabudhi 207, Bandung 40154, Indonesia; (B.M.); (I.H.)
| | - Ida Hamidah
- Faculty of Engineering and Vocational Education, Universitas Pendidikan Indonesia, Jl. Dr. Setiabudhi 207, Bandung 40154, Indonesia; (B.M.); (I.H.)
| | - Muzalifah Mohd Said
- Faculty of Electronics and Computer Engineering (FKEKK), Universiti Teknikal Malaysia Melaka (UTeM), Hang Tuah Jaya, Durian Tunggal 76100, Melaka, Malaysia;
| | - Roer Eka Pawinanto
- Malaysia-Japan International Institute of Technology (MJIIT), Universiti Teknologi Malaysia (UTM), Kuala Lumpur 54100, Malaysia;
| | - Wan Amar Fikri Wan Ali
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Ayub Subandi
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Rhonira Latif
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
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