Influence of the atomic force microscope tip on the multifractal analysis of rough surfaces

Synthetic Data in Quantitative Scanning Probe Microscopy

Synthetic data are of increasing importance in nanometrology. They can be used for development of data processing methods, analysis of uncertainties and estimation of various measurement artefacts. In this paper we review methods used for their generation and the applications of synthetic data in scanning probe microscopy, focusing on their principles, performance, and applicability. We illustrate the benefits of using synthetic data on different tasks related to development of better scanning approaches and related to estimation of reliability of data processing methods. We demonstrate how the synthetic data can be used to analyse systematic errors that are common to scanning probe microscopy methods, either related to the measurement principle or to the typical data processing paths.

Investigation on blind tip reconstruction errors caused by sample features

Precision measurements of a nanoscale sample surface using an atomic force microscope (AFM) require a precise quantitative knowledge of the 3D tip shape. Blind tip reconstruction (BTR), established by Villarrubia, gives an outer bound with larger errors if the tip characterizer is not appropriate. In order to explore the errors of BTR, a series of simulation experiments based on a conical model were carried out. The results show that, to reconstruct the tip precisely, the cone angle of the tip characterizer must be smaller than that of the tip. Furthermore, the errors decrease as a function of the tip cone angle and increase linearly with the sample radius of curvature, irrespective of the tip radius of curvature. In particular, for sharp (20 nm radius) and blunt (80 nm radius) tips, the radius of curvature of the tip characterizer must be smaller than 5 nm. Based on these simulation results, a local error model of BTR was established. The maximum deviation between the errors derived from the model and the simulated experiments is 1.22 nm. Compared with the lateral resolution used in the above simulated experiments (4 nm/pixel), it is valid to ignore the deviations and consider the local error model of BTR is indeed in quantitative agreement with the simulation results. Finally, two simulated ideal structures are proposed here, together with their corresponding real samples. The simulation results show they are suitable for BTR.

Characterization of healthy and fluorotic enamel by atomic force microscopy

The aim was to characterize the external structure, roughness, and absolute depth profile (ADP) of fluorotic enamel compared with healthy enamel. Eighty extracted human molars were classified into four groups [TFI: 0, control (C); 1-3, mild (MI); 4-5, moderate (MO); 6-9, severe fluorosis (S)] according to the Thylstrup-Fejerskov Index (TFI). All samples were analyzed by atomic force microscopy.The mean values of enamel surface roughness (ESR) in nm were: Group C, 92.6; Group MI, 188.8; Group MO, 246.9; and Group S, 532.2. The mean values of absolute depth profile in nm were: C, 1,065.7; MI, 2,360.7; MO, 2,536.7; and S, 6,146.2. The differences between mean ESR and mean ADP among groups were statistically significant (p < 0.05). This structural study confirms at the nanometer level that there is a positive association between fluorosis severity, ESR, and ADP, and there is an association with the clinical findings of fluorosis measured by TFI as well.