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Zhang X, Chen S, Wang S, Huang Y, Jin C, Lin F. Exit wave reconstruction of a focal series of images with structural changes in high-resolution transmission electron microscopy. J Microsc 2024. [PMID: 38819026 DOI: 10.1111/jmi.13335] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/02/2024] [Revised: 05/18/2024] [Accepted: 05/23/2024] [Indexed: 06/01/2024]
Abstract
High-resolution transmission electron microscopy (HRTEM) images can capture the atomic-resolution details of the dynamically changing structure of nanomaterials. Here, we propose a new scheme and an improved reconstruction algorithm to reconstruct the exit wave function for each image in a focal series of HRTEM images to reveal structural changes. In this scheme, the wave reconstructed from the focal series of images is treated as the initial wave in the reconstruction process for each HRTEM image. Additionally, to suppress noise at the frequencies where the signal is weak due to the modulation of the lens transfer function, a weight factor is introduced in the improved reconstruction algorithm. The advantages of the new scheme and algorithms are validated by using the HRTEM images of a natural specimen and a single-layer molybdenum disulphide. This algorithm enables image resolution enhancement and lens aberration removal, while potentially allowing the visualisation of the structural evolution of nanostructures.
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Affiliation(s)
- Xiaohan Zhang
- Department of Applied Physics, College of Electronic Engineering, South China Agricultural University, Guangzhou, Guangdong, China
- Jihua Laboratory, Foshan, Guangdong, China
| | - Shaowen Chen
- Department of Research & Development, Zhuhai Multiplier Information Technology Co., Ltd, Zhuhai, Guangdong, China
| | - Shuya Wang
- Department of Applied Physics, College of Electronic Engineering, South China Agricultural University, Guangzhou, Guangdong, China
| | - Ying Huang
- Department of Applied Physics, College of Electronic Engineering, South China Agricultural University, Guangzhou, Guangdong, China
| | - Chuanhong Jin
- State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, China
| | - Fang Lin
- Department of Applied Physics, College of Electronic Engineering, South China Agricultural University, Guangzhou, Guangdong, China
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2
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Meng Z, Ming W, He Y, Shen R, Chen J. Exit wave function reconstruction from two defocus images using neural network. Micron 2024; 177:103564. [PMID: 37977014 DOI: 10.1016/j.micron.2023.103564] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/26/2023] [Revised: 11/06/2023] [Accepted: 11/07/2023] [Indexed: 11/19/2023]
Abstract
Wave function reconstruction from one or two defocus images is promising for live atomic resolution imaging in transmission electron microscopy. However, a robust and accurate reconstruction method we still need more attention. Here, we present a neural-network-based wave function reconstruction method, EWR-NN, that enables accurate wave function reconstruction from only two defocus images. Results from both simulated and two different experimental defocus series show that the EWR-NN method has better performance than the widely-used iterative wave function reconstruction (IWFR) method. Influence of image number, defocus deviation, residual image shifts and noise level were considered to validate the performance of EWR-NN under practical conditions. It is seen that these factors will not influence the arrangement of atom columns in the reconstructed phase images, while they can alter the absolute values of all-atom columns and degrade the contrast of the phase images.
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Affiliation(s)
- Ziyi Meng
- College of Materials Science and Engineering, Centre for High Resolution Electron Microscopy, Hunan University, Changsha 410082, Hunan Province, China
| | - Wenquan Ming
- Pico Electron Microscopy Center, Innovation Institute for Ocean Materials Characterization Technology, Center for Advanced Studies in Precision Instruments, Hainan University, Haikou 570228, Hainan Province, China; Key Laboratory of Pico Electron Microscopy of Hainan Province, Hainan University, Haikou 570228, Hainan Province, China; School of Materials Science and Engineering, Hainan University, Haikou 570228, Hainan Province, China.
| | - Yutao He
- Pico Electron Microscopy Center, Innovation Institute for Ocean Materials Characterization Technology, Center for Advanced Studies in Precision Instruments, Hainan University, Haikou 570228, Hainan Province, China; Key Laboratory of Pico Electron Microscopy of Hainan Province, Hainan University, Haikou 570228, Hainan Province, China; School of Physics and Optoelectronic Engineering, Hainan University, Haikou 570228, Hainan Province, China.
| | - Ruohan Shen
- School of Intelligent Manufacturing, Huzhou College, Huzhou 313000, China
| | - Jianghua Chen
- College of Materials Science and Engineering, Centre for High Resolution Electron Microscopy, Hunan University, Changsha 410082, Hunan Province, China; Pico Electron Microscopy Center, Innovation Institute for Ocean Materials Characterization Technology, Center for Advanced Studies in Precision Instruments, Hainan University, Haikou 570228, Hainan Province, China; Key Laboratory of Pico Electron Microscopy of Hainan Province, Hainan University, Haikou 570228, Hainan Province, China; School of Materials Science and Engineering, Hainan University, Haikou 570228, Hainan Province, China
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3
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Perspective: Emerging strategies for determining atomic-resolution structures of macromolecular complexes within cells. J Struct Biol 2021; 214:107827. [PMID: 34915129 PMCID: PMC8978977 DOI: 10.1016/j.jsb.2021.107827] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/07/2021] [Revised: 12/05/2021] [Accepted: 12/08/2021] [Indexed: 11/28/2022]
Abstract
In principle, electron cryo-tomography (cryo-ET) of thin portions of cells provides high-resolution images of the three-dimensional spatial arrangement of all members of the proteome. In practice, however, radiation damage creates a tension between recording images at many different tilt angles, but at correspondingly reduced exposure levels, versus limiting the number of tilt angles in order to improve the signal-to-noise ratio (SNR). Either way, it is challenging to read the available information out at the level of atomic structure. Here, we first review work that explores the optimal strategy for data collection, which currently seems to favor the use of a limited angular range for tilting the sample or even the use of a single image to record the high-resolution information. Looking then to the future, we point to the alternative of so-called “deconvolution microscopy”, which may be applied to tilt-series or optically-sectioned, focal series data. Recording data as a focal series has the advantage that little or no translational alignment of frames might be needed, and a three-dimensional reconstruction might require only 2/3 the number of images as does standard tomography. We also point to the unexploited potential of phase plates to increase the contrast, and thus to reduce the electron exposure levels while retaining the ability align and merge the data. In turn, using much lower exposures per image could have the advantage that high-resolution information is retained throughout the full data-set, whether recorded as a tilt series or a focal series of images.
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Lin F, Ren X, Zhou W, Zhang L, Xiao Y, Zhang Q, Xu H, Li H, Jin C. Exit-wave phase retrieval from a single high-resolution transmission electron microscopy image of a weak-phase object. Micron 2018; 114:23-31. [DOI: 10.1016/j.micron.2018.07.001] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/01/2018] [Revised: 07/03/2018] [Accepted: 07/03/2018] [Indexed: 11/24/2022]
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5
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Wen C, Ma YJ. Determination of atomic-scale chemical composition at semiconductor heteroepitaxial interfaces by high-resolution transmission electron microscopy. Micron 2018; 106:48-58. [PMID: 29331739 DOI: 10.1016/j.micron.2018.01.003] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/13/2017] [Revised: 01/02/2018] [Accepted: 01/06/2018] [Indexed: 11/15/2022]
Abstract
The determination of atomic structures and further quantitative information such as chemical compositions at atomic scale for semiconductor defects or heteroepitaxial interfaces can provide direct evidence to understand their formation, modification, and/or effects on the properties of semiconductor films. The commonly used method, high-resolution transmission electron microscopy (HRTEM), suffers from difficulty in acquiring images that correctly show the crystal structure at atomic resolution, because of the limitation in microscope resolution or deviation from the Scherzer-defocus conditions. In this study, an image processing method, image deconvolution, was used to achieve atomic-resolution (∼1.0 Å) structure images of small lattice-mismatch (∼1.0%) AlN/6H-SiC (0001) and large lattice-mismatch (∼8.5%) AlSb/GaAs (001) heteroepitaxial interfaces using simulated HRTEM images of a conventional 300-kV field-emission-gun transmission electron microscope under non-Scherzer-defocus conditions. Then, atomic-scale chemical compositions at the interface were determined for the atomic intermixing and Lomer dislocation with an atomic step by analyzing the deconvoluted image contrast. Furthermore, the effect of dynamical scattering on contrast analysis was also evaluated for differently weighted atomic columns in the compositions.
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Affiliation(s)
- C Wen
- School of Science, Southwest University of Science and Technology, Mianyang, 621010, China.
| | - Y J Ma
- Analytical and Testing Center, Southwest University of Science and Technology, Mianyang, 621010, China
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Wen C. The Relationship Between Atomic Structure and Strain Distribution of Misfit Dislocation Cores at Cubic Heteroepitaxial Interfaces. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2017; 23:449-459. [PMID: 28274292 DOI: 10.1017/s1431927617000137] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
The atomic reconstruction of a misfit dislocation (MD) core causes change in the strain distribution around the core. Several MD cores at the AlSb/GaAs (001) cubic zincblende interface, including a symmetrical glide set Lomer dislocation (LD), a left-displaced glide set LD, a glide set LD with an atomic step, a symmetrical shuffle set LD, and a 60° dislocation pair, were studied using simulated projected potential and aberration-corrected transmission electron microscope images. Image deconvolution was also used to restore structure images from nonoptimum-defocus images. The corresponding biaxial strain maps, ε xx (in-plane) and ε yy (out-of-plane), were obtained by geometric phase analysis using the GaAs substrate as the reference lattice. The results show that atomic structure characteristics of MD cores can be revealed by the strain maps. The strain maps should be measured from optimum-defocus images or restored structure images. Furthermore, the ε xx strain map has been found more accurate than the ε yy strain map for MD cores, and the specimen thickness should be below the critical thickness due to the influence of dynamical scattering.
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Affiliation(s)
- Cai Wen
- 1School of Science,Southwest University of Science and Technology,Mianyang 621010,China
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Ge B, Wang Y, Luo H, Wen H, Yu R, Cheng Z, Zhu J. Determination of the incommensurate modulated structure of Bi(2)Sr(1.6)La(0.4)CuO(6+δ) by aberration-corrected transmission electron microscopy. Ultramicroscopy 2015; 159 Pt 1:67-72. [PMID: 26327691 DOI: 10.1016/j.ultramic.2015.08.004] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/18/2015] [Revised: 08/03/2015] [Accepted: 08/23/2015] [Indexed: 10/23/2022]
Abstract
The incommensurate modulated structure (IMS) of Bi2Sr1.6La0.4CuO6+δ (BSLCO) has been studied by aberration-corrected transmission electron microscopy in combination with a high-dimensional (HD) space description. Two images are deconvoluted in the negative Cs imaging (NCSI) and positive Cs imaging (PCSI) modes. Similar results for the IMS have been obtained from two corresponding projected potential maps (PPMs), and the size of the dots representing atoms in the NCSI PPM is found to be smaller than that in the PCSI PPM. Considering that the object size is one of the factors that influence the precision of the structural determination, modulation functions for all unoverlapped atoms in BSLCO were determined on the basis of the NCSI PPM in combination with the HD space description.
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Affiliation(s)
- Binghui Ge
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
| | - Yumei Wang
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
| | - Huiqian Luo
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
| | - Haihu Wen
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
| | - Rong Yu
- Beijing National Center for Electron Microscopy, Tsinghua University, Beijing 100084, China
| | - Zhiying Cheng
- Beijing National Center for Electron Microscopy, Tsinghua University, Beijing 100084, China
| | - Jing Zhu
- Beijing National Center for Electron Microscopy, Tsinghua University, Beijing 100084, China
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Wen C, Wan W, Li FH, Tang D. Restoring defect structures in 3C-SiC/Si (001) from spherical aberration-corrected high-resolution transmission electron microscope images by means of deconvolution processing. Micron 2015; 71:22-31. [PMID: 25637810 DOI: 10.1016/j.micron.2014.12.008] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/12/2014] [Revised: 12/28/2014] [Accepted: 12/28/2014] [Indexed: 10/24/2022]
Abstract
The [110] cross-sectional samples of 3C-SiC/Si (001) were observed with a spherical aberration-corrected 300 kV high-resolution transmission electron microscope. Two images taken not close to the Scherzer focus condition and not representing the projected structures intuitively were utilized for performing the deconvolution. The principle and procedure of image deconvolution and atomic sort recognition are summarized. The defect structure restoration together with the recognition of Si and C atoms from the experimental images has been illustrated. The structure maps of an intrinsic stacking fault in the area of SiC, and of Lomer and 60° shuffle dislocations at the interface have been obtained at atomic level.
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Affiliation(s)
- C Wen
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China; School of Science, Southwest University of Science and Technology, Mianyang 621010, China
| | - W Wan
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
| | - F H Li
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
| | - D Tang
- FEI Company, Achtseweg Noord 5, 5651 GG Eindhoven, The Netherlands
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Wang Y, Ge B, Che G. Atomic resolution imaging of oxygen atoms close to heavy atoms by HRTEM and ED, using the superconductor SmFeAsO0.85F0.15 as an example. Micron 2015; 71:32-8. [PMID: 25635603 DOI: 10.1016/j.micron.2015.01.001] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/03/2014] [Revised: 01/06/2015] [Accepted: 01/06/2015] [Indexed: 11/17/2022]
Abstract
Imaging of light atoms has always been a challenge in high-resolution electron microscopy. Image resolution is mainly limited by lens aberrations, especially the spherical aberration of the objective lens. Image deconvolution could correct for the image distortion by lens aberrations and restore the structure projection, the resolution of which is limited by the information limit of the microscope. Electron diffraction unrestricted by lens aberrations could overcome this resolution limit. Here we show a combination of electron diffraction and image deconvolution to reveal simultaneously the atomic columns of O and considerably heavier Sm at a very close distance (1.17 Å) in iron-based superconductor SmFeAsO0.85F0.15 using a conventional 200 kV electron microscope. The approach used here, starting from an image and an electron diffraction pattern, has an advantage for those radiation-sensitive samples. Besides, it can be applied to simultaneously imaging light and heavy atoms, even though they have a big difference in atomic number and a much smaller atomic distance than the microscope resolution.
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Affiliation(s)
- Yumei Wang
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
| | - Binghui Ge
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
| | - Guangcan Che
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
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Lin F, Jin C. An improved Wiener deconvolution filter for high-resolution electron microscopy images. Micron 2013; 50:1-6. [DOI: 10.1016/j.micron.2013.03.005] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/27/2013] [Revised: 03/17/2013] [Accepted: 03/17/2013] [Indexed: 10/27/2022]
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11
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Wan W, Hovmöller S, Zou X. Structure projection reconstruction from through-focus series of high-resolution transmission electron microscopy images. Ultramicroscopy 2012; 115:50-60. [DOI: 10.1016/j.ultramic.2012.01.013] [Citation(s) in RCA: 34] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/04/2011] [Revised: 12/07/2011] [Accepted: 01/20/2012] [Indexed: 11/24/2022]
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12
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Texier M, Thibault-Pénisson J. Optimum correction conditions for aberration-corrected HRTEM SiC dumbbells chemical imaging. Micron 2012. [DOI: 10.1016/j.micron.2011.09.014] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/17/2022]
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Lin F, Liu Y, Zhong X, Chen J. An improved image alignment procedure for high-resolution transmission electron microscopy. Micron 2010; 41:367-72. [DOI: 10.1016/j.micron.2010.01.001] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/18/2009] [Revised: 01/10/2010] [Accepted: 01/10/2010] [Indexed: 10/19/2022]
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Urban KW. Is science prepared for atomic-resolution electron microscopy? NATURE MATERIALS 2009; 8:260-262. [PMID: 19308084 DOI: 10.1038/nmat2407] [Citation(s) in RCA: 31] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
The efforts of microscopists have given aberration-corrected transmission electron microscopy the power to reveal atomic structures with unprecedented precision. It is now up to materials scientists to use this power for extracting physical properties from microscopic atomic arrangements.
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Affiliation(s)
- Knut W Urban
- Institute of Solid State Research, Research Centre Jülich, D-52425 Jülich, Germany.
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15
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Urban KW. Studying Atomic Structures by Aberration-Corrected Transmission Electron Microscopy. Science 2008; 321:506-10. [DOI: 10.1126/science.1152800] [Citation(s) in RCA: 269] [Impact Index Per Article: 16.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/02/2022]
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Yamasaki J, Kawai T, Kondo Y, Tanaka N. A practical solution for eliminating artificial image contrast in aberration-corrected TEM. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2008; 14:27-35. [PMID: 18173866 DOI: 10.1017/s1431927608080173] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/17/2007] [Accepted: 08/07/2007] [Indexed: 05/25/2023]
Abstract
We propose a simple and practical solution to remove artificial contrast inhibiting direct interpretation of atomic arrangements in aberration-corrected TEM. The method is based on a combination of "image subtraction" for elimination of nonlinear components in images and newly improved "image deconvolution" for proper compensation of nonflat phase contrast transfer function. The efficiency of the method is shown by experimental and simulation data of typical materials such as gold, silicon, and magnesium oxide. The hypothetical results from further improvements of TEM instruments are also simulated. It is concluded that we can approach actual atomic structures by using the present method, that is, a proper combination of a Cs corrector, image subtraction, and image deconvolution processes.
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Affiliation(s)
- Jun Yamasaki
- EcoTopia Science Institute, Nagoya University, Nagoya 464-8603, Japan.
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