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Zeng M, Wang W, Yin Y, Zheng C. A simple coordinate transformation method for quickly locating the features of interest in TEM samples. Microscopy (Oxf) 2024:dfae009. [PMID: 38421047 DOI: 10.1093/jmicro/dfae009] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/09/2023] [Revised: 01/16/2024] [Accepted: 02/07/2024] [Indexed: 03/02/2024] Open
Abstract
We developed a simple coordinate transformation method for quickly locating features of interest (FOIs) of samples in transmission electron microscope (TEM). The method is well suited for conducting sample searches in aberration-corrected scanning/transmission electron microscopes (S/TEM), where the survey can be very time-consuming because of the limited field of view imposed by the highly excited objective lens after fine-tuning the aberration correctors. For implementation, a digital image of the sample and the TEM holder was captured using a simple stereo-optical microscope. Naturally presented geometric patterns on the holder were referenced to construct a projective transformation between the electron and optical coordinate systems. The test results demonstrated that the method was accurate and required no electron microscope or specimen holder modifications. Additionally, it eliminated the need to mount the sample onto specific patterned TEM grids or deposit markers, resulting in universal applications for most TEM samples, holders and electron microscopes for fast FOI identification. Furthermore, we implemented the method into a Gatan script for graphical-user-interface-based step-by-step instructions. Through online communication, the script enabled real-time navigation and tracking of the motion of samples in TEM on enlarged optical images with a panoramic view.
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Affiliation(s)
- Mingzhi Zeng
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Songhu Rd 2005, Yangpu District, Shanghai 200438, China
| | - Wenzhao Wang
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Songhu Rd 2005, Yangpu District, Shanghai 200438, China
| | - Yang Yin
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Songhu Rd 2005, Yangpu District, Shanghai 200438, China
| | - Changlin Zheng
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Songhu Rd 2005, Yangpu District, Shanghai 200438, China
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Berlin J, Stegmüller T, Haider F. Observation of in-plane oriented Guinier-Preston zones in Al-Cu. Micron 2023; 173:103504. [PMID: 37517275 DOI: 10.1016/j.micron.2023.103504] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/03/2023] [Revised: 06/22/2023] [Accepted: 06/26/2023] [Indexed: 08/01/2023]
Abstract
Known for a long time, the first metastable precipitate which forms in Al-Cu alloys during natural ageing are the so-called Guinier-Preston zones (GPZ), platelets of Cu on {100} planes of only one atomic layer thickness. Only with the development of aberration corrected transmission electron microscopes (TEM), direct observation and imaging of these platelets was possible, but with the restriction, that only edge view was possible. Here we show that under appropriate conditions an observation in a plan-view is possible and allows further insight into the shape and arrangement of the GP-zones. Furthermore, this demonstrates that single atom detection of one Cu atom in a column of Al atoms is possible.
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Affiliation(s)
- Johannes Berlin
- Institut für Physik, Universität Augsburg, Universitätsstraße 1, 86159 Augsburg, Germany.
| | - Tobias Stegmüller
- Institut für Physik, Universität Augsburg, Universitätsstraße 1, 86159 Augsburg, Germany
| | - Ferdinand Haider
- Institut für Physik, Universität Augsburg, Universitätsstraße 1, 86159 Augsburg, Germany
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Sagawa R, Yasuhara A, Hashiguchi H, Naganuma T, Tanba S, Ishikawa T, Riedel T, Hartel P, Linck M, Uhlemann S, Müller H, Sawada H. Exploiting the full potential of the advanced two-hexapole corrector for STEM exemplified at 60kV. Ultramicroscopy 2022; 233:113440. [PMID: 34920279 DOI: 10.1016/j.ultramic.2021.113440] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/30/2021] [Revised: 11/14/2021] [Accepted: 11/27/2021] [Indexed: 11/19/2022]
Abstract
Ultimate resolution in scanning transmission electron microscopy (STEM) with state-of-the-art aberration correctors requires careful tuning of the experimental parameters. The optimum aperture semi-angle depends on the chosen high tension, the chromatic aberration and the energy width of the source as well as on potentially limiting intrinsic residual aberrations. In this paper we derive simple expressions and criteria for choosing the aperture semi-angle and for counterbalancing the intrinsic sixth-order three-lobe aberration of two-hexapole aberration correctors by means of the fourth-order three-lobe aberration. It is noteworthy that for such an optimally adjusted electron probe the so-called flat area of the Ronchigram is explicitly not maximized. The above considerations are validated by experiments with a CEOS ASCOR in a C-FEG-equipped JEOL NEOARM operated at 60 kV. Sub-Angstrom resolution is demonstrated for a Si[112] single crystal as well as for a single-layered MoS2 crystalline film. Lattice reflections of 73 pm for silicon and 93 pm for molybdenum disulfide are visible in the Fourier transform of the images, respectively. Moreover, single sulfur vacancies can be clearly identified in the MoS2.
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Affiliation(s)
- Ryusuke Sagawa
- JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
| | - Akira Yasuhara
- JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
| | | | | | - Shinichi Tanba
- JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
| | | | - Thomas Riedel
- Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg 69126, Germany
| | - Peter Hartel
- Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg 69126, Germany
| | - Martin Linck
- Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg 69126, Germany
| | - Stephan Uhlemann
- Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg 69126, Germany
| | - Heiko Müller
- Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg 69126, Germany
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