Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators

Lateral Field Excitation of Thickness Longitudinal Mode and Shear Mode With ZnO Based on Solidly Mounted Resonator

Coplanar electrodes are used with the c-axis-oriented piezoelectric film to form the pure longitudinal mode and the pure shear mode solidly mounted resonators (SMRs). Aluminum and molybdenum are used as electrode materials to achieve different excitation pure shear mode and pure longitudinal mode. There is no need to make a bottom electrode or etch the piezoelectric layer, which simplifies the manufacturing and makes the structure stable. Furthermore, the cycle time of the process is significantly reduced. However, the control of the thickness of the Bragg reflectors, roughness control, and electrode photolithography are all challenging aspects of SMR manufacturing. In this study, ZnO piezoelectric film, which has a good electromechanical coupling factor and low transmission loss, was used as the c-axis-oriented piezoelectric film. An RF magnetron sputtering system was used to sputter a seed layer to encourage the growth of the zinc-oxide piezoelectric film and improve the c-axis orientation. The pure longitudinal mode and pure shear mode resonance signals were excited using the room temperature positive axis method. The quality factor and electromechanical coupling coefficient of the pure shear mode were 398% and 4.43%, respectively. The quality factor and electromechanical coupling coefficient of the pure longitudinal mode were 171% and 3.83%, respectively. Stability and feature recognition were accomplished in the pure longitudinal mode and the pure shear mode via a simplified and accelerated manufacturing process using electrodes with the same specifications.

Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes

Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The optimum substrate temperature to obtain homogeneously inclined c-axis grains in ZnO films is achieved by depositing Al at 100 °C with a surface roughness ~9.2 nm, which caused an inclination angle of ~25° of the ZnO c-axis with respect to the surface normal. Shear mode devices with quality-factors at resonance, Q_r and effective electromechanical coupling factors, \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${{\boldsymbol{k}}}_{{\bf{eff}}}^{{\bf{2}}}$$\end{document}keff2, as high as 180 and 3.4% are respectively measured. Mass sensitivities, S_m of (4.9 ± 0.1) kHz · cm²/ng and temperature coefficient of frequency (TCF) of ~−67 ppm/K are obtained using this shear mode. The performance of the devices as viscosity sensors and biosensors is demonstrated by determining the frequency shifts of water-ethanol mixtures and detection of Rabbit immunoglobin G (IgG) whole molecule (H&L) respectively.