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Muraoka T, Yamada T, Motoyoshi K, Ueno K. Synthesis of phosphinogallyliron complexes and their photochemical conversion to a naked gallium-bridged diiron complex. J Organomet Chem 2021. [DOI: 10.1016/j.jorganchem.2020.121625] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
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Jones RA, Cowley AH, Benac BL, Kidd KB, Ekerdt JG, Miller JE. Organometallic Chemical Vapor Deposition of Gaas Using Novel Organometallic Precursors. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-131-51] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
Abstract
ABSTRACTThe goals of the research are the design and synthesis of a new class of precursor compounds for III/V compound semiconductor materials, growth of films with these precursors and developoment of an understanding of the relationships between precursor structure, film growth reactions and film properties. Conventional OMCVD of III/V compound materials has a number of inherent safety and processing problems associated with the group III alkyl and group V hydride sources. Our approach to these problems is the synthesis of a single precursor with a fixed III:V stoichiometry and a direct two center, two electron sigma III V bond., These, compounds have the general formula,[R2M(R 2 E)] 2 and R2M(R 2 E) 2M R2 (MM = Al, Ga, In; E=P, As; R, R = alkyl, aryl). The III V bond in these compounds is stronger than the other bonds and the minium deposition temperature can be controlled by employing subsituents that undergo facile hydrocarbon elimination.A typical example is the use of [Me 2Ga(µ t Bu 2 As)] 2 as the single source for GaAs films. The organometallic precursor is a solid crystalline powder which is maintained at 130°C to generate enough vapor for OMCVD. Typical film growth conditions involve the use of H2 or He as the carrier gas, substrate temperatures of 500 to 700°C, and a total system pressure of 0.0002 Torr. GaAs(100), Si(100) (As doped 30 off toward (011) and quartz have been used as substrates. Film composition has been established with XPS. The Ga 3d, As 3d, and C ls signals at 18.8, 40.9, and 284.6 eV, respectively, reveal the films to be 1:1 Ga:As and void of carbon. The carbon levels are less than 1000 ppm. X ray diffraction and SEM results suggest polycrystalline GaAs on quartz and epitaxial GaAs on GaAs(100) and Si(100). (2 K) photoluminescence measurements on GaAs, grown on semi insulating GaAs(100) and Si doped GaAs(0 100) at 570 C. produce PL signals indicating that crystalline domains are present, the measurements indicate degeneratively n doped material and show that good Ga:As ratios and low levels (ca. 1 ppm) of impurities are present. Growth rates:∼ 1.0 mm/hour.
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Malik MA, Afzaal M, O’Brien P. Precursor Chemistry for Main Group Elements in Semiconducting Materials. Chem Rev 2010; 110:4417-46. [DOI: 10.1021/cr900406f] [Citation(s) in RCA: 289] [Impact Index Per Article: 20.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Mohammad Azad Malik
- School of Chemistry and Manchester Materials Science Centre, The University of Manchester, Oxford Road, Manchester, M13 9PL, United Kingdom
| | - Mohammad Afzaal
- School of Chemistry and Manchester Materials Science Centre, The University of Manchester, Oxford Road, Manchester, M13 9PL, United Kingdom
| | - Paul O’Brien
- School of Chemistry and Manchester Materials Science Centre, The University of Manchester, Oxford Road, Manchester, M13 9PL, United Kingdom
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Malik MA, O'Brien P, Helliwell M. A new synthesis of InAs quantum dots from [tBu2AsInEt2]2. ACTA ACUST UNITED AC 2005. [DOI: 10.1039/b416944a] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Beachley, OT, Chao SHL, Churchill MR, Lake CH. Reactions of Neopentylindium(III) Derivatives with Isopropylphosphorus Compounds. Organometallics 2001. [DOI: 10.1021/om0101902] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- O. T. Beachley,
- Department of Chemistry, University at Buffalo, The State University of New York, Buffalo, New York 14260
| | - Sun-Hua L. Chao
- Department of Chemistry, University at Buffalo, The State University of New York, Buffalo, New York 14260
| | - Melvyn Rowen Churchill
- Department of Chemistry, University at Buffalo, The State University of New York, Buffalo, New York 14260
| | - Charles H. Lake
- Department of Chemistry, University at Buffalo, The State University of New York, Buffalo, New York 14260
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Affiliation(s)
- O. T. Beachley
- Department of Chemistry, State University of New York at Buffalo, Buffalo, New York 14260-3000
| | - Sun-Hua L. Chao
- Department of Chemistry, State University of New York at Buffalo, Buffalo, New York 14260-3000
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Beachley, OT, Rosenblum DB, Churchill MR, Lake CH, Toomey LM. Room Temperature Cyclopentadiene Elimination Reaction for the Synthesis of Diethylgallium−Amides, −Phosphides, and −Thiolates. Crystal and Molecular Structures of [Et2GaP(t-Bu)2]2 and [Et2GaS(SiPh3)]2. Organometallics 1996. [DOI: 10.1021/om960284p] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- O. T. Beachley,
- Department of Chemistry, State University of New York at Buffalo, Buffalo, New York 14260
| | - Daniel B. Rosenblum
- Department of Chemistry, State University of New York at Buffalo, Buffalo, New York 14260
| | - Melvyn Rowen Churchill
- Department of Chemistry, State University of New York at Buffalo, Buffalo, New York 14260
| | - Charles H. Lake
- Department of Chemistry, State University of New York at Buffalo, Buffalo, New York 14260
| | - Laurence M. Toomey
- Department of Chemistry, State University of New York at Buffalo, Buffalo, New York 14260
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Haggata S, Azad Malik M, Motevalli M, O'Brien P. The mixed alkyl gallium or indium N,N,N-trimethylpropylenediaminedithiocarbamates. Crystal structure of diethyl(N,N′,N′-trimethylpropylenediamine) dithiocarbamatoindium(III). J Organomet Chem 1996. [DOI: 10.1016/0022-328x(95)05934-h] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
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Pan Y, Boudjouk P. Phenylated Group 13/15 Compounds: Convenient Precursors to Phase Pure Gallium Arsenide and Gallium Phosphide. MAIN GROUP CHEMISTRY 1995. [DOI: 10.1080/13583149512331338265] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
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Wiedmann D, Hausen HD, Weidlein J. Dimethylgallium-bis(trimethylsilyl)phosphan Schwingungsspektrum, Kraftkonstanten und Struktur. Z Anorg Allg Chem 1995. [DOI: 10.1002/zaac.19956210813] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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O'Brient P, Haggata S. The single-molecule approach to the deposition of compound semiconducting materials by MOCVD and related methods. ACTA ACUST UNITED AC 1995. [DOI: 10.1002/amo.860050208] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Lee KE, Higa KT. Synthesis, characterization, and reactivity of new alkylgallium acetylides. J Organomet Chem 1993. [DOI: 10.1016/0022-328x(93)80106-l] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/17/2022]
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Beachley O, Maloney JD, Rogers RD. Gallium and indium compounds containing three different substituents. Crystal and molecular structure of [(Me3CCH2)ClGaPPh2]3. J Organomet Chem 1993. [DOI: 10.1016/0022-328x(93)80108-n] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Primary amide and amine complexes of gallium and indium: X-ray crystal structures of [Me2Ga(μ-NH(tBu))]2, Me3Ga · NH2(tBu) and Me3In · NH2(tBu). J Organomet Chem 1992. [DOI: 10.1016/0022-328x(92)83301-w] [Citation(s) in RCA: 49] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Landry CC, Cheatham LK, Macinnes AN, Barron AR. The preparation of (Al2O3)x(SiO2)y thin films using [al(OSiEt3)3]2 as a single-source precursor. ACTA ACUST UNITED AC 1992. [DOI: 10.1002/amo.860010103] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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Alcock N, Degnan I, Roe S, Wallbridge M. Preparation and characterisation of novel organoindium derivatives; X-ray crystal structure of dimethyl(salicylaldehyde)indium. J Organomet Chem 1991. [DOI: 10.1016/0022-328x(91)86326-l] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Cowley AH, Jones RA. Niedermolekulare III/V-Komplexe, ein möglicher neuer Weg zu Galliumarsenid und verwandten Halbleitern. Angew Chem Int Ed Engl 1989. [DOI: 10.1002/ange.19891010908] [Citation(s) in RCA: 72] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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Aitchison KA, Julius Backer-Dirks J, Bradley DC, Faktor MM, Frigo DM, Hursthouse MB, Hussain B, Short RL. Dimethylindium dialkylamides and organylphosphides, X-ray crystal structure of (Me2InNR2)2 (R = Et, Pri, SiMe3) and (Me2InPBut2)2. J Organomet Chem 1989. [DOI: 10.1016/0022-328x(89)87311-5] [Citation(s) in RCA: 44] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Alcock N, Degnan I, Wallbridge M, Powell H, McPartlin M, Sheldrick G. Preparation of some phosphidoindium compounds, and the crystal structures of In(PBut2)3 and [Et2InPBUt2]2. J Organomet Chem 1989. [DOI: 10.1016/0022-328x(89)85395-1] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/17/2022]
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Potential sources of the electronic materials GaP and AlAs. Synthesis and X-ray structures of [t-Bu2 Ga(μ-(C5H9)PH)]2 and [Et2Al(μ-t-Bu2As)]2 (C5H9 = cyclopentyl). Polyhedron 1988. [DOI: 10.1016/s0277-5387(00)80702-0] [Citation(s) in RCA: 33] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Beachley O, Kopasz JP, Zhang H, Hunter WE, Atwood JL. Synthesis and characterization of amphoteric ligands including the crystal and molecular structure of [(Me3SiCH2)2InPPh2]2. J Organomet Chem 1987. [DOI: 10.1016/0022-328x(87)80389-3] [Citation(s) in RCA: 42] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
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