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Song Q, Gao H, Cheng L, Xiao Z, Li D, Wang Y, Xie M, Fuller NA, Zhu M. Surface Nanostructure Fabrication by Initiated Chemical Vapor Deposition and Its Combined Technologies. ACS Macro Lett 2025; 14:214-224. [PMID: 39900553 DOI: 10.1021/acsmacrolett.4c00793] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/05/2025]
Abstract
Initiated chemical vapor deposition (iCVD) is a versatile technique that enables the direct growth of nanostructures and surface modification of such structures. Unlike traditional CVD methods, iCVD operates under mild conditions, allowing for damage-free processing of delicate substrates. It can produce highly uniform polymer layers, with thicknesses ranging from over 15 μm to sub-10 nm, conformally coating intricate geometries. The broad range of polymer compositions achievable with iCVD offers precise control of surface chemistry. In this Viewpoint, we present iCVD's mechanisms and the principles for controlling the composition and morphology of deposited layers. We summarize various surface nanostructures including nanodomes, nanocones, nanowrinkles, nanoparticles, and nanoporous structures that are directly fabricated using iCVD. We also demonstrate the integration of iCVD with other advanced methods, such as photo, soft, and nanoimprint lithography; template-assisted growth; and thermal CVD, to leverage the advantages of multiple methods and overcome individual limitations in nanofabrication. Through these combined strategies, we show the iCVD's potential for creating multifunctional nanostructures with broad applications across engineering and biomedical fields.
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Affiliation(s)
- Qing Song
- Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
| | - Haijun Gao
- Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
| | - Lin Cheng
- Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
| | - Zihan Xiao
- Wuhan Marine Machinery Plant Co., Ltd., Wuhan 430084, China
| | - Deli Li
- Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
| | - Yue Wang
- Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
| | - Meizhen Xie
- School of Food Science and Engineering, Hainan University, Haikou 570228, Hainan, China
| | - Nathan A Fuller
- Division of Natural Sciences, Lyon College, Batesville, Arkansas 72501, United States
| | - Mengfan Zhu
- Division of Natural Sciences, Lyon College, Batesville, Arkansas 72501, United States
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Jain A, Pal S, Li S, Abbott NL, Yang R. Single-step synthesis of shaped polymeric particles using initiated chemical vapor deposition in liquid crystals. SCIENCE ADVANCES 2024; 10:eadp5573. [PMID: 39504375 PMCID: PMC11540036 DOI: 10.1126/sciadv.adp5573] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/03/2024] [Accepted: 10/03/2024] [Indexed: 11/08/2024]
Abstract
We elucidate a previously unknown synthesis pathway that leads to polymeric nanospheres, orientation-controlled microgels, or microspheroids via single-step polymerization of divinylbenzene (DVB) using initiated chemical vapor deposition (iCVD) in liquid crystals (LC). iCVD supplies vapor-phase reactants continuously, avoiding the critical limitation of reactant-induced disruption of LC structure that has plagued past LC-templated polymerization processes. LC is leveraged as a real-time display of the polymerization conditions and particle emergence, captured using an in situ long-focal range microscope. Detailed image analysis unravels key LC-guided mechanisms during polymerization. pDVB forms nanospheres due to poor solubilization by nematic LC. The nanospheres partition to the LC-solid interface and further assemble into microgel clusters whose orientation is guided by the LC molecular alignment. On further polymerization, microgel clusters transition to microspheroids that resemble liquid drops. We identify key energetic factors that guide trajectories along the synthesis pathway, providing the fundamental basis of a framework for engineering particle synthesis with shape control.
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Affiliation(s)
| | | | - Shiqi Li
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, NY, USA
| | - Nicholas L. Abbott
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, NY, USA
| | - Rong Yang
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, NY, USA
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Gleason KK. Designing Organic and Hybrid Surfaces and Devices with Initiated Chemical Vapor Deposition (iCVD). ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2306665. [PMID: 37738605 DOI: 10.1002/adma.202306665] [Citation(s) in RCA: 14] [Impact Index Per Article: 14.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/07/2023] [Revised: 09/05/2023] [Indexed: 09/24/2023]
Abstract
The initiated chemical vapor deposition (iCVD) technique is an all-dry method for designing organic and hybrid polymers. Unlike methods utilizing liquids or line-of-sight arrival, iCVD provides conformal surface modification over intricate geometries. Uniform, high-purity, and pinhole-free iCVD films can be grown with thicknesses ranging from >15 µm to <5 nm. The mild conditions permit damage-free growth directly onto flexible substrates, 2D materials, and liquids. Novel iCVD polymer morphologies include nanostructured surfaces, nanoporosity, and shaped particles. The well-established fundamentals of iCVD facilitate the systematic design and optimization of polymers and copolymers. The functional groups provide fine-tuning of surface energy, surface charge, and responsive behavior. Further reactions of the functional groups in the polymers can yield either surface modification, compositional gradients through the layer thickness, or complete chemical conversion of the bulk film. The iCVD polymers are integrated into multilayer device structures as desired for applications in sensing, electronics, optics, electrochemical energy storage, and biotechnology. For these devices, hybrids offer higher values of refractive index and dielectric constant. Multivinyl monomers typically produce ultrasmooth and pinhole-free and mechanically deformable layers and robust interfaces which are especially promising for electronic skins and wearable optoelectronics.
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Affiliation(s)
- Karen K Gleason
- Department of Chemical Engineering, MIT, 77 Massachusetts Avenue, Cambridge, MA, 02138, USA
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