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Daudin B, Siladie AM, Gruart M, den Hertog M, Bougerol C, Haas B, Rouvière JL, Robin E, Recio-Carretero MJ, Garro N, Cros A. The role of surface diffusion in the growth mechanism of III-nitride nanowires and nanotubes. NANOTECHNOLOGY 2021; 32:085606. [PMID: 33147580 DOI: 10.1088/1361-6528/abc780] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
The spontaneous growth of GaN nanowires (NWs) in absence of catalyst is controlled by the Ga flux impinging both directly on the top and on the side walls and diffusing to the top. The presence of diffusion barriers on the top surface and at the frontier between the top and the sidewalls, however, causes an inhomogeneous distribution of Ga adatoms at the NW top surface resulting in a GaN accumulation in its periphery. The increased nucleation rate in the periphery promotes the spontaneous formation of superlattices in InGaN and AlGaN NWs. In the case of AlN NWs, the presence of Mg can enhance the otherwise short Al diffusion length along the sidewalls inducing the formation of AlN nanotubes.
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Affiliation(s)
- Bruno Daudin
- Univ. Grenoble Alpes, CEA, IRIG-PHELIQS, NPSC, 17 rue des martyrs, F-38000 Grenoble, France
| | | | - Marion Gruart
- Univ. Grenoble Alpes, CEA, IRIG-PHELIQS, NPSC, 17 rue des martyrs, F-38000 Grenoble, France
| | - Martien den Hertog
- Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, 25 rue des martyrs, F-38000 Grenoble, France
| | - Catherine Bougerol
- Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, 25 rue des martyrs, F-38000 Grenoble, France
| | - Benedikt Haas
- Univ. Grenoble Alpes, CEA, IRIG-MEM, LEMMA, 17 rue des martyrs, F-38000 Grenoble, France
| | - Jean-Luc Rouvière
- Univ. Grenoble Alpes, CEA, IRIG-MEM, LEMMA, 17 rue des martyrs, F-38000 Grenoble, France
| | - Eric Robin
- Univ. Grenoble Alpes, CEA, IRIG-MEM, LEMMA, 17 rue des martyrs, F-38000 Grenoble, France
| | | | - Núria Garro
- Institute of Materials Science (ICMUV), Universidad de Valencia, PO Box E-22085, Valencia, Spain
| | - Ana Cros
- Institute of Materials Science (ICMUV), Universidad de Valencia, PO Box E-22085, Valencia, Spain
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Coulon PM, Kusch G, Martin RW, Shields PA. Deep UV Emission from Highly Ordered AlGaN/AlN Core-Shell Nanorods. ACS APPLIED MATERIALS & INTERFACES 2018; 10:33441-33449. [PMID: 30188116 DOI: 10.1021/acsami.8b10605] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
Abstract
Three-dimensional core-shell nanostructures could resolve key problems existing in conventional planar deep UV light-emitting diode (LED) technology due to their high structural quality, high-quality nonpolar growth leading to a reduced quantum-confined Stark effect and their ability to improve light extraction. Currently, a major hurdle to their implementation in UV LEDs is the difficulty of growing such nanostructures from Al xGa1- xN materials with a bottom-up approach. In this paper, we report the successful fabrication of an AlN/Al xGa1- xN/AlN core-shell structure using an original hybrid top-down/bottom-up approach, thus representing a breakthrough in applying core-shell architecture to deep UV emission. Various AlN/Al xGa1- xN/AlN core-shell structures were grown on optimized AlN nanorod arrays. These were created using displacement Talbot lithography (DTL), a two-step dry-wet etching process, and optimized AlN metal organic vapor phase epitaxy regrowth conditions to achieve the facet recovery of straight and smooth AlN nonpolar facets, a necessary requirement for subsequent growth. Cathodoluminescence hyperspectral imaging of the emission characteristics revealed that 229 nm deep UV emission was achieved from the highly uniform array of core-shell AlN/Al xGa1- xN/AlN structures, which represents the shortest wavelength achieved so far with a core-shell architecture. This hybrid top-down/bottom-up approach represents a major advance for the fabrication of deep UV LEDs based on core-shell nanostructures.
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Affiliation(s)
- Pierre-Marie Coulon
- Department of Electronic and Electrical Engineering, Centre of Nanoscience & Nanotechnology , University of Bath , Bath BA2 7AY , U.K
| | - Gunnar Kusch
- Department of Physics , SUPA, University of Strathclyde , Glasgow G4 0NG , U.K
| | - Robert W Martin
- Department of Physics , SUPA, University of Strathclyde , Glasgow G4 0NG , U.K
| | - Philip A Shields
- Department of Electronic and Electrical Engineering, Centre of Nanoscience & Nanotechnology , University of Bath , Bath BA2 7AY , U.K
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Zhao C, Ebaid M, Zhang H, Priante D, Janjua B, Zhang D, Wei N, Alhamoud AA, Shakfa MK, Ng TK, Ooi BS. Quantified hole concentration in AlGaN nanowires for high-performance ultraviolet emitters. NANOSCALE 2018; 10:15980-15988. [PMID: 29897082 DOI: 10.1039/c8nr02615g] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/26/2023]
Abstract
p-Type doping in wide bandgap and new classes of ultra-wide bandgap materials has long been a scientific and engineering problem. The challenges arise from the large activation energy of dopants and high densities of dislocations in materials. We report here, a significantly enhanced p-type conduction using high-quality AlGaN nanowires. For the first time, the hole concentration in Mg-doped AlGaN nanowires is quantified. The incorporation of Mg into AlGaN was verified by correlation with photoluminescence and Raman measurements. The open-circuit potential measurements further confirmed the p-type conductivity, while Mott-Schottky experiments measured a hole concentration of 1.3 × 1019 cm-3. These results from photoelectrochemical measurements allow us to design prototype ultraviolet (UV) light-emitting diodes (LEDs) incorporating the AlGaN quantum-disks-in-nanowire and an optimized p-type AlGaN contact layer for UV-transparency. The ∼335 nm LEDs exhibited a low turn-on voltage of 5 V with a series resistance of 32 Ω, due to the efficient p-type doping of the AlGaN nanowires. The bias-dependent Raman measurements further revealed the negligible self-heating of devices. This study provides an attractive solution to evaluate the electrical properties of AlGaN, which is applicable to other wide bandgap nanostructures. Our results are expected to open doors to new applications for wide and ultra-wide bandgap materials.
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Affiliation(s)
- Chao Zhao
- King Abdullah University of Science and Technology (KAUST), Photonics Laboratory, Thuwal 23955-6900, Saudi Arabia.
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Coulon PM, Kusch G, Fletcher P, Chausse P, Martin RW, Shields PA. Hybrid Top-Down/Bottom-Up Fabrication of a Highly Uniform and Organized Faceted AlN Nanorod Scaffold. MATERIALS 2018; 11:ma11071140. [PMID: 29976880 PMCID: PMC6073245 DOI: 10.3390/ma11071140] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/12/2018] [Revised: 06/29/2018] [Accepted: 07/02/2018] [Indexed: 11/16/2022]
Abstract
As a route to the formation of regular arrays of AlN nanorods, in contrast to other III-V materials, the use of selective area growth via metal organic vapor phase epitaxy (MOVPE) has so far not been successful. Therefore, in this work we report the fabrication of a highly uniform and ordered AlN nanorod scaffold using an alternative hybrid top-down etching and bottom-up regrowth approach. The nanorods are created across a full 2-inch AlN template by combining Displacement Talbot Lithography and lift-off to create a Ni nanodot mask, followed by chlorine-based dry etching. Additional KOH-based wet etching is used to tune the morphology and the diameter of the nanorods. The resulting smooth and straight morphology of the nanorods after the two-step dry-wet etching process is used as a template to recover the AlN facets of the nanorods via MOVPE regrowth. The facet recovery is performed for various growth times to investigate the growth mechanism and the change in morphology of the AlN nanorods. Structural characterization highlights, first, an efficient dislocation filtering resulting from the ~130 nm diameter nanorods achieved after the two-step dry-wet etching process, and second, a dislocation bending induced by the AlN facet regrowth. A strong AlN near band edge emission is observed from the nanorods both before and after regrowth. The achievement of a highly uniform and organized faceted AlN nanorod scaffold having smooth and straight non-polar facets and improved structural and optical quality is a major stepping stone toward the fabrication of deep UV core-shell-based AlN or AlxGa1-xN templates.
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Affiliation(s)
- Pierre-Marie Coulon
- Centre of Nanoscience & Nanotechnology & Department of Electronic and Electrical Engineering, University of Bath, Bath BA2 7AY, UK.
| | - Gunnar Kusch
- Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK.
| | - Philip Fletcher
- Centre of Nanoscience & Nanotechnology & Department of Electronic and Electrical Engineering, University of Bath, Bath BA2 7AY, UK.
| | - Pierre Chausse
- Centre of Nanoscience & Nanotechnology & Department of Electronic and Electrical Engineering, University of Bath, Bath BA2 7AY, UK.
| | - Robert W Martin
- Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK.
| | - Philip A Shields
- Centre of Nanoscience & Nanotechnology & Department of Electronic and Electrical Engineering, University of Bath, Bath BA2 7AY, UK.
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Liu B, Li J, Yang W, Zhang X, Jiang X, Bando Y. Semiconductor Solid-Solution Nanostructures: Synthesis, Property Tailoring, and Applications. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2017; 13:1701998. [PMID: 28961363 DOI: 10.1002/smll.201701998] [Citation(s) in RCA: 25] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/13/2017] [Revised: 07/29/2017] [Indexed: 06/07/2023]
Abstract
The innovation of band-gap engineering in advanced materials caused by the alloying of different semiconductors into solid-solution nanostructures provides numerous opportunities and advantages in optoelectronic property tailoring. The semiconductor solid-solution nanostructures have multifarious emission wavelength, adjustability of absorption edge, tunable electrical resistivity, and cutting-edge photoredox capability, and these advantages can be rationalized by the assorted synthesis strategies such as, binary, ternary, and quaternary solid-solutions. In addition, the abundance of elements in groups IIB, IIIA, VA, VIA, and VIIA provides sufficient room to tailor-make the semiconductor solid-solution nanostructures with the desired properties. Recent progress of semiconductor solid-solution nanostructures including synthesis strategies, structure and composition design, band-gap engineering related to the optical and electrical properties, and their applications in different fields is comprehensively reviewed. The classification, formation principle, synthesis routes, and the advantage of semiconductor solid-solution nanostructures are systematically reviewed. Moreover, the challenges faced in this area and the future prospects are discussed. By combining the information together, it is strongly anticipated that this Review may shed new light on understanding semiconductor solid-solution nanostructures while expected to have continuous breakthroughs in band-gap engineering and advanced optoelectronic nanodevices.
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Affiliation(s)
- Baodan Liu
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, No. 72 Wenhua Road, Shenhe District, Shenyang, 110016, China
| | - Jing Li
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, No. 72 Wenhua Road, Shenhe District, Shenyang, 110016, China
| | - Wenjin Yang
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, No. 72 Wenhua Road, Shenhe District, Shenyang, 110016, China
| | - Xinglai Zhang
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, No. 72 Wenhua Road, Shenhe District, Shenyang, 110016, China
| | - Xin Jiang
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, No. 72 Wenhua Road, Shenhe District, Shenyang, 110016, China
| | - Yoshio Bando
- World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, 305-0044, Japan
- Australian Institute for Innovative Materials (AIM), University of Wollongong, Squires Way, North Wollongong, NSW, 2500, Australia
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Müßener J, Hille P, Grieb T, Schörmann J, Teubert J, Monroy E, Rosenauer A, Eickhoff M. Bias-Controlled Optical Transitions in GaN/AlN Nanowire Heterostructures. ACS NANO 2017; 11:8758-8767. [PMID: 28771318 DOI: 10.1021/acsnano.7b02419] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
We report on the control and modification of optical transitions in 40× GaN/AlN heterostructure superlattices embedded in GaN nanowires by an externally applied bias. The complex band profile of these multi-nanodisc heterostructures gives rise to a manifold of optical transitions, whose emission characteristic is strongly influenced by polarization-induced internal electric fields. We demonstrate that the superposition of an external axial electric field along a single contacted nanowire leads to specific modifications of each photoluminescence emission, which allows to investigate and identify their origin and to control their characteristic properties in terms of transition energy, intensity and decay time. Using this approach, direct transitions within one nanodisc, indirect transitions between adjacent nanodiscs, transitions at the top/bottom edge of the heterostructure, and the GaN near-band-edge emission can be distinguished. While the transition energy of the direct transition can be shifted by external bias over a range of 450 meV and changed in intensity by a factor of 15, the indirect transition exhibits an inverse bias dependence and is only observable and spectrally separated when external bias is applied. In addition, by tuning the band profile close to flat band conditions, the direction and magnitude of the internal electric field can be estimated, which is of high interest for the polar group III-nitrides. The direct control of emission properties over a wide range bears possible application in tunable optoelectronic devices. For more fundamental studies, single-nanowire heterostructures provide a well-defined and isolated system to investigate and control interaction processes in coupled quantum structures.
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Affiliation(s)
- Jan Müßener
- Institut für Festkörperphysik, Universität Bremen , Otto-Hahn-Allee 1, 28359 Bremen, Germany
- I. Physikalisches Institut, Justus-Liebig-Universität Gießen , Heinrich-Buff-Ring 16, 35392 Gießen, Germany
| | - Pascal Hille
- Institut für Festkörperphysik, Universität Bremen , Otto-Hahn-Allee 1, 28359 Bremen, Germany
- I. Physikalisches Institut, Justus-Liebig-Universität Gießen , Heinrich-Buff-Ring 16, 35392 Gießen, Germany
| | - Tim Grieb
- Institut für Festkörperphysik, Universität Bremen , Otto-Hahn-Allee 1, 28359 Bremen, Germany
| | - Jörg Schörmann
- I. Physikalisches Institut, Justus-Liebig-Universität Gießen , Heinrich-Buff-Ring 16, 35392 Gießen, Germany
| | - Jörg Teubert
- I. Physikalisches Institut, Justus-Liebig-Universität Gießen , Heinrich-Buff-Ring 16, 35392 Gießen, Germany
| | - Eva Monroy
- Université Grenoble-Alpes , 38000 Grenoble, France
- CEA-Grenoble, INAC-PHELIQS , 17 Avenue des Martyrs, 38054 Grenoble, France
| | - Andreas Rosenauer
- Institut für Festkörperphysik, Universität Bremen , Otto-Hahn-Allee 1, 28359 Bremen, Germany
| | - Martin Eickhoff
- Institut für Festkörperphysik, Universität Bremen , Otto-Hahn-Allee 1, 28359 Bremen, Germany
- I. Physikalisches Institut, Justus-Liebig-Universität Gießen , Heinrich-Buff-Ring 16, 35392 Gießen, Germany
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Janjua B, Sun H, Zhao C, Anjum DH, Wu F, Alhamoud AA, Li X, Albadri AM, Alyamani AY, El-Desouki MM, Ng TK, Ooi BS. Self-planarized quantum-disks-in-nanowires ultraviolet-B emitters utilizing pendeo-epitaxy. NANOSCALE 2017; 9:7805-7813. [PMID: 28290591 DOI: 10.1039/c7nr00006e] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
The growth of self-assembled, vertically oriented and uniform nanowires (NWs) has remained a challenge for efficient light-emitting devices. Here, we demonstrate dislocation-free AlGaN NWs with spontaneous coalescence, which are grown by plasma-assisted molecular beam epitaxy on an n-type doped silicon (100) substrate. A high density of NWs (filling factor >95%) was achieved under optimized growth conditions, enabling device fabrication without planarization using ultraviolet (UV)-absorbing polymer materials. UV-B (280-320 nm) light-emitting diodes (LEDs), which emit at ∼303 nm with a narrow full width at half maximum (FWHM) (∼20 nm) of the emission spectrum, are demonstrated using a large active region ("active region/NW length-ratio" ∼50%) embedded with 15 stacks of AlxGa1-xN/AlyGa1-yN quantum-disks (Qdisks). To improve the carrier injection, a graded layer is introduced at the AlGaN/GaN interfaces on both p- and n-type regions. This work demonstrates a viable approach to easily fabricate ultra-thin, efficient UV optoelectronic devices on low-cost and scalable silicon substrates.
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Affiliation(s)
- B Janjua
- King Abdullah University of Science and Technology (KAUST), Photonics Laboratory, Thuwal 23955-6900, Saudi Arabia.
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9
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Janjua B, Sun H, Zhao C, Anjum DH, Priante D, Alhamoud AA, Wu F, Li X, Albadri AM, Alyamani AY, El-Desouki MM, Ng TK, Ooi BS. Droop-free Al xGa 1-xN/Al yGa 1-yN quantum-disks-in-nanowires ultraviolet LED emitting at 337 nm on metal/silicon substrates. OPTICS EXPRESS 2017; 25:1381-1390. [PMID: 28158020 DOI: 10.1364/oe.25.001381] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/21/2016] [Accepted: 01/12/2017] [Indexed: 06/06/2023]
Abstract
Currently the AlGaN-based ultraviolet (UV) solid-state lighting research suffers from numerous challenges. In particular, low internal quantum efficiency, low extraction efficiency, inefficient doping, large polarization fields, and high dislocation density epitaxy constitute bottlenecks in realizing high power devices. Despite the clear advantage of quantum-confinement nanostructure, it has not been widely utilized in AlGaN-based nanowires. Here we utilize the self-assembled nanowires (NWs) with embedding quantum-disks (Qdisks) to mitigate these issues, and achieve UV emission of 337 nm at 32 A/cm2 (80 mA in 0.5 × 0.5 mm2 device), a turn-on voltage of ~5.5 V and droop-free behavior up to 120 A/cm2 of injection current. The device was grown on a titanium-coated n-type silicon substrate, to improve current injection and heat dissipation. A narrow linewidth of 11.7 nm in the electroluminescence spectrum and a strong wavefunctions overlap factor of 42% confirm strong quantum confinement within uniformly formed AlGaN/AlGaN Qdisks, verified using transmission electron microscopy (TEM). The nitride-based UV nanowires light-emitting diodes (NWs-LEDs) grown on low cost and scalable metal/silicon template substrate, offers a scalable, environment friendly and low cost solution for numerous applications, such as solid-state lighting, spectroscopy, medical science and security.
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Puchtler TJ, Wang T, Ren CX, Tang F, Oliver RA, Taylor RA, Zhu T. Ultrafast, Polarized, Single-Photon Emission from m-Plane InGaN Quantum Dots on GaN Nanowires. NANO LETTERS 2016; 16:7779-7785. [PMID: 27960480 DOI: 10.1021/acs.nanolett.6b03980] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
We demonstrate single-photon emission from self-assembled m-plane InGaN quantum dots (QDs) embedded on the side-walls of GaN nanowires. A combination of electron microscopy, cathodoluminescence, time-resolved microphotoluminescence (μPL), and photon autocorrelation experiments give a thorough evaluation of the QD structural and optical properties. The QD exhibits antibunched emission up to 100 K, with a measured autocorrelation function of g(2)(0) = 0.28(0.03) at 5 K. Studies on a statistically significant number of QDs show that these m-plane QDs exhibit very fast radiative lifetimes (260 ± 55 ps) suggesting smaller internal fields than any of the previously reported c-plane and a-plane QDs. Moreover, the observed single photons are almost completely linearly polarized aligned perpendicular to the crystallographic c-axis with a degree of linear polarization of 0.84 ± 0.12. Such InGaN QDs incorporated in a nanowire system meet many of the requirements for implementation into quantum information systems and could potentially open the door to wholly new device concepts.
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Affiliation(s)
- Tim J Puchtler
- Department of Physics, University of Oxford , Parks Road, Oxford OX1 3PU, U.K
| | - Tong Wang
- Department of Physics, University of Oxford , Parks Road, Oxford OX1 3PU, U.K
| | - Christopher X Ren
- Dept. Materials Science and Metallurgy, University of Cambridge , 27 Charles Babbage Road, Cambridge CB3 0FS, U.K
| | - Fengzai Tang
- Dept. Materials Science and Metallurgy, University of Cambridge , 27 Charles Babbage Road, Cambridge CB3 0FS, U.K
| | - Rachel A Oliver
- Dept. Materials Science and Metallurgy, University of Cambridge , 27 Charles Babbage Road, Cambridge CB3 0FS, U.K
| | - Robert A Taylor
- Department of Physics, University of Oxford , Parks Road, Oxford OX1 3PU, U.K
| | - Tongtong Zhu
- Dept. Materials Science and Metallurgy, University of Cambridge , 27 Charles Babbage Road, Cambridge CB3 0FS, U.K
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