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Lee TY, Chen PT, Huang CC, Chen HC, Chen LY, Lee PT, Chen FC, Horng RH, Kuo HC. Advances in core technologies for semiconductor manufacturing: applications and challenges of atomic layer etching, neutral beam etching and atomic layer deposition. NANOSCALE ADVANCES 2025; 7:2796-2817. [PMID: 40226206 PMCID: PMC11986675 DOI: 10.1039/d4na00784k] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/19/2024] [Accepted: 02/07/2025] [Indexed: 04/15/2025]
Abstract
This article comprehensively reviews the technological advancements, emerging materials, processing techniques adopted (atomic layer deposition, atomic layer etching, and neutral beam etching), geometric influences, and fabrication challenges in the development of advanced semiconductor devices. These technologies are recognized for their precision at the atomic scale and are crucial in fabricating next-generation silicon photonics optoelectronic devices. They also play an important role in the development of RF/power third-generation compound semiconductors and advanced semiconductor devices. Atomic layer deposition (ALD) offers superior control over thin film growth, ensuring uniformity and material conformity. Atomic layer etching (ALE) enables precise layer-by-layer material removal, making it ideal for high-aspect-ratio structures. Neutral beam etching (NBE) minimizes surface damage, a key factor in maintaining device reliability, particularly for GaN-based semiconductors. This article also assesses the role of these technologies in enhancing semiconductor device performance, with a focus on overcoming the limitations of traditional methods. The combined application of ALD, ALE, and NBE technologies is driving innovations in advanced semiconductor fabrication, making these processes indispensable for advancements in areas such as micro-LEDs, optical communication, and high-frequency, high-power electronic devices.
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Affiliation(s)
- Tzu-Yi Lee
- Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University Hsinchu 30010 Taiwan
- Semiconductor Research Center, Foxconn Research Taipei 11492 Taiwan
| | - Pei-Tien Chen
- Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University Hsinchu 30010 Taiwan
| | - Chien-Chi Huang
- Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University Hsinchu 30010 Taiwan
| | - Hsin-Chu Chen
- Institute of Advanced Semiconductor Packaging and Testing, National Sun Yat-sen University Kaohsiung 804201 Taiwan
| | - Li-Yin Chen
- Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University Hsinchu 30010 Taiwan
| | - Po-Tsung Lee
- Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University Hsinchu 30010 Taiwan
| | - Fang-Chung Chen
- Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University Hsinchu 30010 Taiwan
| | - Ray-Hua Horng
- Institute of Electronics, National Yang Ming Chiao Tung University 1001 University Road Hsinchu 30010 Taiwan
| | - Hao-Chung Kuo
- Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University Hsinchu 30010 Taiwan
- Semiconductor Research Center, Foxconn Research Taipei 11492 Taiwan
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Astaneh SH, Faverani LP, Bhatia H, Dallazen E, Costa MG, Ervolino E, Barão VA, Sukotjo C, Takoudis CG. Functionalization of collagen fiber with nano-islands of silver via atomic layer deposition to promote bone healing. Heliyon 2025; 11:e42177. [PMID: 39931468 PMCID: PMC11808621 DOI: 10.1016/j.heliyon.2025.e42177] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/13/2024] [Revised: 01/16/2025] [Accepted: 01/21/2025] [Indexed: 02/13/2025] Open
Abstract
Modern techniques of thin film deposition (e.g., atomic layer deposition [ALD]) have paved the way for the modification of the surface of target substrates with thin films, nanoparticles, or other types of nanomaterials. This novel way can improve the base material's properties and enhance specific properties through adding functionalized groups to the surface. In this study, ALD of silver was conducted on commercially available Type I collagen membrane to improve its bioactivity and promote bone healing. Two different sample groups were studied: pristine collagen and silver-coated collagen via ALD (Ag/Collagen). Chemical and morphological changes of the collagen membrane were investigated with X-ray photoelectron spectroscopy and scanning electron microscopy and the bioactivity of functionalized collagen with silver was studied in vitro and in vivo. Nano-islands of silver were obtained on collagen fibrils with an average diameter of ∼16 nm. Comparison of gingival cells cultured on pristine collagen, and silver-coated collagen, demonstrated that the attained silver nanoparticle size and concentration are below the toxicity level of silver. In vivo assessment in rat model showed the biocompatibility of the Ag/Collagen, and greater new bone formation compared to control. This novel solvent-free method can be used to functionalize sensitive materials used in surgeries as bone grafting agents to enhance osteopromotive properties without any adverse effects to the cellular environment.
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Affiliation(s)
- Sarah Hashemi Astaneh
- Chemical Engineering Department, University of Illinois Chicago, Chicago, IL, 60607, USA
| | - Leonardo P. Faverani
- Department of Diagnosis and Surgery, Sao Paulo State University (UNESP), Araçatuba, São Paulo, 16015-050, Brazil
- Department of Oral Diagnosis, Piracicaba Dental School, Universidade Estadual de Campinas (UNICAMP), Piracicaba, São Paulo, 13414-903, Brazil
| | - Harshdeep Bhatia
- Chemical Engineering Department, University of Illinois Chicago, Chicago, IL, 60607, USA
| | - Eduardo Dallazen
- Department of Diagnosis and Surgery, Sao Paulo State University (UNESP), Araçatuba, São Paulo, 16015-050, Brazil
| | - Monique Gonçalves Costa
- Department of Diagnosis and Surgery, Sao Paulo State University (UNESP), Araçatuba, São Paulo, 16015-050, Brazil
| | - Edilson Ervolino
- Department of Basic Sciences, Sao Paulo State University (UNESP), Araçatuba, São Paulo, 16015-050, Brazil
| | - Valentim A.R. Barão
- Department of Prosthodontics and Periodontology, Piracicaba Dental School, Universidade Estadual de Campinas (UNICAMP), Piracicaba, São Paulo, 13414-903, Brazil
| | - Cortino Sukotjo
- Department of Prosthodontics, School of Dental Medicine, University of Pittsburgh, PA, 15213, USA
| | - Christos G. Takoudis
- Chemical Engineering Department, University of Illinois Chicago, Chicago, IL, 60607, USA
- Biomedical Engineering Department, University of Illinois Chicago, Chicago, IL, 60607, USA
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Faverani LP, Astaneh SH, da Costa MG, Delanora LA, Lima-Neto TJ, Barbosa S, Ariani MD, Takoudis C, Sukotjo C. Collagen Membranes Functionalized with 150 Cycles of Atomic Layer Deposited Titania Improve Osteopromotive Property in Critical-Size Defects Created on Rat Calvaria. J Funct Biomater 2023; 14:jfb14030120. [PMID: 36976044 PMCID: PMC10057577 DOI: 10.3390/jfb14030120] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/16/2023] [Revised: 02/20/2023] [Accepted: 02/21/2023] [Indexed: 02/25/2023] Open
Abstract
The membranes used in bone reconstructions have been the object of investigation in the field of tissue engineering, seeking to improve their mechanical strength and add other properties, mainly the osteopromotive. This study aimed to evaluate the functionalization of collagen membranes, with atomic layer deposition of TiO2 on the bone repair of critical defects in rat calvaria and subcutaneous biocompatibility. A total of 39 male rats were randomized into four groups: blood clot (BC), collagen membrane (COL), COL 150—150 cycles of titania, and COL 600—600 cycles of titania. The defects were created in each calvaria (5 mm in diameter) and covered according to each group; the animals were euthanized at 7, 14, and 28 days. The collected samples were assessed by histometric (newly bone formed, soft tissue area, membrane area, and residual linear defect) and histologic (inflammatory cells and blood cells count) analysis. All data were subjected to statistical analysis (p < 0.05). The COL150 group showed statistically significant differences compared to the other groups, mainly in the analysis of residual linear defects (1.5 ± 0.5 × 106 pixels/µm2 for COL 150, and around 1 ± 0.5 × 106 pixels/µm2 for the other groups) and newly formed bone (1500 ± 1200 pixels/µm for COL 150, and around 4000 pixels/µm for the others) (p < 0.05), demonstrating a better biological behavior in the chronology of defects repair. It is concluded that the collagen membrane functionalized by TiO2 over 150 cycles showed better bioactive potential in treating critical size defects in the rats’ calvaria.
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Affiliation(s)
- Leonardo P. Faverani
- Department of Diagnosis and Surgery, School of Dentistry, Sao Paulo State University (UNESP), Aracatuba 16015-050, Brazil
| | - Sarah Hashemi Astaneh
- Department of Chemical Engineering, University of Illinois Chicago, Chicago, IL 60612, USA
| | - Monique Gonçalves da Costa
- Department of Diagnosis and Surgery, School of Dentistry, Sao Paulo State University (UNESP), Aracatuba 16015-050, Brazil
| | - Leonardo A. Delanora
- Department of Diagnosis and Surgery, School of Dentistry, Sao Paulo State University (UNESP), Aracatuba 16015-050, Brazil
| | - Tiburtino J. Lima-Neto
- Department of Diagnosis and Surgery, School of Dentistry, Sao Paulo State University (UNESP), Aracatuba 16015-050, Brazil
| | - Stéfany Barbosa
- Department of Diagnosis and Surgery, School of Dentistry, Sao Paulo State University (UNESP), Aracatuba 16015-050, Brazil
| | | | - Christos Takoudis
- Department of Chemical Engineering, University of Illinois Chicago, Chicago, IL 60612, USA
- Biomedical Engineering Department, University of Illinois Chicago, Chicago, IL 60607, USA
| | - Cortino Sukotjo
- Faculty of Dental Medicine, Universitas Airlangga, Surabaya 60132, Indonesia
- Department of Restorative Dentistry, University of Illinois Chicago, Chicago, IL 60607, USA
- Correspondence:
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Hu X, Ricci S, Naranjo S, Hill Z, Gawason P. Protein and Polysaccharide-Based Electroactive and Conductive Materials for Biomedical Applications. Molecules 2021; 26:4499. [PMID: 34361653 PMCID: PMC8348981 DOI: 10.3390/molecules26154499] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/30/2021] [Revised: 07/23/2021] [Accepted: 07/24/2021] [Indexed: 11/16/2022] Open
Abstract
Electrically responsive biomaterials are an important and emerging technology in the fields of biomedical and material sciences. A great deal of research explores the integral role of electrical conduction in normal and diseased cell biology, and material scientists are focusing an even greater amount of attention on natural and hybrid materials as sources of biomaterials which can mimic the properties of cells. This review establishes a summary of those efforts for the latter group, detailing the current materials, theories, methods, and applications of electrically conductive biomaterials fabricated from protein polymers and polysaccharides. These materials can be used to improve human life through novel drug delivery, tissue regeneration, and biosensing technologies. The immediate goal of this review is to establish fabrication methods for protein and polysaccharide-based materials that are biocompatible and feature modular electrical properties. Ideally, these materials will be inexpensive to make with salable production strategies, in addition to being both renewable and biocompatible.
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Affiliation(s)
- Xiao Hu
- Department of Physics and Astronomy, Rowan University, Glassboro, NJ 08028, USA; (S.R.); (Z.H.)
- Department of Biomedical Engineering, Rowan University, Glassboro, NJ 08028, USA; (S.N.); (P.G.)
- Department of Molecular and Cellular Biosciences, Rowan University, Glassboro, NJ 08028, USA
| | - Samuel Ricci
- Department of Physics and Astronomy, Rowan University, Glassboro, NJ 08028, USA; (S.R.); (Z.H.)
| | - Sebastian Naranjo
- Department of Biomedical Engineering, Rowan University, Glassboro, NJ 08028, USA; (S.N.); (P.G.)
| | - Zachary Hill
- Department of Physics and Astronomy, Rowan University, Glassboro, NJ 08028, USA; (S.R.); (Z.H.)
| | - Peter Gawason
- Department of Biomedical Engineering, Rowan University, Glassboro, NJ 08028, USA; (S.N.); (P.G.)
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