|
1
|
Ye H, He L, Wang Z, Gao L, Wang L, Zhang D, Luo X, Xing Y, Zhang J, Wu F, Yao H, Lu N, Zhou Y, Dong S, Wang D, Li L. Self-Restoration of a Wrinkled Hf 0.5Zr 0.5O 2 Ferroelectric Membrane. ACS APPLIED MATERIALS & INTERFACES 2025; 17:24087-24095. [PMID: 40226863 DOI: 10.1021/acsami.4c22859] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/15/2025]
Abstract
Ferroelectric oxides are generally prone to brittle deformation, which impedes their applicability in flexible devices. Using a damage-free peel-off process, we successfully synthesized wrinkled 10 nm thick membranes of zirconium-doped hafnium oxide Hf0.5Zr0.5O2 (HZO). We studied their self-restoration dynamics via in situ scanning probe microscopy. Substantial deformations were induced as the tip descended by applying and sustaining a predefined static force at the crest of the wrinkled membrane. The membrane was fully restored to its original wrinkled state within a specific force range, with no observed damage after force removal. The membrane demonstrated self-restoration even after forces exceeding 100 nN, which completely collapsed the wrinkles, highlighting the exceptional flexibility of these freestanding HZO membranes─an uncommon property among functional oxides. Combining phase-field simulations, we observed the emergence of a region exhibiting continuous variation in polarization intensity within the strained area. The formation of this specific domain structure plays a pivotal role in the self-restoration behavior of the freestanding ferroelectric membranes. This self-restoration capability is essential for the long-term stability of flexible electronic devices, such as sensors, energy harvesters, and electronic skins.
Collapse
Affiliation(s)
- Haoran Ye
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| | - Liqiang He
- Center of Microstructure Science, Frontier Institute of Science and Technology, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
| | - Zhipeng Wang
- School of Advanced Materials and Nanotechnology, Xidian University, Xi'an 710126, China
| | - Lei Gao
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences, Beijing 100190, China
| | - Lei Wang
- School of Materials Science and Engineering, University of New South Wales Sydney, New South Wales 2052, Australia
| | - Dawei Zhang
- School of Materials Science and Engineering, University of New South Wales Sydney, New South Wales 2052, Australia
| | - Xiong Luo
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| | - Yu Xing
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| | - Junchao Zhang
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| | - Fan Wu
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| | - Honghong Yao
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| | - Nianpeng Lu
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences, Beijing 100190, China
| | - Yichun Zhou
- School of Advanced Materials and Nanotechnology, Xidian University, Xi'an 710126, China
| | - Shuai Dong
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| | - Dong Wang
- Center of Microstructure Science, Frontier Institute of Science and Technology, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
| | - Linglong Li
- Key Laboratory of Quantum Materials and Devices of Ministry of Education, School of Physics, Southeast University, Nanjing 211189, China
| |
Collapse
|
|
2
|
Li L, Xiu X, Lyu H, Yang H, Safari A, Zhang S. Miniature Ultrasonic Spatial Localization Module in the Lightweight Interactive. MICROMACHINES 2023; 15:71. [PMID: 38258190 PMCID: PMC10819174 DOI: 10.3390/mi15010071] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/25/2023] [Revised: 12/24/2023] [Accepted: 12/27/2023] [Indexed: 01/24/2024]
Abstract
The advancement of spatial interaction technology has greatly enriched the domain of consumer electronics. Traditional solutions based on optical technologies suffers high power consumption and significant costs, making them less ideal in lightweight implementations. In contrast, ultrasonic solutions stand out due to their lower power consumption and cost-effectiveness, capturing widespread attention and interest. This paper addresses the challenges associated with the application of ultrasound sensors in spatial localization. Traditional ultrasound systems are hindered by blind spots, large physical dimensions, and constrained measurement ranges, limiting their practical applicability. To overcome these limitations, this paper proposes a miniature ultrasonic spatial localization module employing piezoelectric micromechanical ultrasonic transducers (PMUTs). The module is comprised of three devices each with dimension of 1.2 mm × 1.2 mm × 0.5 mm, operating at a frequency of around 180 kHz. This configuration facilitates a comprehensive distance detection range of 0-800 mm within 80° directivity, devoid of blind spot. The error rate and failure range of measurement as well as their relationship with the SNR (signal-to-noise ratio) are also thoroughly investigated. This work heralds a significant enhancement in hand spatial localization capabilities, propelling advancements in acoustic sensor applications of the meta-universe.
Collapse
Affiliation(s)
- Lieguang Li
- School of Microelectronics, Shanghai University, Shanghai 200444, China; (L.L.); (X.X.); (H.Y.)
| | - Xueying Xiu
- School of Microelectronics, Shanghai University, Shanghai 200444, China; (L.L.); (X.X.); (H.Y.)
| | - Haochen Lyu
- Department of Materials Science and Engineering in Rutgers, The State University of New Jersey, Piscataway, NJ 08854, USA; (H.L.); (A.S.)
| | - Haolin Yang
- School of Microelectronics, Shanghai University, Shanghai 200444, China; (L.L.); (X.X.); (H.Y.)
| | - Ahmad Safari
- Department of Materials Science and Engineering in Rutgers, The State University of New Jersey, Piscataway, NJ 08854, USA; (H.L.); (A.S.)
| | - Songsong Zhang
- School of Microelectronics, Shanghai University, Shanghai 200444, China; (L.L.); (X.X.); (H.Y.)
| |
Collapse
|