1
|
Li Y, Hao Y, Ju M, Yao FZ, Wang K, Liang R, Zhou Z. Significantly Enhanced Electrostrain in Oriented Epitaxial Self-Assembled Aurivillius-Type Piezoelectric Films via Regulating Polarization Vectors. ACS APPLIED MATERIALS & INTERFACES 2023; 15:23470-23478. [PMID: 37134269 DOI: 10.1021/acsami.3c02650] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
High-temperature piezoelectric films with excellent piezoelectric and ferroelectric properties lay the foundation for the development of high-temperature piezo-MEMS devices. However, due to the poor piezoelectricity and strong anisotropy, it remains a challenge to obtain high quality Aurivillius-type high-temperature piezoelectric films with high performance, which impedes their practical implements. Here, a feasible polarization vector regulation strategy associated with oriented epitaxial self-assembled nanostructures for enhancing electrostrain is proposed. Guided by lattice matching relation, non-c-axis oriented epitaxial self-assembled Aurivillius-type calcium bismuth niobate (CaBi2Nb2O9, CBN) high-temperature piezoelectric films were successfully prepared on different oriented Nb-STO substrates. By the lattice matching relationship, hysteresis measurement, and piezoresponse force microscopy analysis, it is confirmed that the polarization vectors transform from a two-dimensional plane to a three-dimensional space, and the out-of-plane polarization switching is enhanced. A platform for more possible polarization vectors is provided in the self-assembled (013)CBN film. More importantly, enhanced ferroelectric (Pr ∼ 13.4 μC/cm2) and large strain (∼0.24%) were obtained in the (013)CBN film, which promotes the great application prospect of CBN piezoelectric films in high-temperature MEMS devices.
Collapse
Affiliation(s)
- Yiguan Li
- Shanghai Institute of Ceramics, Key laboratory of Inorganic Functional Materials and Devices, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050, China
- University of Chinese Academy of Sciences, Shijingshan District, Beijing 100049, China
| | - Yanshuang Hao
- Shanghai Institute of Ceramics, Key laboratory of Inorganic Functional Materials and Devices, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050, China
- School of Chemistry and Materials Science, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
| | - Min Ju
- Research Center for Advanced Functional Ceramics, Wuzhen Laboratory, Jiaxing 314500, China
| | - Fang-Zhou Yao
- Research Center for Advanced Functional Ceramics, Wuzhen Laboratory, Jiaxing 314500, China
| | - Ke Wang
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100049, China
| | - Ruihong Liang
- Shanghai Institute of Ceramics, Key laboratory of Inorganic Functional Materials and Devices, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050, China
| | - Zhiyong Zhou
- Shanghai Institute of Ceramics, Key laboratory of Inorganic Functional Materials and Devices, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050, China
| |
Collapse
|