Wear-Resisting and Stable 4H-SiC/Cu-Based Tribovoltaic Nanogenerators for Self-Powered Sensing in a Harsh Environment

Revealing the Surface Topography Influence and Fundamental Operating Mechanism on Semiconductor-Semiconductor-Based Tribovoltaic Effect

Tribovoltaic effect is an emerging phenomenon occurring between two materials, which can generate direct current (DC) rather than alternate current (AC) at the contact interface. Though the existence of a tribovoltaic effect indeed brings up a new method for power supply of critical sensors using the Internet of Things technology, the wear and damage of tribovoltaic materials related to the surface topography during the sliding process is still nonnegligible. In this work, the influence of surface topography on the tribovoltaic effect between semiconductors is investigated by means of a lateral sliding mode triboelectric nanogenerator composed of ZnO and Si (ZnO/Si LS-TENG). Results show that the increase of effective area has a great improvement on the output of the tribovoltaic effect. In addition, a novel operating mechanism and theoretical model based on the energy band theory are proposed to illustrate the semiconductor-semiconductor tribovoltaic effect clearly.

Ultra-Durable Polysilicon Based Tribovoltaic Nanogenerators for Bearing In Situ Rotational Speed Sensing

Tribovoltaic nanogenerator (TVNG) is an emerging energy device with the advantages of direct current and high power density. At present, many TVNGs are based on single-crystal materials, which are expensive and fragile during structural processing. Here, a polysilicon-based TVNG for bearing in situ rotational speed sensing is developed, which has the same level of performance and lower cost compared to monocrystalline silicon. The defects in polysilicon can provide additional carriers, but the grain boundaries can suppress the transport process of carriers, resulting in almost the same electrical output as single crystals. The oiled sliding mode TVNG has an impressive durability of up to 1 million cycles. The friction coefficient of rolling mode TVNG is as low as 0.14. Based on rolling mode polysilicon TVNG, the tapered roller bearing, thrust ball bearing, and deep groove ball bearing are manufactured by cutting and engraving processes. Moreover, their short-circuit current and open-circuit voltage are linear with speed, and the fitting coefficient is as high as 0.99, providing favorable conditions for in situ rotational speed sensing. This work presents a structure-function integrated bearing design methodology, demonstrating the considerable potential of in situ sensing for intelligent components in the industrial Internet of Things.

Evolution of Tribotronics: From Fundamental Concepts to Potential Uses

The intelligent sensing network is one of the key components in the construction of the Internet of Things, and the power supply technology of sensor communication nodes needs to be solved urgently. As a new field combining tribo-potential with semiconductor devices, tribotronics, based on the contact electrification (CE) effect, realizes direct interaction between the external environment and semiconductor devices by combining triboelectric nanogenerator (TENG) and field-effect transistor (FET), further expanding the application prospects of micro/nano energy. In this paper, the research progress of tribotronics is systematically reviewed. Firstly, the mechanism of the CE effect and the working principles of TENG are introduced. Secondly, the regulation theory of tribo-potential on carrier transportation in semiconductor devices and the research status of tribotronic transistors are summarized. Subsequently, the applications of tribotronics in logic circuits and memory devices, smart sensors, and artificial synapses in recent years are demonstrated. Finally, the challenges and development prospects of tribotronics in the future are projected.

Ambient energy harvesters in wearable electronics: fundamentals, methodologies, and applications

In recent years, wearable sensor devices with exceptional portability and the ability to continuously monitor physiological signals in real time have played increasingly prominent roles in the fields of disease diagnosis and health management. This transformation has been largely facilitated by materials science and micro/nano-processing technologies. However, as this technology continues to evolve, the demand for multifunctionality and flexibility in wearable devices has become increasingly urgent, thereby highlighting the problem of stable and sustainable miniaturized power supplies. Here, we comprehensively review the current mainstream energy technologies for powering wearable sensors, including batteries, supercapacitors, solar cells, biofuel cells, thermoelectric generators, radio frequency energy harvesters, and kinetic energy harvesters, as well as hybrid power systems that integrate multiple energy conversion modes. In addition, we consider the energy conversion mechanisms, fundamental characteristics, and typical application cases of these energy sources across various fields. In particular, we focus on the crucial roles of different materials, such as nanomaterials and nano-processing techniques, for enhancing the performance of devices. Finally, the challenges that affect power supplies for wearable electronic products and their future developmental trends are discussed in order to provide valuable references and insights for researchers in related fields.

An Ultrahigh Power Density and Ultralow Wear GaN-Based Tribovoltaic Nanogenerator for Sliding Ball Bearing as Self-Powered Wireless Sensor Node

The tribovoltaic effect is regarded as a newly discovered semiconductor effect for mechanical-to-electrical energy conversion. However, tribovoltaic nanogenerators (TVNGs) are widely limited by low output power and poor wear resistance for device integration and application. Here, this work invents a TVNG using a ball-on-disk structure composed of gallium nitride (GaN) and steel ball. It exhibits an open-circuit voltage exceeding 130 V and an ultrahigh normalized average power density of 24.6 kW m-2 Hz-1 , which is a 282-fold improvement compared to previous works. Meanwhile, this TVNG reaches an ultralow wear rate of 5 × 10-7 mm3 N-1 m-1 at a maximum contact pressure of 906.6 MPa, surpassing the TVNG composed of Si by three orders of magnitude due to the local concentrated injection of frictional energy. Based on the TVNG, this work constructs the first tribovoltaic bearing and achieves sensing signal transmission within 16 s (300 rpm) by integrating a management circuit, a transmission module, a relay, and receiving terminals, which enables the monitoring of ambient pressure and temperature. This work realizes a GaN-based TVNG with high-performance and low wear simultaneously, demonstrating great potential for intelligent components and self-powered sensor nodes in the industrial Internet of Things.

Reversal in Output Current Direction of 4H-SiC/Cu Tribovoltaic Nanogenerator as Controlled by Relative Humidity

Tribovoltaic nanogenerators (TVNG) represent a fantastic opportunity for developing low-frequency energy harvesting and self-powered sensing, by exploiting their real-time direct-current (DC) output. Here, a thorough study of the effect of relative humidity (RH) on a TVNG consisting of 4H-SiC (n-type) and metallic copper foil (SM-TVNG) is presented. The SM-TVNG shows a remarkable sensitivity to RH and an abnormal RH dependence. When RH increases from ambient humidity up to 80%, an increasing electrical output is observed. However, when RH rises from 80% to 98%, the signal output not only decreases, but its direction reverses as it crosses 90% RH. This behavior differs greatly from that of a Si-based TVNG, whose output constantly increases with RH. The behavior of the SM-TVNG might result from the competition between the built-in electric field induced by metal-semiconductor contact and a strong triboelectric electric field induced by solid-liquid triboelectrification under high RH. The authors also demonstrated that both SM-TVNG and Si-based TVNG can work effectively as-is even fully submerged in deionized water. This mechanism can affect other devices and be applied to design self-powered sensors working under high RH or underwater.

MXene Lubricated Tribovoltaic Nanogenerator with High Current Output and Long Lifetime

Tribovoltaic nanogenerators (TVNGs) have the characteristics of high current density, low matched impedance and continuous output, which is expected to solve the problem of power supply for small electronic devices. However, wear occurrence in friction interface will seriously reduce the performance of TVNGs as well as lifetime. Here, we employ MXene solution as lubricate to improve output current density and lifetime of TVNG simultaneously, where a high value of 754 mA m-2 accompanied with a record durability of 90,000 cycles were achieved. By comparing multiple liquid lubricates with different polarity, we show that conductive polar liquid with MXene as additive plays a crucial role in enhancing the electrical output performance and durability of TVNG. Moreover, the universality of MXene solution is well demonstrated in various TVNGs with Cu and P-type Si, and Cu and N-GaAs as material pairs. This work may guide and accelerates the practical application of TVNG in future.

4H-Silicon Carbide as an Acoustic Material for MEMS

This article discusses the potential of 4H-silicon carbide (SiC) as a superior acoustic material for microelectromechanical systems (MEMS), particularly for high-performance resonator and extreme environments applications. Through a comparison of the crystalline structure along with the mechanical, acoustic, electrical, and thermal properties of 4H with respect to other SiC polytypes and silicon, it is shown that 4H-SiC possesses salient properties for MEMS applications, including its transverse isotropy and small phonon scattering dissipation. The utility and implementation of bonded SiC on insulator (4H-SiCOI) substrates as an emerging MEMS technology platform are presented. Additionally, this article reports on the temperature-dependent mechanical properties of 4H-SiC, including the temperature coefficient of frequency (TCF) and quality factor ( Q -factor) for Lamé mode resonators. Finally, the 4H-SiC MEMS fabrication including its deep reactive ion etching is discussed. This article provides valuable insights into the potential of 4H-SiC as a mechanoacoustic material and provides a foundation for future research in the field.