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Suh J, Lee J, Kim J, Cho M, Kim J, Oh JM, Han H, Lee HS, Oh J. High Aspect Ratio Silicon Nanohole Arrays via Electric-Field-Incorporated Metal-Assisted Chemical Etching. ACS APPLIED MATERIALS & INTERFACES 2025. [PMID: 40294212 DOI: 10.1021/acsami.5c00564] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/30/2025]
Abstract
The implementation of through-silicon vias for high-performance semiconductor devices requires a reliable fabrication process that can achieve high aspect ratio (HAR) silicon nanoholes (Si NHs). Currently, Si NHs are primarily fabricated via plasma-based dry etching, which has technical limitations, such as necking and bowing. Metal-assisted chemical etching (MaCE) is an alternative Si NH fabrication method that utilizes wet chemistry catalyzed by metals. However, the formation of HAR Si NHs is challenging because of the unstable motion of metal catalysts during MaCE. Herein, we introduce electric-field-incorporated MaCE (EMaCE) to improve the anisotropic etching stability of metal catalysts and achieve the formation of Si NHs. The etch straightness gradually improved with increasing electric field intensity while the etch rate remained nearly constant. We optimized the etchant concentration and etch time to increase the etch rate, and thus, fabricated an ultra-HAR (38:1) Si NHs array via EMaCE.
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Affiliation(s)
- Jungwon Suh
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Juho Lee
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Jaehoon Kim
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Minhyung Cho
- Material Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Jungah Kim
- Material Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Jung Min Oh
- Material Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Hoon Han
- Material Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Hyo San Lee
- Process Development, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Jihun Oh
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
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2
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Wang Z, Zhu C, Ni Z, Hojo H, Einaga H. Enhanced Photocatalytic Benzene Oxidation to Phenol over Monoclinic WO 3 Nanorods under Visible Light. ACS Catal 2022. [DOI: 10.1021/acscatal.2c03832] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Ziru Wang
- Department of Molecular and Material Sciences, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1, Kasugakoen, Kasuga 816-8580, Fukuoka, Japan
| | - Chen Zhu
- Department of Molecular and Material Sciences, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1, Kasugakoen, Kasuga 816-8580, Fukuoka, Japan
| | - Zitao Ni
- Department of Molecular and Material Sciences, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1, Kasugakoen, Kasuga 816-8580, Fukuoka, Japan
| | - Hajime Hojo
- Department of Advanced Materials Science and Engineering, Faculty of Engineering Sciences, Kyushu University, 6-1, Kasugakoen, Kasuga 816-8580, Fukuoka, Japan
| | - Hisahiro Einaga
- Department of Advanced Materials Science and Engineering, Faculty of Engineering Sciences, Kyushu University, 6-1, Kasugakoen, Kasuga 816-8580, Fukuoka, Japan
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3
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Meng Y, Liu G, Zuo G, Meng X, Wang T, Ye J. A review on ZnS-based photocatalysts for CO 2 reduction in all-inorganic aqueous medium. NANOSCALE 2022; 14:14455-14465. [PMID: 36165072 DOI: 10.1039/d2nr03703c] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Abstract
Photocatalytic CO2 reduction mimics natural photosynthesis, which is a potential technology for "carbon neutrality". This article will review the recent research progress of a class of distinguished photocatalytic CO2 reduction systems based on ZnS nanocrystal photocatalysts. We will focus on the pathway of maximizing the photoreduction rate of CO2 by continuously optimizing the catalyst design and the composition of the reaction medium. Such discussions will be meaningful and beneficial for developing universal strategies of solar fuel production. Finally, an outlook will be provided to brighten the prospects of ZnS-based photocatalytic CO2 reduction systems.
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Affiliation(s)
- Yuxuan Meng
- Hebei Provincial Laboratory of Inorganic Nonmetallic Materials, College of Materials Science and Engineering, North China University of Science and Technology, Tangshan 063210, P. R. China.
| | - Guoping Liu
- Hebei Provincial Laboratory of Inorganic Nonmetallic Materials, College of Materials Science and Engineering, North China University of Science and Technology, Tangshan 063210, P. R. China.
| | - Guifu Zuo
- Hebei Provincial Laboratory of Inorganic Nonmetallic Materials, College of Materials Science and Engineering, North China University of Science and Technology, Tangshan 063210, P. R. China.
| | - Xianguang Meng
- Hebei Provincial Laboratory of Inorganic Nonmetallic Materials, College of Materials Science and Engineering, North China University of Science and Technology, Tangshan 063210, P. R. China.
| | - Tao Wang
- Centre for Hydrogenergy, College of Materials Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, P. R. China.
| | - Jinhua Ye
- International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan.
- Graduate School of Chemical Sciences and Engineering, Hokkaido University, Sapporo 060-0814, Japan.
- TJU-NIMS International Collaboration Laboratory, School of Materials Science and Engineering, Tianjin University, Tianjin 300072, China.
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Yamazaki Y, Miyaji M, Ishitani O. Utilization of Low-Concentration CO 2 with Molecular Catalysts Assisted by CO 2-Capturing Ability of Catalysts, Additives, or Reaction Media. J Am Chem Soc 2022; 144:6640-6660. [PMID: 35404601 DOI: 10.1021/jacs.2c02245] [Citation(s) in RCA: 31] [Impact Index Per Article: 10.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/30/2022]
Abstract
Increasing concentration of atmospheric CO2 is a worldwide concern and continues to trigger various environmental problems. Photo- or electrocatalytic CO2 reduction (CO2-Red) using solar energy, i.e., artificial photosynthesis, is a prospective technique owing to its sustainability and the usefulness of the reaction products. Concentrations of CO2 in exhaust gases from industries are several % to 20%, and that in the atmosphere is about 400 ppm. Although condensation processes of CO2 require high energy consumption and cost, pure CO2 has been used in most of the reported studies for photo- and electrocatalytic CO2-Red because the reaction between CO2 and the catalyst could be one of the rate-limiting steps. To address these issues and provide a repository of potential techniques for other researchers, this perspective summarizes the catalytic systems reported for the reduction of low-concentration CO2, which utilize a combination of catalytic CO2-Red and CO2-capturing reactions (or CO2 adsorption). First, we describe CO2 insertions into M-X bonds of the catalysts, which increase the rate constants and/or equilibrium constants for CO2 binding on the catalysts, and modifications of the second coordination sphere to stabilize the CO2-bound catalysts. Furthermore, we discuss the reaction media used for catalytic CO2-Red that have the unique effect of increasing CO2 concentrations around the catalysts. These reaction media include typical CO2-capturing additives, ionic liquids, and metal-organic frameworks.
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Affiliation(s)
- Yasuomi Yamazaki
- Department of Materials and Life Science, Faculty of Science and Technology, Seikei University, 3-3-1 Kichijoji-Kitamachi, Musashino-shi, Tokyo 180-8633, Japan
| | - Masahiko Miyaji
- Department of Chemistry, Tokyo Institute of Technology, 2-12-1 NE-1, O-okayama, Meguro-ku, Tokyo, 152-8550, Japan
| | - Osamu Ishitani
- Department of Chemistry, Tokyo Institute of Technology, 2-12-1 NE-1, O-okayama, Meguro-ku, Tokyo, 152-8550, Japan
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Bahuguna A, Sasson Y. Formate-Bicarbonate Cycle as a Vehicle for Hydrogen and Energy Storage. CHEMSUSCHEM 2021; 14:1258-1283. [PMID: 33231357 DOI: 10.1002/cssc.202002433] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/16/2020] [Revised: 11/20/2020] [Indexed: 05/19/2023]
Abstract
In recent years, hydrogen has been considered a promising energy carrier for a sustainable energy economy in the future. An easy solution for the safer storage of hydrogen is challenging and efficient methods are still being explored in this direction. Despite having some progress in this area, no cost-effective and easily applicable solutions that fulfill the requirements of industry are yet to be claimed. Currently, the storage of hydrogen is largely limited to high-pressure compression and liquefaction or in the form of metal hydrides. Formic acid is a good source of hydrogen that also generates CO2 along with hydrogen on decomposition. Moreover, the hydrogenation of CO2 is thermodynamically unfavorable and requires high energy input. Alkali metal formates are alternative mild and noncorrosive sources of hydrogen. On decomposition, these metal formates release hydrogen and generate bicarbonates. The generated bicarbonates can be catalytically charged back to alkali formates under optimized hydrogen pressure. Hence, the formate-bicarbonate-based systems being carbon neutral at ambient condition has certain advantages over formic acid. The formate-bicarbonate cycle can be considered as a vehicle for hydrogen and energy storage. The whole process is carbon-neutral, reversible, and sustainable. This Review emphasizes the various catalytic systems employed for reversible formate-bicarbonate conversion. Moreover, a mechanistic investigation, the effect of temperature, pH, kinetics of reversible formate-bicarbonate conversion, and new insights in the field are also discussed in detail.
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Affiliation(s)
- Ashish Bahuguna
- Casali Center of Applied Chemistry, Institute of Chemistry, The Hebrew University of Jerusalem, Jerusalem, 9190401, Israel
| | - Yoel Sasson
- Casali Center of Applied Chemistry, Institute of Chemistry, The Hebrew University of Jerusalem, Jerusalem, 9190401, Israel
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Pan H, Heagy MD. Photons to Formate-A Review on Photocatalytic Reduction of CO 2 to Formic Acid. NANOMATERIALS (BASEL, SWITZERLAND) 2020; 10:E2422. [PMID: 33291520 PMCID: PMC7761832 DOI: 10.3390/nano10122422] [Citation(s) in RCA: 23] [Impact Index Per Article: 4.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/26/2020] [Revised: 11/24/2020] [Accepted: 11/26/2020] [Indexed: 01/20/2023]
Abstract
Rising levels of atmospheric carbon dioxide due to the burning and depletion of fossil fuels is continuously raising environmental concerns about global warming and the future of our energy supply. Renewable energy, especially better utilization of solar energy, is a promising method for CO2 conversion and chemical storage. Research in the solar fuels area is focused on designing novel catalysts and developing new conversion pathways. In this review, we focus on the photocatalytic reduction of CO2 primarily in its neutral pH species of carbonate to formate. The first two-electron photoproduct of carbon dioxide, a case for formate (or formic acid) is made in this review based on its value as; an important chemical feedstock, a hydrogen storage material, an intermediate to methanol, a high-octane fuel and broad application in fuel cells. This review focuses specifically on the following photocatalysts: semiconductors, phthalocyanines as photosensitizers and membrane devices and metal-organic frameworks.
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Zhang J, Kang F, Peng H, Wen J, Zheng X. Enhancing the photocatalytic activity of Cu 0.25Zn 0.75S nanodisks by metallic Ag loading in the visible-light region. RSC Adv 2019; 9:13787-13796. [PMID: 35519584 PMCID: PMC9063867 DOI: 10.1039/c8ra10365h] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/18/2018] [Accepted: 04/05/2019] [Indexed: 11/21/2022] Open
Abstract
Ag-loaded Cu0.25Zn0.75S (Ag/Cu0.25Zn0.75S) photocatalysts were synthesized for the photodegradation of organic pollutants such as rhodamine B (RhB), methyl violet (MV) and ciprofloxacin hydrochloride (CIP) under visible-light irradiation. Metallic Ag facilitated the enhancement of the photocatalytic activity of Cu0.25Zn0.75S nanodisks, and a Ag loading content of 11% exhibited great degradation efficiency for the degradation of RhB with the assistance of H2O2 under acidic conditions. This sample presented slight deactivation for the visible-light-driven degradation of RhB after five cycles. In addition, the excellent photocatalytic activity of Ag/Cu0.25Zn0.75S was obtained for the removal of MV and CIP. ·O2 - is mainly responsible for the efficient activity of the photocatalytic process.
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Affiliation(s)
- Jinyang Zhang
- College of Chemistry and Chemical Engineering, Neijiang Normal University Neijiang Sichuan 641100 China
| | - Fuyan Kang
- College of Chemistry and Chemical Engineering, Neijiang Normal University Neijiang Sichuan 641100 China
| | - Hao Peng
- College of Chemistry and Chemical Engineering, Yangtze Normal University Chongqing 408100 China +86 023 72792170 +86 0971 7762180 +86 023 72792170 +86 0971 7762180
| | - Jing Wen
- Key Laboratory of Comprehensive and Highly Efficient Utilization of Salt Lake Resources, Key Laboratory of Salt Lake Resources Chemistry of Qinghai Province, Qinghai Institute of Salt Lakes, Chinese Academy of Sciences Xining Qinghai 810008 China
| | - Xiaogang Zheng
- College of Chemistry and Chemical Engineering, Neijiang Normal University Neijiang Sichuan 641100 China
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8
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Pan H, Martindale KR, Heagy MD. Iron Oxide Nanostructures for the Reduction of Bicarbonate to Solar Fuels. Top Catal 2018. [DOI: 10.1007/s11244-018-0959-5] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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Kuehnel MF, Sahm CD, Neri G, Lee JR, Orchard KL, Cowan AJ, Reisner E. ZnSe quantum dots modified with a Ni(cyclam) catalyst for efficient visible-light driven CO 2 reduction in water. Chem Sci 2018; 9:2501-2509. [PMID: 29732127 PMCID: PMC5911736 DOI: 10.1039/c7sc04429a] [Citation(s) in RCA: 81] [Impact Index Per Article: 11.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/12/2017] [Accepted: 01/24/2018] [Indexed: 12/22/2022] Open
Abstract
A precious metal and Cd-free photocatalyst system for efficient CO2 reduction in water is reported. The hybrid assembly consists of ligand-free ZnSe quantum dots (QDs) as a visible-light photosensitiser combined with a phosphonic acid-functionalised Ni(cyclam) catalyst, NiCycP. This precious metal-free photocatalyst system shows a high activity for aqueous CO2 reduction to CO (Ni-based TONCO > 120), whereas an anchor-free catalyst, Ni(cyclam)Cl2, produced three times less CO. Additional ZnSe surface modification with 2-(dimethylamino)ethanethiol (MEDA) partially suppresses H2 generation and enhances the CO production allowing for a Ni-based TONCO of > 280 and more than 33% selectivity for CO2 reduction over H2 evolution, after 20 h visible light irradiation (λ > 400 nm, AM 1.5G, 1 sun). The external quantum efficiency of 3.4 ± 0.3% at 400 nm is comparable to state-of-the-art precious metal photocatalysts. Transient absorption spectroscopy showed that band-gap excitation of ZnSe QDs is followed by rapid hole scavenging and very fast electron trapping in ZnSe. The trapped electrons transfer to NiCycP on the ps timescale, explaining the high performance for photocatalytic CO2 reduction. With this work we introduce ZnSe QDs as an inexpensive and efficient visible light-absorber for solar fuel generation.
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Affiliation(s)
- Moritz F Kuehnel
- Christian Doppler Laboratory for Sustainable SynGas Chemistry , Department of Chemistry , University of Cambridge , Lensfield Road , Cambridge CB2 1EW , UK . ; http://www-reisner.ch.cam.ac.uk
| | - Constantin D Sahm
- Christian Doppler Laboratory for Sustainable SynGas Chemistry , Department of Chemistry , University of Cambridge , Lensfield Road , Cambridge CB2 1EW , UK . ; http://www-reisner.ch.cam.ac.uk
| | - Gaia Neri
- Stephenson Institute for Renewable Energy , Department of Chemistry , The University of Liverpool , Crown Street , Liverpool L69 7ZD , UK .
| | - Jonathan R Lee
- Stephenson Institute for Renewable Energy , Department of Chemistry , The University of Liverpool , Crown Street , Liverpool L69 7ZD , UK .
| | - Katherine L Orchard
- Christian Doppler Laboratory for Sustainable SynGas Chemistry , Department of Chemistry , University of Cambridge , Lensfield Road , Cambridge CB2 1EW , UK . ; http://www-reisner.ch.cam.ac.uk
| | - Alexander J Cowan
- Stephenson Institute for Renewable Energy , Department of Chemistry , The University of Liverpool , Crown Street , Liverpool L69 7ZD , UK .
| | - Erwin Reisner
- Christian Doppler Laboratory for Sustainable SynGas Chemistry , Department of Chemistry , University of Cambridge , Lensfield Road , Cambridge CB2 1EW , UK . ; http://www-reisner.ch.cam.ac.uk
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Xiong G, Wang Y, Sun Y, You L, Ren B, Xu Z, He Y, Ruhlmann L, Ding F. Sphalerite Cu/ZnS Nanoparticles Derived from Cu/Zn‐ZIF‐8 for the Photocatalytic Degradation and Adsorption of Dyes. Eur J Inorg Chem 2018. [DOI: 10.1002/ejic.201701312] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
- Gang Xiong
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
| | - Yanan Wang
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
| | - Yaguang Sun
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
| | - Lixin You
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
| | - Baoyi Ren
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
| | - Zhenhe Xu
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
| | - Yongke He
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
| | - Laurent Ruhlmann
- Laboratoire d'Electrochimie et de Chimie Physique du Corps Solide Institut de Chimie Université de Strasbourg 4 rue Blaise Pascal CS 90032 67081 Strasbourg Cedex France
| | - Fu Ding
- The Key Laboratory of Inorganic Molecule‐Based Chemistry of Liaoning Province Shenyang University of Chemical Technology 110142 Shenyang China
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Feng C, Meng X, Song X, Feng X, Zhao Y, Liu G. Controllable synthesis of hierarchical CuS/ZnS hetero-nanowires as high-performance visible-light photocatalysts. RSC Adv 2016. [DOI: 10.1039/c6ra20306j] [Citation(s) in RCA: 27] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
Novel CuS/ZnS hetero-nanowires were synthesized through a template-free chemical solution method. The improved photocatalytic activities are attributed to the p–n heterojunctions, one-dimensional nanostructure and large specific surface area.
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Affiliation(s)
- Caihong Feng
- School of Chemical Engineering and The Environmental
- Beijing Institute of Technology
- Beijing 100081
- China
- Lawrence Berkeley National Laboratory
| | - Xianpu Meng
- School of Chemical Engineering and The Environmental
- Beijing Institute of Technology
- Beijing 100081
- China
| | - Xiaolu Song
- Fengcheng Field Operation District
- Xinjiang Oilfield Company
- PetroChina
- China
| | - Xueting Feng
- School of Chemical Engineering and The Environmental
- Beijing Institute of Technology
- Beijing 100081
- China
| | - Yun Zhao
- School of Chemical Engineering and The Environmental
- Beijing Institute of Technology
- Beijing 100081
- China
| | - Gao Liu
- Lawrence Berkeley National Laboratory
- Berkeley
- USA
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Li Y, Wang R, Xu Y, Zhou J, Liu Z, Yan X, Ma L. Structural characterizations and up-conversion emission in Yb3+/Tm3+ co-doped ZnO nanocrystals by tri-doping with Ga3+ ions. RSC Adv 2016. [DOI: 10.1039/c6ra21358h] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
Doping Ga3+ ion are favored to enhance the UC luminescence intensity in Yb3+/Tm3+ co-doped ZnO nanocrystals.
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Affiliation(s)
- Yuemei Li
- Department of School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- China
| | - Rui Wang
- Department of School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- China
| | - Yanling Xu
- Department of School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- China
| | - Jianjun Zhou
- Department of School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- China
| | - Zhihua Liu
- Department of School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- China
| | - Xiaojing Yan
- Department of School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- China
| | - Li Ma
- Department of School of Chemistry and Chemical Engineering
- Harbin Institute of Technology
- China
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