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Wang R, Hao R, Li D, Huang L, Jiang R, Zhang X, Yang X, Wang L, Wang S, Kivshar Y, Chang C. Multifunctional Terahertz Biodetection Enabled by Resonant Metasurfaces. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2025; 37:e2418147. [PMID: 40059582 DOI: 10.1002/adma.202418147] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/21/2024] [Revised: 02/04/2025] [Indexed: 04/24/2025]
Abstract
Testing diverse biomolecules and observing their dynamic interaction in complex biological systems in a label-free manner is critically important for terahertz (THz) absorption spectroscopy. However, traditionally employed micro/nanophotonic techniques suffer from a narrow operating resonance and strong absorption band interference from polar solutions preventing seriously reliable, on-demand biosensor integration. Here, a multifunctional THz plasmonic biosensing platform by leveraging multiple interfering resonances from quasi-bound states in the continuum designed to noninvasively and in situ track the temporal evolution of molecules in multiple analyte systems, is proposed. In contrast to conventional microphotonic sensors, this platform demonstrates substantially broadband performance and reduced footprints, allowing for simultaneous detection of diverse molecular vibrant at multiple spectral points through robust near-field interactions. Furthermore, this sensor enables real-time analysis of amino acid absorption as water evaporates despite its strong overlapping absorption bands in the THz range. By utilizing the real-time format of the reflectance method to acquire a comprehensive spectro-temporal data collection, this approach supports developing a deep neural network to discriminate and predict the composition and proportion of multiple mixtures, obviating the need for frequency scanning or microfluidic devices. This approach offers innovative viewpoints for exploring biological processes and provides valuable tools for biological analysis.
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Affiliation(s)
- Ride Wang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, P. R. China
| | - Ruan Hao
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, P. R. China
| | - Dongxiao Li
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D Center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
| | - Lujun Huang
- The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai, 200241, P. R. China
| | - Rundong Jiang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, P. R. China
| | - Xiaobao Zhang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, P. R. China
| | - Xiao Yang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, P. R. China
| | - Lei Wang
- The Center for Terahertz Waves, School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin, 300072, China
| | - Shuming Wang
- National Laboratory of Solid-State Microstructures, School of Physics, Nanjing University, Nanjing, 210093, China
| | - Yuri Kivshar
- Nonlinear Physics Center, Research School of Physics, Australian National University, Canberra, ACT 2601, Australia
| | - Chao Chang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, P. R. China
- School of Physics, Peking University, Beijing, 100871, P. R. China
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2
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Li D, Zhou H, Ren Z, Xu C, Lee C. Tailoring Light-Matter Interactions in Overcoupled Resonator for Biomolecule Recognition and Detection. NANO-MICRO LETTERS 2024; 17:10. [PMID: 39325238 PMCID: PMC11427657 DOI: 10.1007/s40820-024-01520-3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/21/2024] [Accepted: 08/26/2024] [Indexed: 09/27/2024]
Abstract
Plasmonic nanoantennas provide unique opportunities for precise control of light-matter coupling in surface-enhanced infrared absorption (SEIRA) spectroscopy, but most of the resonant systems realized so far suffer from the obstacles of low sensitivity, narrow bandwidth, and asymmetric Fano resonance perturbations. Here, we demonstrated an overcoupled resonator with a high plasmon-molecule coupling coefficient (μ) (OC-Hμ resonator) by precisely controlling the radiation loss channel, the resonator-oscillator coupling channel, and the frequency detuning channel. We observed a strong dependence of the sensing performance on the coupling state, and demonstrated that OC-Hμ resonator has excellent sensing properties of ultra-sensitive (7.25% nm-1), ultra-broadband (3-10 μm), and immune asymmetric Fano lineshapes. These characteristics represent a breakthrough in SEIRA technology and lay the foundation for specific recognition of biomolecules, trace detection, and protein secondary structure analysis using a single array (array size is 100 × 100 µm2). In addition, with the assistance of machine learning, mixture classification, concentration prediction and spectral reconstruction were achieved with the highest accuracy of 100%. Finally, we demonstrated the potential of OC-Hμ resonator for SARS-CoV-2 detection. These findings will promote the wider application of SEIRA technology, while providing new ideas for other enhanced spectroscopy technologies, quantum photonics and studying light-matter interactions.
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Affiliation(s)
- Dongxiao Li
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Hong Zhou
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Cheng Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore.
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore.
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3
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Richter FU, Sinev I, Zhou S, Leitis A, Oh SH, Tseng ML, Kivshar Y, Altug H. Gradient High-Q Dielectric Metasurfaces for Broadband Sensing and Control of Vibrational Light-Matter Coupling. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2314279. [PMID: 38511549 DOI: 10.1002/adma.202314279] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/28/2023] [Revised: 03/13/2024] [Indexed: 03/22/2024]
Abstract
Surface-enhanced infrared absorption spectroscopy (SEIRA) has emerged as a powerful technique for ultrasensitive chemical-specific analysis. SEIRA can be realized by employing metasurfaces that can enhance light-matter interactions in the spectral bands of molecular vibrations. Increasing sample complexity emphasizes the need for metasurfaces that can operate simultaneously at different spectral bands, both accessing rich spectral information over a broad band, and resolving subtle differences in the absorption fingerprints through narrow-band resonances. Here, a novel concept of resonance-gradient metasurfaces is introduced, where the required spectral selectivity is achieved via local high-quality-factor (high-Q) resonances, while the continuous coverage of a broad band is enabled by the gradual adjustment of the unit-cell dimensions along the planar structure. The highly tailorable design of the gradient metasurfaces provides flexibility for shaping the spectral sampling density to match the relevant bands of target analytes while keeping a compact device footprint. The versatility of the gradient metasurfaces is demonstrated through several sensing scenarios, including polymer mixture deconvolution, detecting a multistep bioassay, and identification of the onset of vibrational strong coupling regime. The proposed gradient-resonance platform significantly contributes to the rapidly evolving landscape of nonlocal metasurfaces, enabling applications in molecular detection and analysis of fundamental light-matter interaction phenomena.
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Affiliation(s)
- Felix Ulrich Richter
- Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015, Switzerland
| | - Ivan Sinev
- Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015, Switzerland
| | - Senlu Zhou
- Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015, Switzerland
| | - Aleksandrs Leitis
- Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015, Switzerland
| | - Sang-Hyun Oh
- Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, 55455, USA
| | - Ming Lun Tseng
- Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 300, Taiwan
| | - Yuri Kivshar
- Nonlinear Physics Center, Research School of Physics, Australian National University, Canberra, ACT 2601, Australia
| | - Hatice Altug
- Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015, Switzerland
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4
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Chen Z, Li D, Zhou H, Liu T, Mu X. A hybrid graphene metamaterial absorber for enhanced modulation and molecular fingerprint retrieval. NANOSCALE 2023; 15:14100-14108. [PMID: 37581407 DOI: 10.1039/d3nr02830e] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/16/2023]
Abstract
Surface-enhanced infrared absorption (SEIRA) has proven its ability to improve the detection performance of traditional infrared spectroscopy at unprecedented levels. However, the resonant frequency of the metamaterial absorber (MA) lacks tunability once the structure is fabricated, which poses a challenge for broadband fingerprint retrieval of molecules. Here, we propose a pixelated and electric tunable hybrid graphene MA with a broadband response for molecular fingerprint retrieval. Loss engineering is employed to optimize the sensing sensitivity of MA. The resonant frequency of MA is approximately linearly modulated with a change in the graphene Fermi level. This design allows a meta-pixel to match multiple characteristic absorption spectra, thereby establishing a one-to-many mapping relationship between spatial and spectral information. The one-to-many mapping relationship greatly reduces the number of meta-pixels. As a concept demonstration, we integrate 9 meta-pixels to achieve full spectral coverage from 1000 cm-1 to 2000 cm-1. Based on the broadband spectral properties of the sensor, we demonstrate its potential for multi-fingerprint detection, quantitative detection, chemical identification, and compositional analysis. Our proposed hybrid graphene MA can be easily integrated with other on-chip devices, providing a potential platform for optical sensing, infrared spectroscopy, and photodetection.
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Affiliation(s)
- Ziwei Chen
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
| | - Dongxiao Li
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
| | - Hong Zhou
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
| | - Tao Liu
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
| | - Xiaojing Mu
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
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5
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Li D, Xu C, Xie J, Lee C. Research Progress in Surface-Enhanced Infrared Absorption Spectroscopy: From Performance Optimization, Sensing Applications, to System Integration. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:2377. [PMID: 37630962 PMCID: PMC10458771 DOI: 10.3390/nano13162377] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/20/2023] [Revised: 08/13/2023] [Accepted: 08/17/2023] [Indexed: 08/27/2023]
Abstract
Infrared absorption spectroscopy is an effective tool for the detection and identification of molecules. However, its application is limited by the low infrared absorption cross-section of the molecule, resulting in low sensitivity and a poor signal-to-noise ratio. Surface-Enhanced Infrared Absorption (SEIRA) spectroscopy is a breakthrough technique that exploits the field-enhancing properties of periodic nanostructures to amplify the vibrational signals of trace molecules. The fascinating properties of SEIRA technology have aroused great interest, driving diverse sensing applications. In this review, we first discuss three ways for SEIRA performance optimization, including material selection, sensitivity enhancement, and bandwidth improvement. Subsequently, we discuss the potential applications of SEIRA technology in fields such as biomedicine and environmental monitoring. In recent years, we have ushered in a new era characterized by the Internet of Things, sensor networks, and wearable devices. These new demands spurred the pursuit of miniaturized and consolidated infrared spectroscopy systems and chips. In addition, the rise of machine learning has injected new vitality into SEIRA, bringing smart device design and data analysis to the foreground. The final section of this review explores the anticipated trajectory that SEIRA technology might take, highlighting future trends and possibilities.
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Affiliation(s)
- Dongxiao Li
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Cheng Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Junsheng Xie
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
- NUS Suzhou Research Institute (NUSRI), Suzhou 215123, China
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6
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Paggi L, Fabas A, El Ouazzani H, Hugonin JP, Fayard N, Bardou N, Dupuis C, Greffet JJ, Bouchon P. Over-coupled resonator for broadband surface enhanced infrared absorption (SEIRA). Nat Commun 2023; 14:4814. [PMID: 37558692 PMCID: PMC10412556 DOI: 10.1038/s41467-023-40511-7] [Citation(s) in RCA: 11] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/07/2022] [Accepted: 07/31/2023] [Indexed: 08/11/2023] Open
Abstract
Detection of molecules is a key issue for many applications. Surface enhanced infrared absorption (SEIRA) uses arrays of resonant nanoantennas with good quality factors which can be used to locally enhance the illumination of molecules. The technique has proved to be an effective tool to detect small amount of material. However, nanoresonators can detect molecules on a narrow bandwidth so that a set of resonators is necessary to identify a molecule fingerprint. Here, we introduce an alternative paradigm and use low quality factor resonators with large radiative losses (over-coupled resonators). The bandwidth enables to detect all absorption lines between 5 and 10 μm, reproducing the molecular absorption spectrum. Counterintuitively, despite a lower quality factor, the system sensitivity is improved and we report a reflectivity variation as large as one percent per nanometer of molecular layer of PMMA. This paves the way to specific identification of molecules. We illustrate the potential of the technique with the detection of the explosive precursor 2,4-dinitrotoluene (DNT). There is a fair agreement with electromagnetic simulations and we also introduce an analytic model of the SEIRA signal obtained in the over-coupling regime.
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Affiliation(s)
- Laura Paggi
- DOTA, ONERA, Université Paris-Saclay, Palaiseau, France
| | - Alice Fabas
- DOTA, ONERA, Université Paris-Saclay, Palaiseau, France
| | | | - Jean-Paul Hugonin
- Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS, Université Paris-Saclay, Palaiseau, France
| | - Nikos Fayard
- Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS, Université Paris-Saclay, Palaiseau, France
| | - Nathalie Bardou
- Centre de Nanosciences et de Nanotechnologies (C2N), CNRS, Université Paris-Saclay, Palaiseau, France
| | - Christophe Dupuis
- Centre de Nanosciences et de Nanotechnologies (C2N), CNRS, Université Paris-Saclay, Palaiseau, France
| | - Jean-Jacques Greffet
- Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS, Université Paris-Saclay, Palaiseau, France
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7
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Li D, Zhou H, Chen Z, Ren Z, Xu C, He X, Liu T, Chen X, Huang H, Lee C, Mu X. Ultrasensitive Molecular Fingerprint Retrieval Using Strongly Detuned Overcoupled Plasmonic Nanoantennas. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2301787. [PMID: 37204145 DOI: 10.1002/adma.202301787] [Citation(s) in RCA: 12] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/24/2023] [Revised: 04/26/2023] [Indexed: 05/20/2023]
Abstract
Tailoring light-matter interactions via plasmonic nanoantennas (PNAs) has emerged as a breakthrough technology for spectroscopic applications. The detuning between molecular vibrations and plasmonic resonances, as a fundamental and inevitable optical phenomenon in light-matter interactions, reduces the interaction efficiency, resulting in a weak molecule sensing signal at the strong detuning state. Here, it is demonstrated that the low interaction efficiency from detuning can be tackled by overcoupled PNAs (OC-PNAs) with a high ratio of the radiative to intrinsic loss rates, which can be used for ultrasensitive spectroscopy at strong plasmonic-molecular detuning. In OC-PNAs, the ultrasensitive molecule signals are achieved within a wavelength detuning range of 248 cm-1 , which is 173 cm-1 wider than previous works. Meanwhile, the OC-PNAs are immune to the distortion of molecular signals and maintain a lineshape consistent with the molecular signature fingerprint. This strategy allows a single device to enhance and capture the full and complex fingerprint vibrations in the mid-infrared range. In the proof-of-concept demonstration, 13 kinds of molecules with some vibration fingerprints strongly detuning by the OC-PNAs are identified with 100% accuracy with the assistance of machine-learning algorithms. This work gains new insights into detuning-state nanophotonics for potential applications including spectroscopy and sensors.
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Affiliation(s)
- Dongxiao Li
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Hong Zhou
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Ziwei Chen
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Cheng Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Xianming He
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
| | - Tao Liu
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
| | - Xin Chen
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
| | - He Huang
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Xiaojing Mu
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, International R & D center of Micro-nano Systems and New Materials Technology, Chongqing University, Chongqing, 400044, China
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8
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Liang Z, Zhou X, Zhang L, Yu XL, Lv Y, Song X, Zhou Y, Wang H, Wang S, Wang T, Shum PP, He Q, Liu Y, Zhu C, Wang L, Chen X. Strong bulk photovoltaic effect in engineered edge-embedded van der Waals structures. Nat Commun 2023; 14:4230. [PMID: 37454221 DOI: 10.1038/s41467-023-39995-0] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/16/2023] [Accepted: 07/07/2023] [Indexed: 07/18/2023] Open
Abstract
Bulk photovoltaic effect (BPVE), a second-order nonlinear optical effect governed by the quantum geometric properties of materials, offers a promising approach to overcome the Shockley-Quiesser limit of traditional photovoltaic effect and further improve the efficiency of energy harvesting. Here, we propose an effective platform, the nano edges embedded in assembled van der Waals (vdW) homo- or hetero-structures with strong symmetry breaking, low dimensionality and abundant species, for BPVE investigations. The BPVE-induced photocurrents strongly depend on the orientation of edge-embedded structures and polarization of incident light. Reversed photocurrent polarity can be observed at left and right edge-embedded structures. Our work not only visualizes the unique optoelectronic effect in vdW nano edges, but also provides an effective strategy for achieving BPVE in engineered vdW structures.
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Affiliation(s)
- Zihan Liang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China
| | - Xin Zhou
- Department of Materials Science and Engineering, National University of Singapore, Singapore, Singapore
| | - Le Zhang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China
| | - Xiang-Long Yu
- Shenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen, China.
- International Quantum Academy, Shenzhen, China.
| | - Yan Lv
- School of Flexible Electronics (Future Technologies) & Institute of Advanced Materials (IAM), Key Laboratory of Flexible Electronics (KLOFE), Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM), Nanjing Tech University (NanjingTech), Nanjing, China
| | - Xuefen Song
- School of Flexible Electronics (Future Technologies) & Institute of Advanced Materials (IAM), Key Laboratory of Flexible Electronics (KLOFE), Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM), Nanjing Tech University (NanjingTech), Nanjing, China
| | - Yongheng Zhou
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China
| | - Han Wang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China
| | - Shuo Wang
- School of Flexible Electronics (Future Technologies) & Institute of Advanced Materials (IAM), Key Laboratory of Flexible Electronics (KLOFE), Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM), Nanjing Tech University (NanjingTech), Nanjing, China
| | - Taihong Wang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China
| | - Perry Ping Shum
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China
| | - Qian He
- Department of Materials Science and Engineering, National University of Singapore, Singapore, Singapore
| | - Yanjun Liu
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China
| | - Chao Zhu
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Collaborative Innovation Center for Micro/Nano Fabrication, Device and System, Southeast University, Nanjing, China
| | - Lin Wang
- School of Flexible Electronics (Future Technologies) & Institute of Advanced Materials (IAM), Key Laboratory of Flexible Electronics (KLOFE), Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM), Nanjing Tech University (NanjingTech), Nanjing, China.
| | - Xiaolong Chen
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, China.
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9
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Damasceno GHB, Carvalho WOF, Cerqueira Sodré A, Oliveira ON, Mejía-Salazar JR. Magnetoplasmonic Nanoantennas for On-Chip Reconfigurable Optical Wireless Communications. ACS APPLIED MATERIALS & INTERFACES 2023; 15:8617-8623. [PMID: 36689678 DOI: 10.1021/acsami.2c19376] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
On-chip wireless communications require optical nanoantennas with dynamically tunable radiation patterns, which may allow for higher integration with multiple nanoantennas instead of two fixed nanoantennas in existing approaches. In this paper, we introduce a concept to enable active manipulation of radiated beam steering using applied magnetic fields. The proposed system consists of a highly directive Yagi-Uda-like arrangement of magnetoplasmonic nanoribs made of Co6Ag94 and immersed in SiO2. Numerical demonstration of the tilting of the radiated beam from the nanoantenna on its plane is provided with full-wave electromagnetic simulations using the finite element method. The tilt direction of the radiated beam can be changed by reversing the magnetization direction, while the conventional plasmonic nanoantenna pattern is recovered by demagnetizing the system. The geometry of the nanoantenna can be tailored to work at optical or infrared wavelengths, but a proof of concept for λ = 700 nm is conducted for taking advantage of the high magneto-optical activity of Co6Ag94. The design was based on experimental data for materials that can be fabricated via nanolithography, thus permitting magnetically on-chip reconfigurable optical wireless communications.
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Affiliation(s)
- Gabriel H B Damasceno
- National Institute of Telecommunications (Inatel), Santa Rita do Sapucaí37540-000, MG, Brazil
| | - William O F Carvalho
- National Institute of Telecommunications (Inatel), Santa Rita do Sapucaí37540-000, MG, Brazil
| | - Arismar Cerqueira Sodré
- National Institute of Telecommunications (Inatel), Santa Rita do Sapucaí37540-000, MG, Brazil
| | - Osvaldo N Oliveira
- Sao Carlos Institute of Physics, University of Sao Paulo, CP 369, Sao Carlos13560-970, SP, Brazil
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10
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Zhou H, Xu L, Ren Z, Zhu J, Lee C. Machine learning-augmented surface-enhanced spectroscopy toward next-generation molecular diagnostics. NANOSCALE ADVANCES 2023; 5:538-570. [PMID: 36756499 PMCID: PMC9890940 DOI: 10.1039/d2na00608a] [Citation(s) in RCA: 37] [Impact Index Per Article: 18.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/07/2022] [Accepted: 11/06/2022] [Indexed: 06/17/2023]
Abstract
The world today is witnessing the significant role and huge demand for molecular detection and screening in healthcare and medical diagnosis, especially during the outbreak of COVID-19. Surface-enhanced spectroscopy techniques, including Surface-Enhanced Raman Scattering (SERS) and Infrared Absorption (SEIRA), provide lattice and molecular vibrational fingerprint information which is directly linked to the molecular constituents, chemical bonds, and configuration. These properties make them an unambiguous, nondestructive, and label-free toolkit for molecular diagnostics and screening. However, new issues in molecular diagnostics, such as increasing molecular species, faster spread of viruses, and higher requirements for detection accuracy and sensitivity, have brought great challenges to detection technology. Advancements in artificial intelligence and machine learning (ML) techniques show promising potential in empowering SERS and SEIRA with rapid analysis and automatic data processing to jointly tackle the challenge. This review introduces the combination of ML and SERS/SEIRA by investigating how ML algorithms can be beneficial to SERS/SEIRA, discussing the general process of combining ML and SEIRA/SERS, highlighting the molecular diagnostics and screening applications based on ML-combined SEIRA/SERS, and providing perspectives on the future development of ML-integrated SEIRA/SERS. In general, this review offers comprehensive knowledge about the recent advances and the future outlook regarding ML-integrated SEIRA/SERS for molecular diagnostics and screening.
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Affiliation(s)
- Hong Zhou
- Department of Electrical and Computer Engineering, National University of Singapore Singapore 117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore Singapore 117608
| | - Liangge Xu
- Department of Electrical and Computer Engineering, National University of Singapore Singapore 117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore Singapore 117608
- National Key Laboratory of Special Environment Composite Technology, Harbin Institute of Technology Harbin 150001 China
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore Singapore 117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore Singapore 117608
| | - Jiaqi Zhu
- National Key Laboratory of Special Environment Composite Technology, Harbin Institute of Technology Harbin 150001 China
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore Singapore 117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore Singapore 117608
- NUS Suzhou Research Institute (NUSRI) Suzhou 215123 China
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11
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Munim NM, Treena TT, Islam MR, Nishat MM. Design and analysis of an ultra-high sensitive and tunable metal-insulator-metal waveguide-coupled octagonal ring resonator utilizing gold nanorods. SENSING AND BIO-SENSING RESEARCH 2022. [DOI: 10.1016/j.sbsr.2022.100529] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Submit a Manuscript] [Subscribe] [Scholar Register] [Indexed: 10/14/2022] Open
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12
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Zhou H, Ren Z, Xu C, Xu L, Lee C. MOF/Polymer-Integrated Multi-Hotspot Mid-Infrared Nanoantennas for Sensitive Detection of CO 2 Gas. NANO-MICRO LETTERS 2022; 14:207. [PMID: 36271989 PMCID: PMC9588146 DOI: 10.1007/s40820-022-00950-1] [Citation(s) in RCA: 13] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/17/2022] [Accepted: 09/09/2022] [Indexed: 05/20/2023]
Abstract
Metal-organic frameworks (MOFs) have been extensively used for gas sorption, storage and separation owing to ultrahigh porosity, exceptional thermal stability, and wide structural diversity. However, when it comes to ultra-low concentration gas detection, technical bottlenecks of MOFs appear due to the poor adsorption capacity at ppm-/ppb-level concentration and the limited sensitivity for signal transduction. Here, we present hybrid MOF-polymer physi-chemisorption mechanisms integrated with infrared (IR) nanoantennas for highly selective and ultrasensitive CO2 detection. To improve the adsorption capacity for trace amounts of gas molecules, MOFs are decorated with amino groups to introduce the chemisorption while maintaining the structural integrity for physisorption. Additionally, leveraging all major optimization methods, a multi-hotspot strategy is proposed to improve the sensitivity of nanoantennas by enhancing the near field and engineering the radiative and absorptive loss. As a benefit, we demonstrate the competitive advantages of our strategy against the state-of-the-art miniaturized IR CO2 sensors, including low detection limit, high sensitivity (0.18%/ppm), excellent reversibility (variation within 2%), and high selectivity (against C2H5OH, CH3OH, N2). This work provides valuable insights into the integration of advanced porous materials and nanophotonic devices, which can be further adopted in ultra-low concentration gas monitoring in industry and environmental applications.
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Affiliation(s)
- Hong Zhou
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Cheng Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Liangge Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore.
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore.
- NUS Suzhou Research Institute (NUSRI), Suzhou, 215123, People's Republic of China.
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13
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Sun L, Xu L, Wang J, Jiao Y, Ma Z, Ma Z, Chang C, Yang X, Wang R. A pixelated frequency-agile metasurface for broadband terahertz molecular fingerprint sensing. NANOSCALE 2022; 14:9681-9685. [PMID: 35723251 DOI: 10.1039/d2nr01561g] [Citation(s) in RCA: 12] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Terahertz (THz) plasmonic resonance based on an arbitrarily designed resonance metasurface is the key technique of choice for enhancing fingerprint absorption spectroscopy identification of biomolecules. Here, we report a broadband THz micro-photonics sensor based on a pixelated frequency-agile metasurface and illustrate its application ability to enhance and differentiate the detection of broadband absorption fingerprint spectra. The design uses symmetrical metal C-shape resonators with the functional graphene micro-ribbons selectively patterned into the gaps. A strong electric resonance with a high quality factor was formed, consisting of an electric dipole mode associated with the excitation of a dark toroidal dipole (TD) mode through the coupling from the electric dipole moment of the individual frequency-agile meta-unit. The resonance positions are nearly linearly modulated with the varying Fermi level of graphene. The configuration arranges a certain metapixel of the metasurface to multiple response spectra assembling a one-to-many mapping between spatial and spectral information which is instrumental in greatly shrinking the actual size of the sensor. By the synchronous regulation of graphene and C-shape rings, we have obtained highly surface-sensitive resonances over a wide spectral range (∼1.5 THz) with a spectral resolution less than 20 GHz. The target multiple enhanced absorption spectrum of glucose molecules is read out in a broadband region with high sensitivity. More importantly, the design can be extended to cover a larger spectral region by altering the range of geometrical parameters. Our microphotonic technique can resolve absorption fingerprints without the need for spectrometry and frequency scanning, thereby providing an approach for highly sensitive and versatile miniaturized THz spectroscopy devices.
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Affiliation(s)
- Lang Sun
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, China.
| | - Lei Xu
- Advanced Optics and Photonics Laboratory, Department of Engineering, School of Science and Technology, Nottingham Trent University, Nottingham NG11 8NS, UK
| | - Jiayi Wang
- Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics, Nankai University, Tianjin 300457, China
| | - Yanan Jiao
- Department of General Surgery, First Medical Center of Chinese PLA General Hospital, Beijing 100853, People's Republic of China
| | - Zenghong Ma
- The Science and Technology Development Fund of Tianjin Education Commission for Higher Education, China
| | - Zhaofu Ma
- Department of General Surgery, First Medical Center of Chinese PLA General Hospital, Beijing 100853, People's Republic of China
| | - Chao Chang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, China.
- School of Physics, Peking University, Beijing, 100871, China
| | - Xiao Yang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, China.
| | - Ride Wang
- Innovation Laboratory of Terahertz Biophysics, National Innovation Institute of Defense Technology, Beijing, 100071, China.
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14
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Ren Z, Zhang Z, Wei J, Dong B, Lee C. Wavelength-multiplexed hook nanoantennas for machine learning enabled mid-infrared spectroscopy. Nat Commun 2022; 13:3859. [PMID: 35790752 PMCID: PMC9256719 DOI: 10.1038/s41467-022-31520-z] [Citation(s) in RCA: 33] [Impact Index Per Article: 11.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/22/2021] [Accepted: 06/03/2022] [Indexed: 12/19/2022] Open
Abstract
Infrared (IR) plasmonic nanoantennas (PNAs) are powerful tools to identify molecules by the IR fingerprint absorption from plasmon-molecules interaction. However, the sensitivity and bandwidth of PNAs are limited by the small overlap between molecules and sensing hotspots and the sharp plasmonic resonance peaks. In addition to intuitive methods like enhancement of electric field of PNAs and enrichment of molecules on PNAs surfaces, we propose a loss engineering method to optimize damping rate by reducing radiative loss using hook nanoantennas (HNAs). Furthermore, with the spectral multiplexing of the HNAs from gradient dimension, the wavelength-multiplexed HNAs (WMHNAs) serve as ultrasensitive vibrational probes in a continuous ultra-broadband region (wavelengths from 6 μm to 9 μm). Leveraging the multi-dimensional features captured by WMHNA, we develop a machine learning method to extract complementary physical and chemical information from molecules. The proof-of-concept demonstration of molecular recognition from mixed alcohols (methanol, ethanol, and isopropanol) shows 100% identification accuracy from the microfluidic integrated WMHNAs. Our work brings another degree of freedom to optimize PNAs towards small-volume, real-time, label-free molecular recognition from various species in low concentrations for chemical and biological diagnostics. Infrared spectroscopy with plasmonic nanoantennas is limited by small overlap between molecules and hot spots, and sharp resonance peaks. The authors demonstrate spectral multiplexing of hook nanoantennas with gradient dimensions as ultrasensitive vibrational probes in a continuous ultra-broadband region and utilize machine learning for enhanced sensing performance.
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15
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Tanaka T, Yano TA, Kato R. Nanostructure-enhanced infrared spectroscopy. NANOPHOTONICS (BERLIN, GERMANY) 2022; 11:2541-2561. [PMID: 39635668 PMCID: PMC11501225 DOI: 10.1515/nanoph-2021-0661] [Citation(s) in RCA: 15] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/01/2021] [Accepted: 11/22/2021] [Indexed: 12/07/2024]
Abstract
While infrared spectroscopy is a powerful technique that provides molecular information such as chemical constituents and chemical structures of analytes, it suffers from low absorption cross-section resulting in low sensitivity and poor signal-to-noise or signal-to-background ratios. Surface-enhanced infrared absorption (SEIRA) spectroscopy, which is supported by nanometer scale structures, is a promising technology to overcome these problems in conventional infrared (IR) spectroscopy and enhances IR signals using the field enhancement properties of surface plasmon resonance. Recently resonant SEIRA technique was proposed, and signal enhancement factor was significantly improved. In this review, we present an overview of the recent progresses on resonant SEIRA technologies including nanoantenna- and metamaterial-based SEIRA, and also SEIRA techniques with nanoimaging capabilities.
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Affiliation(s)
- Takuo Tanaka
- Metamaterials Laboratory, RIKEN Cluster for Pioneering Research, 2-1 Hirosawa, Wako, Saitama, 351-0198, Japan
- Innovative Photon Manipulation Research Team, RIKEN Center for Advanced Photonics,2-1 Hirosawa, Wako, Saitama, 351-0198, Japan
- Institute of Post-LED Photonics, Tokushima University, 2-1 Minami-Josanjima, Tokushima, 770-8560, Japan
| | - Taka-aki Yano
- Metamaterials Laboratory, RIKEN Cluster for Pioneering Research, 2-1 Hirosawa, Wako, Saitama, 351-0198, Japan
- Innovative Photon Manipulation Research Team, RIKEN Center for Advanced Photonics,2-1 Hirosawa, Wako, Saitama, 351-0198, Japan
- Institute of Post-LED Photonics, Tokushima University, 2-1 Minami-Josanjima, Tokushima, 770-8560, Japan
| | - Ryo Kato
- Metamaterials Laboratory, RIKEN Cluster for Pioneering Research, 2-1 Hirosawa, Wako, Saitama, 351-0198, Japan
- Innovative Photon Manipulation Research Team, RIKEN Center for Advanced Photonics,2-1 Hirosawa, Wako, Saitama, 351-0198, Japan
- Institute of Post-LED Photonics, Tokushima University, 2-1 Minami-Josanjima, Tokushima, 770-8560, Japan
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Abstract
Terahertz (THz) electromagnetic spectrum ranging from 0.1THz to 10THz has become critical for sixth generation (6G) applications, such as high-speed communication, fingerprint chemical sensing, non-destructive biosensing, and bioimaging. However, the limited response of naturally existing materials THz waves has induced a gap in the electromagnetic spectrum, where a lack of THz functional devices using natural materials has occurred in this gap. Metamaterials, artificially composed structures that can engineer the electromagnetic properties to manipulate the waves, have enabled the development of many THz devices, known as "metadevices". Besides, the tunability of THz metadevices can be achieved by tunable structures using microelectromechanical system (MEMS) technologies, as well as tunable materials including phase change materials (PCMs), electro-optical materials (EOMs), and thermo-optical materials (TOMs). Leveraging various tuning mechanisms together with metamaterials, tremendous research works have demonstrated reconfigurable functional THz devices, playing an important role to fill the THz gap toward the 6G applications. This review introduces reconfigurable metadevices from fundamental principles of metamaterial resonant system to the design mechanisms of functional THz metamaterial devices and their related applications. Moreover, we provide perspectives on the future development of THz photonic devices for state-of-the-art applications.
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17
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Rashid KS, Tathfif I, Yaseer AA, Hassan MF, Sagor RH. Cog-shaped refractive index sensor embedded with gold nanorods for temperature sensing of multiple analytes. OPTICS EXPRESS 2021; 29:37541-37554. [PMID: 34808824 DOI: 10.1364/oe.442954] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/09/2021] [Accepted: 10/21/2021] [Indexed: 06/13/2023]
Abstract
This article presents a refractive index (RI) nanosensor utilizing gold as the plasmonic material. The layout of the sensor includes metal-insulator-metal (MIM) waveguides coupled with a cog-shaped resonator studded with gold nanorods. At the mid-infrared (MIR) spectrum, the spectral characteristics of the sensor are numerically analyzed employing the finite element method (FEM). Moreover, the refractive index sensing property is thoroughly explored by varying the key parameters, establishing a linear correlation with the transmittance profile. After extensive simulations, the most optimum structure displays the highest sensitivity of 6227.6 nm/RIU. Furthermore, the capability of the proposed device as a temperature sensor is investigated with five different liquids (ethanol, polydimethylsiloxane, toluene, chloroform, and the mixture of toluene and chloroform); among these, chloroform exhibits maximum temperature sensitivity of 6.66 nm/°C. Due to being chemically stable and demonstrating satisfactory performance in RI and temperature sensing, the suggested schematic can be a suitable replacement for silver-based sensors.
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18
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Qiao Q, Sun H, Liu X, Dong B, Xia J, Lee C, Zhou G. Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared. MICROMACHINES 2021; 12:mi12111311. [PMID: 34832723 PMCID: PMC8623870 DOI: 10.3390/mi12111311] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/07/2021] [Revised: 10/23/2021] [Accepted: 10/25/2021] [Indexed: 12/02/2022]
Abstract
Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 μm wavelength range) MEMS reconfiguration approach using the suspended silicon waveguide platform on the silicon-on-insulator. With the sub-wavelength grating claddings, the photonic waveguide can be well integrated with the MEMS actuator, thus offering low-loss, energy-efficient, and effective reconfiguration. We present a simulation study on the waveguide design and depict the MEMS-integration approach. Moreover, we experimentally report the suspended waveguide with propagation loss (−2.9 dB/cm) and bending loss (−0.076 dB each). The suspended waveguide coupler is experimentally investigated. In addition, we validate the proposed optical MEMS approach using a reconfigurable ring resonator design. In conclusion, we experimentally demonstrate the proposed waveguide platform’s capability for MIR MEMS-reconfigurable photonics, which empowers the MIR on-chip optical systems for various applications.
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Affiliation(s)
- Qifeng Qiao
- Department of Mechanical Engineering, National University of Singapore, Singapore 117579, Singapore; (Q.Q.); (H.S.); (X.L.); (J.X.)
| | - Haoyang Sun
- Department of Mechanical Engineering, National University of Singapore, Singapore 117579, Singapore; (Q.Q.); (H.S.); (X.L.); (J.X.)
| | - Xinmiao Liu
- Department of Mechanical Engineering, National University of Singapore, Singapore 117579, Singapore; (Q.Q.); (H.S.); (X.L.); (J.X.)
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore;
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Bowei Dong
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore;
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Ji Xia
- Department of Mechanical Engineering, National University of Singapore, Singapore 117579, Singapore; (Q.Q.); (H.S.); (X.L.); (J.X.)
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore;
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
- Correspondence: (C.L.); (G.Z.); Tel.: +65-6516-1235 (G.Z.)
| | - Guangya Zhou
- Department of Mechanical Engineering, National University of Singapore, Singapore 117579, Singapore; (Q.Q.); (H.S.); (X.L.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
- Correspondence: (C.L.); (G.Z.); Tel.: +65-6516-1235 (G.Z.)
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19
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Li D, Zhou H, Hui X, He X, Huang H, Zhang J, Mu X, Lee C, Yang Y. Multifunctional Chemical Sensing Platform Based on Dual-Resonant Infrared Plasmonic Perfect Absorber for On-Chip Detection of Poly(ethyl cyanoacrylate). ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2021; 8:e2101879. [PMID: 34423591 PMCID: PMC8529490 DOI: 10.1002/advs.202101879] [Citation(s) in RCA: 18] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/06/2021] [Revised: 06/29/2021] [Indexed: 05/05/2023]
Abstract
Multifunctional chemical sensing is highly desirable in industry, agriculture, and environmental sciences, but remains challenging due to the diversity of chemical substances and reactions. Surface-enhanced infrared absorption (SEIRA) spectroscopy can potentially address the above problems by ultra-sensitive detection of molecular fingerprint vibrations. Here, a multifunctional chemical sensing platform based on dual-resonant SEIRA device for sensitive and multifunctional on-chip detection of poly(ethyl cyanoacrylate) (PECA) is reported. It is experimentally demonstrated that the SEIRA sensing platform achieves multiple functions required by the PECA glue industry, including vibrational detection, thickness measurement, and in situ observation of polymerization and curing, which are usually realized by separately using a spectrometer, a viscometer, and an ellipsometer in the past. Specifically, the all-in-one sensor offers a dual-band fingerprint vibration identification, sub-nm level detection limit, and ultrahigh sensitivity of 0.76%/nm in thickness measurement, and second-level resolution in real-time observation of polymerization and curing. This work not only provides a valuable toolkit for ultra-sensitive and multifunctional on-chip detection of PECA, but also gives new insights into the SEIRA technology for multi-band, multi-functional, and on-chip chemical sensing.
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Affiliation(s)
- Dongxiao Li
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing100083P. R. China
| | - Hong Zhou
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
- Department of Electrical and Computer EngineeringCenter for Intelligent Sensors and MEMS (CISM)and NUS Graduate School for Integrative Sciences and EngineeringNational University of SingaporeSingapore117576Singapore
| | - Xindan Hui
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Xianming He
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - He Huang
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Jiajia Zhang
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Xiaojing Mu
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Chengkuo Lee
- Department of Electrical and Computer EngineeringCenter for Intelligent Sensors and MEMS (CISM)and NUS Graduate School for Integrative Sciences and EngineeringNational University of SingaporeSingapore117576Singapore
| | - Ya Yang
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing100083P. R. China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049P. R. China
- Center on Nanoenergy ResearchSchool of Physical Science and TechnologyGuangxi UniversityNanning530004P. R. China
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20
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Ren Z, Xu J, Le X, Lee C. Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G. MICROMACHINES 2021; 12:946. [PMID: 34442568 PMCID: PMC8398582 DOI: 10.3390/mi12080946] [Citation(s) in RCA: 14] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/29/2021] [Revised: 07/29/2021] [Accepted: 07/29/2021] [Indexed: 12/16/2022]
Abstract
Wafer bonding technology is one of the most effective methods for high-quality thin-film transfer onto different substrates combined with ion implantation processes, laser irradiation, and the removal of the sacrificial layers. In this review, we systematically summarize and introduce applications of the thin films obtained by wafer bonding technology in the fields of electronics, optical devices, on-chip integrated mid-infrared sensors, and wearable sensors. The fabrication of silicon-on-insulator (SOI) wafers based on the Smart CutTM process, heterogeneous integrations of wide-bandgap semiconductors, infrared materials, and electro-optical crystals via wafer bonding technology for thin-film transfer are orderly presented. Furthermore, device design and fabrication progress based on the platforms mentioned above is highlighted in this work. They demonstrate that the transferred films can satisfy high-performance power electronics, molecular sensors, and high-speed modulators for the next generation applications beyond 5G. Moreover, flexible composite structures prepared by the wafer bonding and de-bonding methods towards wearable electronics are reported. Finally, the outlooks and conclusions about the further development of heterogeneous structures that need to be achieved by the wafer bonding technology are discussed.
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Affiliation(s)
- Zhihao Ren
- Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore; (Z.R.); (J.X.); (X.L.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore 117608, Singapore
- National University of Singapore Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China
| | - Jikai Xu
- Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore; (Z.R.); (J.X.); (X.L.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore 117608, Singapore
- National University of Singapore Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China
| | - Xianhao Le
- Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore; (Z.R.); (J.X.); (X.L.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore 117608, Singapore
| | - Chengkuo Lee
- Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore; (Z.R.); (J.X.); (X.L.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore 117608, Singapore
- National University of Singapore Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China
- NUS Graduate School for Integrative Science and Engineering, National University of Singapore, Singapore 117456, Singapore
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21
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Hui X, Yang C, Li D, He X, Huang H, Zhou H, Chen M, Lee C, Mu X. Infrared Plasmonic Biosensor with Tetrahedral DNA Nanostructure as Carriers for Label-Free and Ultrasensitive Detection of miR-155. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2021; 8:e2100583. [PMID: 34155822 PMCID: PMC8373097 DOI: 10.1002/advs.202100583] [Citation(s) in RCA: 31] [Impact Index Per Article: 7.8] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/10/2021] [Revised: 04/19/2021] [Indexed: 05/27/2023]
Abstract
MicroRNAs play an important role in early development, cell proliferation, apoptosis, and cell death, and are aberrantly expressed in many types of cancers. To understand their function and diagnose cancer at an early stage, it is crucial to quantitatively detect microRNA without invasive labels. Here, a plasmonic biosensor based on surface-enhanced infrared absorption (SEIRA) for rapid, label-free, and ultrasensitive detection of miR-155 is reported. This technology leverages metamaterial perfect absorbers stimulating the SEIRA effect to provide up to 1000-fold near-field intensity enhancement over the microRNA fingerprint spectral bands. Additionally, it is discovered that the limit of detection (LOD) of the biosensor can be greatly improved by using tetrahedral DNA nanostructure (TDN) as carriers. By using near-field enhancement of SEIRA and specific binding of TDN, the biosensor achieves label-free detection of miR-155 with a high sensitivity of 1.162% pm-1 and an excellent LOD of 100 × 10-15 m. The LOD is about 5000 times lower than that using DNA single strand as probes and about 100 times lower than that of the fluorescence detection method. This work can not only provide a powerful diagnosis tool for the microRNAs detection but also gain new insights into the field of label-free and ultrasensitive SEIRA-based biosensing.
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Affiliation(s)
- Xindan Hui
- Key Laboratory of Optoelectronic Technology and SystemsMinistry of EducationInternational R&D Center of Micro‐Nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Cheng Yang
- Department of Clinical LaboratorySouthwest HospitalThird Military Medical University (Army Medical University)Chongqing400038China
| | - Dongxiao Li
- Key Laboratory of Optoelectronic Technology and SystemsMinistry of EducationInternational R&D Center of Micro‐Nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Xianming He
- Key Laboratory of Optoelectronic Technology and SystemsMinistry of EducationInternational R&D Center of Micro‐Nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - He Huang
- Key Laboratory of Optoelectronic Technology and SystemsMinistry of EducationInternational R&D Center of Micro‐Nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Hong Zhou
- Key Laboratory of Optoelectronic Technology and SystemsMinistry of EducationInternational R&D Center of Micro‐Nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
- Department of Electrical and Computer EngineeringCenter for Intelligent Sensors and MEMS (CISM)NUS Graduate School for Integrative Sciences and EngineeringNational University of SingaporeSingapore117576Singapore
| | - Ming Chen
- Department of Clinical LaboratorySouthwest HospitalThird Military Medical University (Army Medical University)Chongqing400038China
| | - Chengkuo Lee
- Department of Electrical and Computer EngineeringCenter for Intelligent Sensors and MEMS (CISM)NUS Graduate School for Integrative Sciences and EngineeringNational University of SingaporeSingapore117576Singapore
| | - Xiaojing Mu
- Key Laboratory of Optoelectronic Technology and SystemsMinistry of EducationInternational R&D Center of Micro‐Nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
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Wei J, Li Y, Wang L, Liao W, Dong B, Xu C, Zhu C, Ang KW, Qiu CW, Lee C. Zero-bias mid-infrared graphene photodetectors with bulk photoresponse and calibration-free polarization detection. Nat Commun 2020; 11:6404. [PMID: 33335090 PMCID: PMC7747747 DOI: 10.1038/s41467-020-20115-1] [Citation(s) in RCA: 46] [Impact Index Per Article: 9.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/15/2020] [Accepted: 11/16/2020] [Indexed: 01/27/2023] Open
Abstract
Bulk photovoltaic effect (BPVE), featuring polarization-dependent uniform photoresponse at zero external bias, holds potential for exceeding the Shockley-Queisser limit in the efficiency of existing opto-electronic devices. However, the implementation of BPVE has been limited to the naturally existing materials with broken inversion symmetry, such as ferroelectrics, which suffer low efficiencies. Here, we propose metasurface-mediated graphene photodetectors with cascaded polarization-sensitive photoresponse under uniform illumination, mimicking an artificial BPVE. With the assistance of non-centrosymmetric metallic nanoantennas, the hot photocarriers in graphene gain a momentum upon their excitation and form a shift current which is nonlocal and directional. Thereafter, we demonstrate zero-bias uncooled mid-infrared photodetectors with three orders higher responsivity than conventional BPVE and a noise equivalent power of 0.12 nW Hz−1/2. Besides, we observe a vectorial photoresponse which allows us to detect the polarization angle of incident light with a single device. Our strategy opens up alternative possibilities for scalable, low-cost, multifunctional infrared photodetectors. Here, graphene-based plasmonic metamaterials are used to generate an artificial bulk photovoltaic effect, enabling the realization of mid-infrared photodetectors with enhanced responsivity and calibration-free polarization detection at room temperature.
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Affiliation(s)
- Jingxuan Wei
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore.,Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Ying Li
- Interdisciplinary Center for Quantum Information, State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China
| | - Lin Wang
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
| | - Wugang Liao
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
| | - Bowei Dong
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore.,Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Cheng Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore.,Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore
| | - Chunxiang Zhu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
| | - Kah-Wee Ang
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
| | - Cheng-Wei Qiu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore.
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore. .,Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, 117608, Singapore.
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23
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Zhou H, Hui X, Li D, Hu D, Chen X, He X, Gao L, Huang H, Lee C, Mu X. Metal-Organic Framework-Surface-Enhanced Infrared Absorption Platform Enables Simultaneous On-Chip Sensing of Greenhouse Gases. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2020; 7:2001173. [PMID: 33101855 PMCID: PMC7578855 DOI: 10.1002/advs.202001173] [Citation(s) in RCA: 43] [Impact Index Per Article: 8.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/31/2020] [Revised: 08/04/2020] [Indexed: 05/14/2023]
Abstract
Simultaneous on-chip sensing of multiple greenhouse gases in a complex gas environment is highly desirable in industry, agriculture, and meteorology, but remains challenging due to their ultralow concentrations and mutual interference. Porous microstructure and extremely high surface areas in metal-organic frameworks (MOFs) provide both excellent adsorption selectivity and high gases affinity for multigas sensing. Herein, it is described that integrating MOFs into a multiresonant surface-enhanced infrared absorption (SEIRA) platform can overcome the shortcomings of poor selectivity in multigas sensing and enable simultaneous on-chip sensing of greenhouse gases with ultralow concentrations. The strategy leverages the near-field intensity enhancement (over 1500-fold) of multiresonant SEIRA technique and the outstanding gas selectivity and affinity of MOFs. It is experimentally demonstrated that the MOF-SEIRA platform achieves simultaneous on-chip sensing of CO2 and CH4 with fast response time (<60 s), high accuracy (CO2: 1.1%, CH4: 0.4%), small footprint (100 × 100 µm2), and excellent linearity in wide concentration range (0-2.5 × 104 ppm). Additionally, the excellent scalability to detect more gases is explored. This work opens up exciting possibilities for the implementation of all-in-one, real-time, and on-chip multigas detection as well as provides a valuable toolkit for greenhouse gas sensing applications.
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Affiliation(s)
- Hong Zhou
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
| | - Xindan Hui
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
| | - Dongxiao Li
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
| | - Donglin Hu
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
| | - Xin Chen
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
| | - Xianming He
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
| | - Lingxiao Gao
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
| | - He Huang
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
- Suzhou Institute of Nano-Tech and Nano-Bionics Chinese Academy of Sciences Suzhou 215123 P. R. China
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering National University of Singapore Singapore 117583 Singapore
| | - Xiaojing Mu
- Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, and International R & D Center of Micro-Nano Systems and New Materials Technology Chongqing University Chongqing 400044 P. R. China
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24
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Xu J, Ren Z, Dong B, Liu X, Wang C, Tian Y, Lee C. Nanometer-Scale Heterogeneous Interfacial Sapphire Wafer Bonding for Enabling Plasmonic-Enhanced Nanofluidic Mid-Infrared Spectroscopy. ACS NANO 2020; 14:12159-12172. [PMID: 32812748 DOI: 10.1021/acsnano.0c05794] [Citation(s) in RCA: 26] [Impact Index Per Article: 5.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
As one of the most effective surface-enhanced infrared absorption (SEIRA) techniques, metal-insulator-metal structured metamaterial perfect absorbers possess an ultrahigh sensitivity and selectivity in molecular infrared fingerprint detection. However, most of the localized electromagnetic fields (i.e., hotspots) are confined in the dielectric layer, hindering the interaction between analytes and hotspots. By replacing the dielectric layer with the nanofluidic channel, we develop a sapphire (Al2O3)-based mid-infrared (MIR) hybrid nanofluidic-SEIRA (HN-SEIRA) platform for liquid sensors with the aid of a low-temperature interfacial heterogeneous sapphire wafer direct bonding technique. The robust atomic bonding interface is confirmed by transmission electron microscope observation. We also establish a design methodology for the HN-SEIRA sensor using coupled-mode theory to carry out the loss engineering and experimentally validate its feasibility through the accurate nanogap control. Thanks to the capillary force, liquid analytes can be driven into sensing hotspots without external actuation systems. Besides, we demonstrate an in situ real-time dynamic monitoring process for the acetone molecular diffusion in deionized water. A small concentration change of 0.29% is distinguished and an ultrahigh sensitivity (0.8364 pmol-1 %) is achieved. With the aid of IR fingerprint absorption, our HN-SEIRA platform brings the selectivity of liquid molecules with similar refractive indexes. It also resolves water absorption issues in traditional IR liquid sensors thanks to the sub-nm long light path. Considering the wide transparency window of Al2O3 in MIR (up to 5.2 μm), the HN-SEIRA platform covers more IR absorption range for liquid sensing compared to fused glass commonly used in micro/nanofluidics. Leveraging the aforementioned advantages, our work provides insights into developing a MIR real-time liquid sensing platform with intrinsic IR fingerprint selectivity, label-free ultrahigh sensitivity, and ultralow analyte volume, demonstrating a way toward quantitative molecule identification and dynamic analysis for the chemical and biological reaction processes.
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Affiliation(s)
- Jikai Xu
- State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
| | - Bowei Dong
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
| | - Xinmiao Liu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
| | - Chenxi Wang
- State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
| | - Yanhong Tian
- State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
- NUS Graduate School for Integrative Sciences and Engineering, National University of Singapore, Singapore 117456, Singapore
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25
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Ma Y, Dong B, Lee C. Progress of infrared guided-wave nanophotonic sensors and devices. NANO CONVERGENCE 2020; 7:12. [PMID: 32239361 PMCID: PMC7113365 DOI: 10.1186/s40580-020-00222-x] [Citation(s) in RCA: 34] [Impact Index Per Article: 6.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/24/2019] [Accepted: 03/12/2020] [Indexed: 06/01/2023]
Abstract
Nanophotonics, manipulating light-matter interactions at the nanoscale, is an appealing technology for diversified biochemical and physical sensing applications. Guided-wave nanophotonics paves the way to miniaturize the sensors and realize on-chip integration of various photonic components, so as to realize chip-scale sensing systems for the future realization of the Internet of Things which requires the deployment of numerous sensor nodes. Starting from the popular CMOS-compatible silicon nanophotonics in the infrared, many infrared guided-wave nanophotonic sensors have been developed, showing the advantages of high sensitivity, low limit of detection, low crosstalk, strong detection multiplexing capability, immunity to electromagnetic interference, small footprint and low cost. In this review, we provide an overview of the recent progress of research on infrared guided-wave nanophotonic sensors. The sensor configurations, sensing mechanisms, sensing performances, performance improvement strategies, and system integrations are described. Future development directions are also proposed to overcome current technological obstacles toward industrialization.
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Affiliation(s)
- Yiming Ma
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117576 Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608 Singapore
- NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou, 215123 China
| | - Bowei Dong
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117576 Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608 Singapore
- NUS Graduate School for Integrative Science and Engineering (NGS), National University of Singapore, Singapore, 117456 Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117576 Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608 Singapore
- NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou, 215123 China
- NUS Graduate School for Integrative Science and Engineering (NGS), National University of Singapore, Singapore, 117456 Singapore
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