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For: Banko L, Ries S, Grochla D, Arghavani M, Salomon S, Pfetzing-Micklich J, Kostka A, Rogalla D, Schulze J, Awakowicz P, Ludwig A. Effects of the Ion to Growth Flux Ratio on the Constitution and Mechanical Properties of Cr1-x-Alx-N Thin Films. ACS Comb Sci 2019;21:782-793. [PMID: 31689080 DOI: 10.1021/acscombsci.9b00123] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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