Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference

Efficient and Shape-Sensitive Manipulation of Nanoparticles by Quasi-Bound States in the Continuum Modes in All-Dielectric Metasurfaces

Current optical tweezering techniques are actively employed in the manipulation of nanoparticles, e.g., biomedical cells. However, there is still huge room for improving the efficiency of manipulating multiple nanoparticles of the same composition but different shapes. In this study, we designed an array of high-index all-dielectric disk antennas, each with an asymmetric open slot for such applications. Compared with the plasmonic counterparts, this all-dielectric metasurface has no dissipation loss and, thus, circumvents the Joule heating problem of plasmonic antennas. Furthermore, the asymmetry-induced excitation of quasi-bound states in continuum (QBIC) mode with a low-power intensity (1 mW/µm2) incidence imposes an optical gradient force of -0.31 pN on 8 nm radius nanospheres, which is four orders of magnitude stronger than that provided by the Fano resonance in plasmonic antenna arrays, and three orders of magnitude stronger than that by the Mie resonance in the same metasurface without any slot, respectively. This asymmetry also leads to the generation of large optical moments. At the QBIC resonance wavelength, a value of 88.3 pN-nm will act on the nanorods to generate a rotational force along the direction within the disk surface but perpendicular to the slot. This will allow only nanospheres but prevent the nanorods from accurately entering into the slots, realizing effective sieving between the nanoparticles of the two shapes.

Effective Approach for Fabricating Highly Precise High-Curvature Structural Patterns via Air-Bubble Induction

Developing a new master mold-based patterning technology that can be used to accurately, precisely, and uniformly create large-area micropatterns while controlling the micropatterns of curved structures is essential for promoting innovative developments in various application fields. This study develops a new top-down lithographic process that can effectively produce structural patterns with high curvatures by growing isolated microbubbles in the master pattern holes. The isolated air-pocket lithography (IAL) we developed is based on the controlled behavior of micrometer-sized air pockets trapped between the grooves of the master pattern and the curable polymer. We successfully fabricated a concave array polydimethylsiloxane (PDMS) film and a convex array polymer film. In addition, the IAL mechanism was proven by confirming the expansion process of micrometer-sized air pockets trapped between the deep groove of the silicon master pattern and the PDMS coating film by using optical microscopy images. We successfully obtained complex three-dimensional structural patterns containing both 3D hollow spherical concave and ring-shaped two-dimensional convex patterns. This simple, fast, and effective high-curvature patterning technique is expected to provide innovative solutions for future applications such as nanoelectronics, optical devices, displays, and photovoltaics.

Wrinkled Interfaces: Taking Advantage of Anisotropic Wrinkling to Periodically Pattern Polymer Surfaces

Periodically patterned surfaces can cause special surface properties and are employed as functional building blocks in many devices, yet remaining challenges in fabrication. Advancements in fabricating structured polymer surfaces for obtaining periodic patterns are accomplished by adopting "top-down" strategies based on self-assembly or physico-chemical growth of atoms, molecules, or particles or "bottom-up" strategies ranging from traditional micromolding (embossing) or micro/nanoimprinting to novel laser-induced periodic surface structure, soft lithography, or direct laser interference patterning among others. Thus, technological advances directly promote higher resolution capabilities. Contrasted with the above techniques requiring highly sophisticated tools, surface instabilities taking advantage of the intrinsic properties of polymers induce surface wrinkling in order to fabricate periodically oriented wrinkled patterns. Such abundant and elaborate patterns are obtained as a result of self-organizing processes that are rather difficult if not impossible to fabricate through conventional patterning techniques. Focusing on oriented wrinkles, this review thoroughly describes the formation mechanisms and fabrication approaches for oriented wrinkles, as well as their fine-tuning in the wavelength, amplitude, and orientation control. Finally, the major applications in which oriented wrinkled interfaces are already in use or may be prospective in the near future are overviewed.

Engineering and detection of light scattering directionalities in dewetted nanoresonators through dark-field scanning microscopy

Dewetted, SiGe nanoparticles have been successfully exploited for light management in the visible and near-infrared, although their scattering properties have been so far only qualitatively studied. Here, we demonstrate that the Mie resonances sustained by a SiGe-based nanoantenna under tilted illumination, can generate radiation patterns in different directions. We introduce a novel dark-field microscopy setup that exploits the movement of the nanoantenna under the objective lens to spectrally isolate Mie resonances contribution to the total scattering cross-section during the same measurement. The knowledge of islands' aspect ratio is then benchmarked by 3D, anisotropic phase-field simulations and contributes to a correct interpretation of the experimental data.

Large-scale fabrication of an ultrathin broadband absorber using quasi-random dielectric Mie resonators

Ultrathin broadband absorber maintaining a near-uniform low reflectivity over a broadband wavelength is essential for many optical applications, such as light harvesting and nanoscale imaging. Recently, there has been considerable interest in employing arrays of high-index dielectric Mie resonators on surfaces to trap light and reduce the reflectivity. For such Mie-resonant metasurfaces, however, antireflection properties featuring both a flat low reflectance curve and a wide bandwidth are hard to be satisfied simultaneously, and an efficient large-scale nanofabrication technique rarely exists. Here, we present a high-throughput laser interference induced quasi-random patterning (LIIQP) technique to fabricate quasi-random Mie resonators in large scale. Mie resonators with feature sizes down to sub-100 nm have been fabricated using a 1064 nm laser source. Each Mie resonator concentrates light at its shape-dependent resonant frequency, and all such resonators are arranged quasi-randomly to provide both rich (with broadband Fourier components) and strong (with large intensities) Fourier spectra. Specifically, a near-uniform broadband reflectivity over 400-1100 nm spectrum region has been confined below 3% by fabricating a large-scale ultrathin (around 400 nm) absorber. Our concept and high-throughput fabrication technique allows the rapid production of quasi-random dielectric Mie-resonant metasurfaces in a controllable way, which can be used in various promising applications including thin-film solar cells, display, and imaging.

Security labeling and optical information encryption enabled by laser-printed silicon Mie resonators

Fighting against the falsification of valuable items remains a crucial social-threatening challenge stimulating a never-ending search for novel anti-counterfeiting strategies. The demanding security labels must simultaneously address multiple requirements (high density of the recorded information, high protection degree, etc.) and be realized via scalable and inexpensive technologies. Here, the direct reproducible femtosecond-laser patterning of thin glass-supported amorphous (α-)Si films is proposed for optical information encryption and the scalable and highly reproducible fabrication of security labels composed of Raman-active hemispherical Si nanoparticles (NPs). Laser printing conditions allow the precise control of the diameter of the formed NPs ensuring translation of their dipolar Mie resonance position within the entire visible spectral range. Two-temperature molecular dynamics simulations clarify the origin of α-Si NP formation by rupture of the molten Si layer driven by a negative GPa-range pressure near the liquid-solid interface. Arrangement of the laser-printed Mie-resonant NP allows the creation of hidden security labels offering several easy-to-realize information encryption strategies (for example, local laser-induced post-crystallization or mixing Mie-resonant and non-resonant NPs), additional protection modalities, facile Raman mapping readout and dense information recording (up to 60 000 dots per inch) close to the optical diffraction limit. The developed fabrication strategy is simple, inexpensive, and scalable and can be realized based on cheap Earth-abundant materials and commercially-available equipment justifying its practical applicability and attractiveness for anti-counterfeit and security applications.

Large-Scale Functionalized Metasurface-Based SARS-CoV-2 Detection and Quantification

Plasmonic metasurfaces consist of metal-dielectric interfaces that are excitable at background and leakage resonant modes. The sharp and plasmonic excitation profile of metal-free electrons on metasurfaces at the nanoscale can be used for practical applications in diverse fields, including optoelectronics, energy harvesting, and biosensing. Currently, Fano resonant metasurface fabrication processes for biosensor applications are costly, need clean room access, and involve limited small-scale surface areas that are not easy for accurate sample placement. Here, we leverage the large-scale active area with uniform surface patterns present on optical disc-based metasurfaces as a cost-effective method to excite asymmetric plasmonic modes, enabling tunable optical Fano resonance interfacing with a microfluidic channel for multiple target detection in the visible wavelength range. We engineered plasmonic metasurfaces for biosensing through efficient layer-by-layer surface functionalization toward real-time measurement of target binding at the molecular scale. Further, we demonstrated the quantitative detection of antibodies, proteins, and the whole viral particles of SARS-CoV-2 with a high sensitivity and specificity, even distinguishing it from similar RNA viruses such as influenza and MERS. This cost-effective plasmonic metasurface platform offers a small-scale light-manipulation system, presenting considerable potential for fast, real-time detection of SARS-CoV-2 and pathogens in resource-limited settings.

Tuning Collective Plasmon Resonances of Femtosecond Laser-Printed Metasurface

The optical response of properly excited periodically arranged plasmonic nanostructures is known to demonstrate sharp resonance features associated with high-Q collective modes demanding for various applications in light-matter interaction, filtering and sensing. Meanwhile, practical realization and replication of plasmonic platforms supporting high-Q modes via scalable inexpensive lithography-free approach is still challenging. Here, we justify direct ablation-free irradiation of Si-supported thin Au film by nanojoule-energy femtosecond laser pulses as a single-step and scalable technology for realization of plasmonic metasurfaces supporting collective plasmonic response. Using an adjustable aperture to control and upscale the size of the fabricated nanostructures, nanobumps and nanojets, we demonstrated plasmonic metasurface supporting collective resonances with a moderately high Q-factor (up to 17) and amplitude (up to 45%) within expanded spectral range (1.4-4.5 µm). Vacuum deposition of thin films above the as-fabricated nanostructure arrays was demonstrated to provide fine tuning of the resonance position, also expanding the choice of available materials for realization of plasmonic designs with extended functionality.

Single-Step Fabrication of High-Performance Extraordinary Transmission Plasmonic Metasurfaces Employing Ultrafast Lasers

Plasmonic metasurfaces based on the extraordinary optical transmission (EOT) effect can be designed to efficiently transmit specific spectral bands from the visible to the far-infrared regimes, offering numerous applications in important technological fields such as compact multispectral imaging, biological and chemical sensing, or color displays. However, due to their subwavelength nature, EOT metasurfaces are nowadays fabricated with nano- and micro-lithographic techniques, requiring many processing steps and carrying out in expensive cleanroom environments. In this work, we propose and experimentally demonstrate a novel, single-step process for the rapid fabrication of high-performance mid- and long-wave infrared EOT metasurfaces employing ultrafast direct laser writing. Microhole arrays composing extraordinary transmission metasurfaces were fabricated over an area of 4 mm² in timescales of units of minutes, employing single pulse ablation of 40 nm thick Au films on dielectric substrates mounted on a high-precision motorized stage. We show how by carefully characterizing the influence of only three key experimental parameters on the processed micro-morphologies (namely, laser pulse energy, scan velocity, and beam shaping slit), we can have on-demand control of the optical characteristics of the extraordinary transmission effect in terms of transmission wavelength, quality factor, and polarization sensitivity of the resonances. To illustrate this concept, a set of EOT metasurfaces having different performances and operating in different spectral regimes has been successfully designed, fabricated, and tested. Comparison between transmittance measurements and numerical simulations has revealed that all the fabricated devices behave as expected, thus demonstrating the high performance, flexibility, and reliability of the proposed fabrication method. We believe that our findings provide the pillars for mass production of EOT metasurfaces with on-demand optical properties and create new research trends toward single-step laser fabrication of metasurfaces with alternative geometries and/or functionalities.

Wafer-Scale Functional Metasurfaces for Mid-Infrared Photonics and Biosensing

Metasurfaces have emerged as a breakthrough platform for manipulating light at the nanoscale and enabling on-demand optical functionalities for next-generation biosensing, imaging, and light-generating photonic devices. However, translating this technology to practical applications requires low-cost and high-throughput fabrication methods. Due to the limited choice of materials with suitable optical properties, it is particularly challenging to produce metasurfaces for the technologically relevant mid-infrared spectral range. These constraints are overcome by realizing functional metasurfaces on almost completely transparent free-standing metal-oxide membranes. A versatile nanofabrication process is developed and implemented for highly efficient dielectric and plasmonic mid-infrared metasurfaces with wafer-scale and complementary metal-oxide-semiconductor (CMOS)-compatible manufacturing techniques. The advantages of this method are revealed by demonstrating highly uniform and functional metasurfaces, including high-Q structures enabling fine spectral selectivity, large-area metalenses with diffraction-limited focusing capabilities, and birefringent metasurfaces providing polarization control at record-high conversion efficiencies.  Aluminum plasmonic devices and their integration into microfluidics for real-time and label-free mid-infrared biosensing of proteins and lipid vesicles are further demonstrated. The versatility of this approach and its compatibility with mass-production processes bring infrared metasurfaces markedly closer to commercial applications, such as thermal imaging, spectroscopy, and biosensing.

Laser-printed hemispherical silicon Mie resonators

Subwavelength nanostructures made of high-index low-loss materials have revolutionized the fields of linear and nonlinear nanophotonics, stimulating growing demands for efficient and inexpensive fabrication technologies. Here, we demonstrate high-precision and reproducible printing of hemispherical Si nanoparticles (NPs) via controllable dewetting of glass-supported $\alpha$-Si films driven by a single femtosecond laser pulse. The diameter of the formed nanocrystalline NPs can be fully controlled by initial $\alpha$-Si film thickness as well as lateral size of the laser spot and can be predicted by a simple empirical model based on conservation of energy and mass. A resonant optical response associated with Mie-type resonances supported by hemispherical NPs was confirmed by combining numerical modeling with optical microspectroscopy. Inexpensive and high-performing direct laser printing of nanocrystalline Si Mie resonators with a user-defined arrangement opens a pathway for various applications in optical sensing and nonlinear nanophotonics.

Femtosecond Laser Fabrication of Hybrid Metal-Dielectric Structures with Nonlinear Photoluminescence

Fabrication of hybrid micro- and nanostructures with a strong nonlinear response is challenging and represents a great interest due to a wide range of photonic applications. Usually, such structures are produced by quite complicated and time-consuming techniques. This work demonstrates laser-induced hybrid metal-dielectric structures with strong nonlinear properties obtained by a single-step fabrication process. We determine the influence of several incident femtosecond pulses on the Au/Si bi-layer film on produced structure morphology. The created hybrid systems represent isolated nanoparticles with a height of 250–500 nm exceeding the total thickness of the Au-Si bi-layer. It is shown that fabricated hybrid nanostructures demonstrate enhancement of the SHG signal (up to two orders of magnitude) compared to the initial planar sample and a broadband photoluminescence signal (more than 200 nm in width) in the visible spectral region. We establish the correlation between nonlinear signal and phase composition provided by Raman scattering measurements. Such laser-induced structures have significant potential in optical sensing applications and can be used as components for different nanophotonic devices.

Large-area all-dielectric metasurface fabricated by an anodized aluminum oxide template

Transmissive metasurfaces formed by high-index dielectric materials have received great attention due to its potential in holograms, deflectors, beam converters, and flat lenses. However, a key challenge of all-dielectric metasurfaces is the limited scale and high cost in fabrication, such as electron beam lithography (EBL) and focused ion beam (FIB) lithography. In this paper, for the first time to our knowledge, an anodized aluminum oxide (AAO) template is combined with titanium dioxide (TiO₂) metasurface fabrication with advantages of large area (>2cm²) and low cost. Using the ordered anodized aluminum oxide (AAO) as an evaporation mask, a TiO₂ nanocylinder array is deposited through the AAO mask onto the SiO₂ substrate. Electric and magnetic dipole resonances of TiO₂ metasurface appear in the visible spectrum. Furthermore, we demonstrate the interaction of the CsPbBr_1.5I_1.5 quantum dot (QD) emission with magnetic dipole (MD) resonance of TiO₂ metasurface. Our results reveal that the metasurface exhibits remarkable photoluminescence (PL) enhancement of 25%. Up to now, a TiO₂ metasurface with 2.25-cm²-large area using AAO template method has never been attempted. Different from the metasurfaces fabricated by FIB and EBL, our method offers great ease for large-area metasurface fabrication, which is convenient for metasurface researchers and avoids costly facilities.

Numerical analysis of synchronously pumped solid-state Raman lasers

Considering the spatial distribution of laser beams and phonon waves, the SRS coupling wave equations in the transient regime are derived and normalized for the first time. The synchronously pumped solid-state Raman laser is simulated numerically to investigate the influences of the cavity length detuning, output coupling rate, dispersion, Raman gain and dephasing time of Raman mode on laser performances. It is found that the intensive pulse compression of first Stokes laser in synchronously pumped solid-state Raman laser stems from pulse width gain narrowing and intensity oscillation effects. The cavity length detuning, dispersion, Raman gain and dephasing time considerably affect the pulse width gain narrowing and intensity oscillation processes. The theoretical results can help the design and optimization of synchronously pumped solid-state Raman laser to generate ultrafast Raman laser output efficiently.

Facile construction of large-area periodic Ag-Au composite nanostructure and its reliable SERS performance

With the maturity of nano-manufacturing technology, nano-materials with excellent surface-enhanced Raman scattering (SERS) activities have evolved from homogeneous materials to composite ones, but the structural uniformity of composite materials has not been effectively improved. We successfully obtained a series of Ag-Au composite nanostructures with high SERS activity by using a two-step deposition and confined spheroidization process and one-step in-situ substitution method. Anodized alumina templates with uniform size distribution were employed as the initial confined template for spheroidizing Ag film into periodic Ag nanoparticles (Ag NPs). The composite nanostructure was simply obtained after a one-step in-situ galvanic reaction based on the Ag NPs arrays. The results showed that the prepared Ag-Au composite nanostructure could be used as reliable SERS substrates with low relative standard deviation value of ∼6.25% for crystal violet molecules. Compared with previous reports, this one-step route greatly simplifies the process of preparing periodic composite nanomaterials and provides a new idea for constructing multi-component metal nanostructures.