Piezo-Actuated One-Axis Vibrational Patterning for Mold-Free Continuous Fabrication of High-Precision Period-Programmable Micro- and Nanopatterns

Azimuthal rotation-controlled nanoinscribing for continuous patterning of period- and shape-tunable asymmetric nanogratings

We present an azimuthal-rotation-controlled dynamic nanoinscribing (ARC-DNI) process for continuous and scalable fabrication of asymmetric nanograting structures with tunable periods and shape profiles. A sliced edge of a nanograting mold, which typically has a rectangular grating profile, slides over a polymeric substrate to induce its burr-free plastic deformation into a linear nanopattern. During this continuous nanoinscribing process, the "azimuthal angle," that is, the angle between the moving direction of the polymeric substrate and the mold's grating line orientation, can be controlled to tailor the period, geometrical shape, and profile of the inscribed nanopatterns. By modulating the azimuthal angle, along with other important ARC-DNI parameters such as temperature, force, and inscribing speed, we demonstrate that the mold-opening profile and temperature- and time-dependent viscoelastic polymer reflow can be controlled to fabricate asymmetric, blazed, and slanted nanogratings that have diverse geometrical profiles such as trapezoidal, triangular, and parallelogrammatic. Finally, period- and profile-tunable ARC-DNI can be utilized for the practical fabrication of diverse optical devices, as is exemplified by asymmetric diffractive optical elements in this study.

Metasurface-empowered spectral and spatial light modulation for disruptive holographic displays

The holographic display, one of the most realistic ways to reconstruct optical images in three-dimensional (3D) space, has gained a lot of attention as a next-generation display platform for providing deeper immersive experiences to users. So far, diffractive optical elements (DOEs) and spatial light modulators (SLMs) have been used to generate holographic images by modulating electromagnetic waves at each pixel. However, such architectures suffer from limitations in terms of having a resolution of only a few microns and the bulkiness of the entire optical system. In this review, we describe novel metasurfaces-based nanophotonic platforms that have shown exceptional control of electromagnetic waves at the subwavelength scale as promising candidates to overcome existing restrictions, while realizing flat optical devices. After introducing the fundamentals of metasurfaces in terms of spatial and spectral wavefront modulation, we present a variety of multiplexing approaches for high-capacity and full-color metaholograms exploiting the multiple properties of light as an information carrier. We then review tunable metaholograms using active materials modulated by several external stimuli. Afterward, we discuss the integration of metasurfaces with other optical elements required for future 3D display platforms in augmented/virtual reality (AR/VR) displays such as lenses, beam splitters, diffusers, and eye-tracking sensors. Finally, we address the challenges of conventional nanofabrication methods and introduce scalable preparation techniques that can be applied to metasurface-based nanophotonic technologies towards commercially and ergonomically viable future holographic displays.

Parametric scheme for rapid nanopattern replication via electrohydrodynamic instability

Electrohydrodynamic (EHD) instability patterning exhibits substantial potential for application as a next-generation lithographic technique; nevertheless, its development continues to be hindered by the lack of process parameter controllability, especially when replicating sub-microscale pattern features. In this paper, a new parametric guide is introduced. It features an expanded range of valid parameters by increasing the pattern growth velocity, thereby facilitating reproducible EHD-driven patterning for perfect nanopattern replication. Compared with conventional EHD-driven patterning, the rapid patterning approach not only shortens the patterning time but also exhibits enhanced scalability for replicating small and geometrically diverse features. Numerical analyses and simulations are performed to elucidate the interplay between the pattern growth velocity, fidelity of the replicated features, and boundary between the domains of suitable and unsuitable parametric conditions in EHD-driven patterning. The developed rapid route facilitates nanopattern replication using EHD instability with a wide range of suitable parameters and further opens up many opportunities for device applications using tailor-made nanostructures in an effective and straightforward manner.

1/τ_m-dependent electrohydrodynamic replication of a hexagonally ordered hole array nanopattern by adjusting the filling ratio. As the 1/τ_m increases, the morphology evolves into the perfectly replicated hole features with increasing filling ratio.