Large-Area All-Carbon Nanocapacitors from Graphene and Carbon Nanomembranes

Amorphous Carbon Films for Electronic Applications

While various crystalline carbon allotropes, including graphene, have been actively investigated, amorphous carbon (a-C) thin films have received relatively little attention. The a-C is a disordered form of carbon bonding with a broad range of the CC bond length and bond angle. Although accurate structural analysis and theoretical approaches are still insufficient, reproducible structure-property relationships have been accumulated. As the a-C thin film is now adapted as a hardmask in the semiconductor industry and new properties are reported continuously, expectations are growing that it can be practically used as active materials beyond as a simple sacrificial layer. In this perspective review article, after a brief introduction to the synthesis and properties of the a-C thin films, their potential practical applications are proposed, including hardmasks, extreme ultraviolet (EUV) pellicles, diffusion barriers, deformable electrodes and interconnects, sensors, active layers, electrodes for energy, micro-supercapacitors, batteries, nanogenerators, electromagnetic interference (EMI) shielding, and nanomembranes. The article ends with a discussion on the technological challenges in a-C thin films.

Evaluation of Charge and Energy Storage in Molecular Nanocapacitors

A model is presented herein for the evaluation of stored charge and energy in molecular-scale capacitors composed of parallel nanosheets. In this model, the nanocapacitor is exposed to an external electric field, and the charging process is considered as a three-stage mechanism, including isolated, exposed, and frozen stages, where each stage possesses its own Hamiltonian and wavefunction. In this way, the third stage's Hamiltonian is the same as that of the first stage, while its wavefunction is frozen to that of the second stage, and consequently, stored energy can be calculated as the expectation value of second stage's wavefunction with respect to the first stage's Hamiltonian. Electron density is then integrated over half-space, i.e., the space separated by a virtual plane located at the middle and parallel to electrodes, to reveal stored charge on nanosheets. The formalism is applied to two parallel hexagonal graphene flakes as nanocapacitor's electrodes, and results are compared with experimental values of similar systems.

Investigation of electron-induced cross-linking of self-assembled monolayers by scanning tunneling microscopy

Ultrathin membranes with subnanometer pores enabling molecular size-selective separation were generated on surfaces via electron-induced cross-linking of self-assembled monolayers (SAMs). The evolution of p-terphenylthiol (TPT) SAMs on Au(111) surfaces into cross-linked monolayers was observed with a scanning tunneling microscope. As the irradiation dose was increased, the cross-linked regions continued to grow and a large number of subnanometer voids appeared. Their equivalent diameter is 0.5 ± 0.2 nm and the areal density is ≈1.7 × 10¹⁷ m^-2. Supported by classical molecular dynamics simulations, we propose that these voids may correspond to free volumes inside a cross-linked monolayer.

Mechanics of free-standing inorganic and molecular 2D materials

The discovery of graphene has triggered a great interest in inorganic as well as molecular two-dimensional (2D) materials. In this review, we summarize recent progress in the mechanical characterization of free-standing 2D materials, such as graphene, hexagonal boron nitride (hBN), transition metal-dichalcogenides, MXenes, black phosphor, carbon nanomembranes (CNMs), 2D polymers, 2D metal organic frameworks (MOFs) and covalent organic frameworks (COFs). Elastic, fracture, bending and interfacial properties of these materials have been determined using a variety of experimental techniques including atomic force microscopy based nanoindentation, in situ tensile/fracture testing, bulge testing, Raman spectroscopy, Brillouin light scattering and buckling-based metrology. Additionally, we address recent advances of 2D materials in a variety of mechanical applications, including resonators, microphones and nanoelectromechanical sensors. With the emphasis on progress and challenges in the mechanical characterization of inorganic and molecular 2D materials, we expect a continuous growth of interest and more systematic experimental work on the mechanics of such ultrathin nanomaterials.

Controlled Electron-Induced Fabrication of Metallic Nanostructures on 1 nm Thick Membranes

Functional hybrids comprising metallic nanostructures connected and protected by nonmetallic 2D materials are envisioned as miniaturized components for applications in optics, electronics, and magnetics. A promising strategy to build such elements is the direct writing of metallic nanostructures by focused electron beam induced processing (FEBIP) onto insulating 2D materials. Carbon nanomembranes (CNMs), produced via electron-induced crosslinking of self-assembled monolayers (SAMs), are ultrathin and flexible films; their thickness as well as their mechanical and electrical properties are determined by the specific choice of self-assembling molecules. In this work, functionalized CNMs are produced via electron beam induced deposition of Fe(CO)₅ onto terphenylthiol SAMs. Clean iron nanostructures of arbitrary size and shape are deposited on the SAMs, and the SAMs are then crosslinked into CNMs. The functionalized CNMs are then transferred onto either solid substrates or onto grids to obtain freestanding metal/CNM hybrid structures. Iron nanostructures with predefined shapes on top of 1 nm thin freestanding CNMs are realized; they stay intact during the fabrication procedures and remain mechanically stable. Combining the ease and versatility of SAMs with the flexibility of FEBIP thus leads to a route for the fabrication of functional hybrid nanostructures.

Selective Diffusion of CO2 and H2O through Carbon Nanomembranes in Aqueous Solution as Studied with Radioactive Tracers

Nanometer-thin carbon nanomembranes (CNMs) are promising candidates for efficient separation processes due to their thinness and intrinsic well-defined pore structure. This work used radioactive tracer molecules to characterize diffusion of [³H]H₂O, [¹⁴C]NaHCO₃, and [³²P]H₃PO₄ through a p-[1,1',4',1″]-terphenyl-4-thiol (TPT) CNM in aqueous solution. The experimental setup consisted of two microcompartments separated by a CNM-covered micropore. Tracers were added to one compartment and their time-dependent increase in the other compartment was monitored. Occurring concentration polarization and outgassing effects were fully considered using a newly developed mathematical model. Our findings are consistent with previous gas/vapor permeation measurements. The high sensitivity toward a small molecule flow rate enables quantification of diffusion through micron-sized CNMs in aqueous solution. Furthermore, the results allow unambiguous distinction between intact and defective membranes. Even for extremely small membrane areas, this method allows detailed insight into the transmembrane transport properties, which is crucial for the design of 2D-separation membranes.

Optically Triggered Control of the Charge Carrier Density in Chemically Functionalized Graphene Field Effect Transistors

Field effect transistors (FETs) based on 2D materials are of great interest for applications in ultrathin electronic and sensing devices. Here we demonstrate the possibility to add optical switchability to graphene FETs (GFET) by functionalizing the graphene channel with optically switchable azobenzene molecules. The azobenzene molecules were incorporated to the GFET channel by building a van der Waals heterostructure with a carbon nanomembrane (CNM), which is used as a molecular interposer to attach the azobenzene molecules. Under exposure with 365 nm and 455 nm light, azobenzene molecules transition between cis and trans molecular conformations, respectively, resulting in a switching of the molecular dipole moment. Thus, the effective electric field acting on the GFET channel is tuned by optical stimulation and the carrier density is modulated.

Magnetic origami creates high performance micro devices

Self-assembly of two-dimensional patterned nanomembranes into three-dimensional micro-architectures has been considered a powerful approach for parallel and scalable manufacturing of the next generation of micro-electronic devices. However, the formation pathway towards the final geometry into which two-dimensional nanomembranes can transform depends on many available degrees of freedom and is plagued by structural inaccuracies. Especially for high-aspect-ratio nanomembranes, the potential energy landscape gives way to a manifold of complex pathways towards misassembly. Therefore, the self-assembly yield and device quality remain low and cannot compete with state-of-the art technologies. Here we present an alternative approach for the assembly of high-aspect-ratio nanomembranes into microelectronic devices with unprecedented control by remotely programming their assembly behavior under the influence of external magnetic fields. This form of magnetic Origami creates micro energy storage devices with excellent performance and high yield unleashing the full potential of magnetic field assisted assembly for on-chip manufacturing processes.

Despite the potential of self-assembly strategies for fabricating 3D micro-electronic devices, technological limitations prohibit widespread industrial adoption. Here, the authors report the magnetic field-assisted Origami-based assembly of high-performance devices with high yield.

Bottom-Up Synthesis of Graphene Monolayers with Tunable Crystallinity and Porosity

We present a method for a bottom-up synthesis of atomically thin graphene sheets with tunable crystallinity and porosity using aromatic self-assembled monolayers (SAMs) as molecular precursors. To this end, we employ SAMs with pyridine and pyrrole constituents on polycrystalline copper foils and convert them initially into molecular nanosheets-carbon nanomembranes (CNMs)- via low-energy electron irradiation induced cross-linking and then into graphene monolayers via pyrolysis. As the nitrogen atoms are leaving the nanosheets during pyrolysis, nanopores are generated in the formed single-layer graphene. We elucidate the structural changes upon the cross-linking and pyrolysis down to the atomic scale by complementary spectroscopy and microscopy techniques including X-ray photoelectron and Raman spectroscopy, low energy electron diffraction, atomic force, helium ion, and high-resolution transmission electron microscopy, and electrical transport measurements. We demonstrate that the crystallinity and porosity of the formed graphene can be adjusted via the choice of molecular precursors and pyrolysis temperature, and we present a kinetic growth model quantitatively describing the conversion of molecular CNMs into graphene. The synthesized nanoporous graphene monolayers resemble a percolated network of graphene nanoribbons with a high charge carrier mobility (∼600 cm²/(V s)), making them attractive for implementations in electronic field-effect devices.