Performance Synthesis of Multiple Input−Multiple Output (MIMO) Exponentially Weighted Moving Average (EWMA) Run-to-Run Controllers with Metrology Delay

Takagi-Sugeno model based analysis of EWMA RtR control of batch processes with stochastic metrology delay and mixed products

In many batch-based industrial manufacturing processes, feedback run-to-run control is used to improve production quality. However, measurements may be expensive and cannot always be performed online. Thus, the measurement delay always exists. The metrology delay will affect the stability and performance of the process. Moreover, since quality measurements are performed offline, delay is not fixed but is stochastic in nature. In this paper, a modeling approach Takagi-Sugeno (T-S) model is presented to handle stochastic metrology delay in both single-product and mixed-product processes. Based on the Markov characteristics of the delay, the membership of the T-S model is derived. Performance indices such as the mean and the variance of the closed-loop output of the exponentially weighted moving average (EWMA) control algorithm can be derived. A steady-state error of the process output always exists, which leads the output deviating from the target. To remove the steady-state error, an algorithm called compensatory EWMA run-to-run (COM-EWMA-RtR) algorithm is proposed. The validity of the T-S model analysis and the efficiency of the proposed COM-EWMA-RtR algorithm are confirmed by simulation.