Thermally depolymerizable polycarbonates. 2. Synthesis of novel linear tertiary copolycarbonates by phase-transfer catalysis

Aqueous Developable and CO2-Sourced Chemical Amplification Photoresist with High Performance

Seeking high-performance photoresists is an important item for semiconductor industry due to the continuous miniaturization and intelligentization of integrated circuits. Polymer resin containing carbonate group has many desirable properties, such as high transmittance, acid sensitivity and chemical formulation, thus serving as promising photoresist material. In this work, a series of aqueous developable CO2-sourced polycarbonates (CO2-PCs) were produced via alternating copolymerization of CO2 and epoxides bearing acid-cleavable cyclic acetal groups in the presence of tetranuclear organoborane catalyst. The produced CO2-PCs were investigated as chemical amplification resists in deep ultraviolet (DUV) lithography. Under the catalysis of photogenerated acid, the acetal (ketal) groups in CO2-PC were hydrolysed into two equivalents of hydroxyl groups, which change the exposed area from hydrophobicity to hydrophilicity, thus enabling the exposed area to be developed with water. Through normalized remaining thickness analysis, the optimal CO2-derived resist achieved a remarkable sensitivity of 1.9 mJ/cm2, a contrast of 7.9, a favorable resolution (750 nm, half pitch), and a good etch resistance (38 % higher than poly(tert-butyl acrylate)). Such performances outperform commercial KrF and ArF chemical amplification resists (i.e., polyhydroxystyrene-derived and polymethacrylate-based resists), which endows broad application prospects in the field of DUV (KrF and ArF) and extreme ultraviolet (EUV) lithography for nanomanufacturing.

Non-isocyanate Polyurethanes from 1,1'-Carbonyldiimidazole: A Polycondensation Approach

1,1'-Carbonyldiimidazole (CDI) provides a platform to generate high molecular weight polyurethanes from industrially relevant diols and diamines. CDI, which is described in the literature for its use in amidation and functionalization reactions, enables the production of well-defined and stable polyurethane precursors, thus eliminating the need for isocyanates. Herein, the functionalization of 1,4-butanediol with CDI yields an electrophilic biscarbamate, bis-carbonylimidazolide (BCI), which is suitable for further step-growth polymerization in the presence of amines. Elevated reaction temperatures enable the solvent-, catalyst-, and isocyanate-free polycondensation reaction between the BCI monomer and various diamines. The thermoplastic polyurethanes produced from this reaction demonstrate high thermal stability, tunable glass transition temperatures based on incorporation of flexible polyether segments, and mechanically ductile thin films. CDI functionalized diols will allow the preparation of diverse polyurethanes without the use of isocyanate-containing monomers.

Design of a High-Performance Dismantlable Adhesion System Using Pressure-Sensitive Adhesive Copolymers of 2-Hydroxyethyl Acrylate Protected with tert-Butoxycarbonyl Group in the Presence of Cross-Linker and Lewis Acid

A dismantlable adhesion system satisfies both a strong bonding strength during use and a quick debonding process on demand in response to an external stimulus as a trigger for dismantling. In this study, we synthesized acrylate copolymers consisting of 2-(tert-butoxycarbonyloxy)ethyl acrylate (BHEA), 2-ethylhexyl acrylate (2EHA), and 2-hydroxyethyl acrylate (HEA) as the repeating units and evaluated the properties as dismantlable adhesives. First, the thermal degradation behavior of the obtained polymers was investigated by thermogravimetric analysis and IR spectroscopy. The BHEA-containing polymers were thermally stable during heating at a temperature below 150 °C, but they rapidly degraded, i.e., the deprotection of the tert-butoxycarbonyl groups occurred during heating at 200 °C. The onset temperatures for the deprotection depended on the BHEA and HEA contents and their sequence structures because the hydroxy group in the side chain accelerated the deprotection via an autocatalytic reaction mechanism. Shear holding power and 180° peel tests were carried out with the pressure-sensitive adhesive tapes using the BHEA-containing copolymers as the adhesive materials. The copolymers consisting of the BHEA, 2EHA, and HEA units with 25.7, 35.0, and 39.3 mol %, respectively, exhibited the highest adhesion strength and the subsequent quick reduction of the adhesion strength by heating during the dismantling process. The addition of hexamethylene diisocyanate as the cross-linker and Zn(acac)2 as the Lewis acid to the adhesive polymers was demonstrated to be valid for the design of high-performance dismantlable adhesion systems. A change in the rheological properties during the dismantling process was important for a quick response and selective interfacial failure between the substrate and the adhesive.

Photopatterning of Block Copolymer Thin Films

Block copolymers are potentially useful materials for large-area 2-D patterning applications due to their spontaneous self-assembly into sub-50 nm domains. However, most thin film engineering applications require patterns of prescribed size, shape, and organization. Photopatterning is a logical choice for manipulating block copolymer features since advanced lithography tools can pattern areas as small as a single block copolymer domain. By exposing either the block copolymer or a responsive interfacial surface to patterned radiation, precise control over placement, orientation, alignment, and selective development of block copolymer domains can be achieved. This Viewpoint highlights some of the recent research in photopatterning block copolymer thin films and identifies areas of future opportunity.

High-activity, single-site catalysts for the alternating copolymerization of CO2 and propylene oxide

Despite recent advances regarding catalysts for CO2/epoxide copolymerization, the development of high-activity catalysts for alternating polymerization of CO2 and commodity epoxides, such as propylene oxide, remains a challenge. A new class of unsymmetrically substituted beta-diiminate zinc complexes is reported that exhibits unprecedented activity for CO2/propylene oxide copolymerization. The polymers formed are of high molecular weight (Mn approximately 35 kg/mol) and have narrow polydispersities (PDI approximately 1.1), consistent with a living polymerization.

Ab initio and experimental study on thermally degradable polycarbonates: the effect of substituents on the reaction rates

Thermal elimination reactions on polycarbonates are investigated from both theoretical and experimental points of view, to obtain insight into the microscopic aspects that influence the reaction mechanism and rates. In particular, attention is focused on the influence of the type of substituents in the polymer chain on the reaction rates. Ab initio density functional theory calculations are performed on a series of model compound systems for the polycarbonates under study, in particular carbonates differing by the groups attached at the alpha and beta carbon atoms. Reactants, products, and transition states are optimized at the B3LYP/6-311g level of theory. The structures of the activated complex give insight into the mechanistic details of this type of E(i) elimination reactions. The C(alpha)-O bond dissociates before the C(beta)-H bond, developing some carbocation character in the transition state on the C(alpha) atom. The kinematics of the thermal decomposition reactions have been studied by means of transition state theory by construction of the microscopic partition functions. It turns out that the rates of the E(i) elimination reactions are increased by the presence of those substituents on the C(alpha) and C(beta) carbon atoms which are stabilizing the carbocation character in the transition state. In a second part, degradation temperatures have been experimentally measured for some polycarbonates through thermogravimetric analysis. It is investigated whether the relative rates of the model compound carbonate systems are representative of the behavior of the thermal degradation temperatures in polycarbonates. The study as presented here proves that ab initio calculations on small model systems, which are representative for the active area of the degradation process in polycarbonates, can provide insight into the principal ingredients that govern the reaction rates.